CA1052011A - Microscope electronique stereoscopique - Google Patents
Microscope electronique stereoscopiqueInfo
- Publication number
- CA1052011A CA1052011A CA300,301A CA300301A CA1052011A CA 1052011 A CA1052011 A CA 1052011A CA 300301 A CA300301 A CA 300301A CA 1052011 A CA1052011 A CA 1052011A
- Authority
- CA
- Canada
- Prior art keywords
- microprobe
- scan
- crt
- specimen
- stereo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004626 scanning electron microscopy Methods 0.000 title 1
- 239000002245 particle Substances 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 abstract description 5
- 239000000523 sample Substances 0.000 description 18
- 238000010894 electron beam technology Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 208000001692 Esotropia Diseases 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 238000001424 field-emission electron microscopy Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 239000013643 reference control Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/565,970 US3986027A (en) | 1975-04-07 | 1975-04-07 | Stereo scanning microprobe |
| CA249,523A CA1044818A (fr) | 1975-04-07 | 1976-04-05 | Microscope electronique a balayage stereo |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1052011A true CA1052011A (fr) | 1979-04-03 |
Family
ID=25668261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA300,301A Expired CA1052011A (fr) | 1975-04-07 | 1978-04-03 | Microscope electronique stereoscopique |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1052011A (fr) |
-
1978
- 1978-04-03 CA CA300,301A patent/CA1052011A/fr not_active Expired
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102484025B (zh) | 带电粒子束装置以及图像显示方法 | |
| JPS6246943B2 (fr) | ||
| EP0261866B1 (fr) | Appareils à balayage par faisceau de particules chargées | |
| US3833811A (en) | Scanning electron microscope with improved means for focusing | |
| US4041311A (en) | Scanning electron microscope with color image display | |
| US3702398A (en) | Electron beam apparatus | |
| US3585382A (en) | Stereo-scanning electron microscope | |
| US3986027A (en) | Stereo scanning microprobe | |
| US4125772A (en) | Scanning electron microscope with eddy-current compensation | |
| US3657593A (en) | Electron microscopy | |
| CA1052011A (fr) | Microscope electronique stereoscopique | |
| SU572230A3 (ru) | Сканирующа система микроскопа | |
| JPS5854784Y2 (ja) | 立体走査電子顕微鏡 | |
| US3786271A (en) | Electron microscopes and micro-analysers | |
| US3927320A (en) | Method and apparatus for deriving from a scanning electron microscope signals that can be displayed stereoscopically | |
| US3767926A (en) | Field emission scanning microscope display | |
| JPS62198043A (ja) | 立体観察装置 | |
| USRE28153E (en) | Field emission scanning microscope display | |
| JPS62252055A (ja) | 立体視電子顕微鏡 | |
| Fan et al. | Stereoscopy by tilted illumination in transmission electron microscopy | |
| JPH0221549A (ja) | 走査電子顕微鏡 | |
| Breton et al. | A dynamic real time 3-D measurement technique for IC inspection | |
| SU1488100A1 (ru) | Устройство дл электронно-лучевой сварки | |
| JPS60138252U (ja) | 粒子線装置における試料画像表示装置 | |
| JPH0654638B2 (ja) | 荷電粒子線装置における軸合わせ装置 |