CA1052855A - Tube a rayons cathodiques couleur - Google Patents
Tube a rayons cathodiques couleurInfo
- Publication number
- CA1052855A CA1052855A CA301,656A CA301656A CA1052855A CA 1052855 A CA1052855 A CA 1052855A CA 301656 A CA301656 A CA 301656A CA 1052855 A CA1052855 A CA 1052855A
- Authority
- CA
- Canada
- Prior art keywords
- master
- mask
- faceplate
- pattern
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012216 screening Methods 0.000 claims abstract description 184
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 136
- 238000000034 method Methods 0.000 claims abstract description 109
- 238000004519 manufacturing process Methods 0.000 claims abstract description 84
- 239000007795 chemical reaction product Substances 0.000 claims abstract description 58
- 238000000151 deposition Methods 0.000 claims abstract description 29
- 230000002093 peripheral effect Effects 0.000 claims abstract description 5
- 238000000576 coating method Methods 0.000 claims description 99
- 239000011248 coating agent Substances 0.000 claims description 97
- 229920002120 photoresistant polymer Polymers 0.000 claims description 68
- 239000000463 material Substances 0.000 claims description 27
- 238000010894 electron beam technology Methods 0.000 claims description 22
- 238000005530 etching Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 238000007493 shaping process Methods 0.000 claims 5
- 238000000295 emission spectrum Methods 0.000 claims 1
- 230000000875 corresponding effect Effects 0.000 abstract description 27
- 239000000543 intermediate Substances 0.000 description 115
- 230000008569 process Effects 0.000 description 39
- 238000010586 diagram Methods 0.000 description 19
- 239000011521 glass Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 11
- 239000000725 suspension Substances 0.000 description 11
- 238000010276 construction Methods 0.000 description 10
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 230000005855 radiation Effects 0.000 description 9
- 241000490229 Eucephalus Species 0.000 description 8
- 238000000429 assembly Methods 0.000 description 8
- 230000000712 assembly Effects 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000005755 formation reaction Methods 0.000 description 8
- 239000004372 Polyvinyl alcohol Substances 0.000 description 7
- 229920002451 polyvinyl alcohol Polymers 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 6
- 239000011651 chromium Substances 0.000 description 6
- 238000002508 contact lithography Methods 0.000 description 6
- 230000006872 improvement Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000007540 photo-reduction reaction Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 238000006722 reduction reaction Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 102100034916 Tetraspanin-33 Human genes 0.000 description 4
- 101710132095 Tetraspanin-33 Proteins 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000004513 sizing Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UOACKFBJUYNSLK-XRKIENNPSA-N Estradiol Cypionate Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H](C4=CC=C(O)C=C4CC3)CC[C@@]21C)C(=O)CCC1CCCC1 UOACKFBJUYNSLK-XRKIENNPSA-N 0.000 description 2
- 238000010960 commercial process Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VOXZDWNPVJITMN-ZBRFXRBCSA-N 17β-estradiol Chemical compound OC1=CC=C2[C@H]3CC[C@](C)([C@H](CC4)O)[C@@H]4[C@@H]3CCC2=C1 VOXZDWNPVJITMN-ZBRFXRBCSA-N 0.000 description 1
- 241000132092 Aster Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 241000735235 Ligustrum vulgare Species 0.000 description 1
- CLSVJBIHYWPGQY-UHFFFAOYSA-N [3-(2,5-dimethylphenyl)-8-methoxy-2-oxo-1-azaspiro[4.5]dec-3-en-4-yl] ethyl carbonate Chemical compound CCOC(=O)OC1=C(C=2C(=CC=C(C)C=2)C)C(=O)NC11CCC(OC)CC1 CLSVJBIHYWPGQY-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 229940047127 fiore Drugs 0.000 description 1
- 239000004833 fish glue Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- RUTXIHLAWFEWGM-UHFFFAOYSA-H iron(3+) sulfate Chemical compound [Fe+3].[Fe+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O RUTXIHLAWFEWGM-UHFFFAOYSA-H 0.000 description 1
- 229910000360 iron(III) sulfate Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010672 photosynthesis Methods 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000007666 vacuum forming Methods 0.000 description 1
Landscapes
- Electrodes For Cathode-Ray Tubes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/535,780 US3989524A (en) | 1974-12-23 | 1974-12-23 | Method for manufacturing a color cathode ray tube using mask and screen masters |
| CA242,176A CA1051086A (fr) | 1974-12-23 | 1975-12-19 | Methode et appareil de fabrication de tubes a rayons cathodiques couleurs |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1052855A true CA1052855A (fr) | 1979-04-17 |
Family
ID=25668172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA301,656A Expired CA1052855A (fr) | 1974-12-23 | 1978-04-21 | Tube a rayons cathodiques couleur |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1052855A (fr) |
-
1978
- 1978-04-21 CA CA301,656A patent/CA1052855A/fr not_active Expired
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