CA1049662A - Appareil et methode pour le transfert de pastilles de semiconducteurs - Google Patents
Appareil et methode pour le transfert de pastilles de semiconducteursInfo
- Publication number
- CA1049662A CA1049662A CA270,412A CA270412A CA1049662A CA 1049662 A CA1049662 A CA 1049662A CA 270412 A CA270412 A CA 270412A CA 1049662 A CA1049662 A CA 1049662A
- Authority
- CA
- Canada
- Prior art keywords
- holder
- wafers
- boat
- rod
- etch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA270,412A CA1049662A (fr) | 1977-01-25 | 1977-01-25 | Appareil et methode pour le transfert de pastilles de semiconducteurs |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA270,412A CA1049662A (fr) | 1977-01-25 | 1977-01-25 | Appareil et methode pour le transfert de pastilles de semiconducteurs |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1049662A true CA1049662A (fr) | 1979-02-27 |
Family
ID=4107812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA270,412A Expired CA1049662A (fr) | 1977-01-25 | 1977-01-25 | Appareil et methode pour le transfert de pastilles de semiconducteurs |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1049662A (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0250990A1 (fr) * | 1986-06-26 | 1988-01-07 | Fujitsu Limited | Dispositif de transfert pour galettes |
| EP1480256A3 (fr) * | 1995-06-26 | 2004-12-15 | Miraial Co., Ltd. | Conteneur support de plaques minces |
| CN110921277A (zh) * | 2019-12-25 | 2020-03-27 | 曾玲 | 一种倒片装置及倒片方法 |
-
1977
- 1977-01-25 CA CA270,412A patent/CA1049662A/fr not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0250990A1 (fr) * | 1986-06-26 | 1988-01-07 | Fujitsu Limited | Dispositif de transfert pour galettes |
| US4744715A (en) * | 1986-06-26 | 1988-05-17 | Fujitsu Limited | Wafer transfer apparatus |
| EP1480256A3 (fr) * | 1995-06-26 | 2004-12-15 | Miraial Co., Ltd. | Conteneur support de plaques minces |
| CN110921277A (zh) * | 2019-12-25 | 2020-03-27 | 曾玲 | 一种倒片装置及倒片方法 |
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