CA1080848A - Circuits a transfert de charge - Google Patents

Circuits a transfert de charge

Info

Publication number: CA1080848A
Authority: CA; Canada
Prior art keywords: region; electrode; charge; substrate; coupled
Prior art date: 1971-01-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA191,656A

Other languages

English (en)

Inventor

Walter F. Kosonocky

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

RCA Corp

Original Assignee

RCA Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1971-01-14

Filing date

1974-02-04

Publication date

1980-07-01

1971-12-09 Priority claimed from CA129,812A external-priority patent/CA1080847A/fr

1974-02-04 Application filed by RCA Corp filed Critical RCA Corp

1974-02-04 Priority to CA191,656A priority Critical patent/CA1080848A/fr

1980-07-01 Application granted granted Critical

1980-07-01 Publication of CA1080848A publication Critical patent/CA1080848A/fr

Status Expired legal-status Critical Current

Links

239000000758 substrate Substances 0.000 claims abstract description 146
238000003860 storage Methods 0.000 claims abstract description 39
239000002800 charge carrier Substances 0.000 claims description 23
230000008878 coupling Effects 0.000 claims description 23
238000010168 coupling process Methods 0.000 claims description 23
238000005859 coupling reaction Methods 0.000 claims description 23
239000004065 semiconductor Substances 0.000 claims description 16
239000000463 material Substances 0.000 claims description 11
230000002441 reversible effect Effects 0.000 claims description 8
229910052751 metal Inorganic materials 0.000 claims description 7
239000002184 metal Substances 0.000 claims description 7
229940000425 combination drug Drugs 0.000 claims 1
238000007667 floating Methods 0.000 abstract description 55
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 71
229910021420 polycrystalline silicon Inorganic materials 0.000 description 70
229920005591 polysilicon Polymers 0.000 description 68
229910052782 aluminium Inorganic materials 0.000 description 58
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 58
238000012546 transfer Methods 0.000 description 41
235000012239 silicon dioxide Nutrition 0.000 description 36
239000000377 silicon dioxide Substances 0.000 description 36
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 35
229910052710 silicon Inorganic materials 0.000 description 35
239000010703 silicon Substances 0.000 description 35
229960001866 silicon dioxide Drugs 0.000 description 34
238000000034 method Methods 0.000 description 28
230000004044 response Effects 0.000 description 19
230000006870 function Effects 0.000 description 17
239000003990 capacitor Substances 0.000 description 14
239000000969 carrier Substances 0.000 description 14
150000002500 ions Chemical class 0.000 description 12
230000015654 memory Effects 0.000 description 12
230000008929 regeneration Effects 0.000 description 10
238000011069 regeneration method Methods 0.000 description 10
239000004020 conductor Substances 0.000 description 9
230000000295 complement effect Effects 0.000 description 8
238000004519 manufacturing process Methods 0.000 description 8
230000007246 mechanism Effects 0.000 description 7
230000008569 process Effects 0.000 description 7
239000010409 thin film Substances 0.000 description 7
230000004888 barrier function Effects 0.000 description 5
230000008859 change Effects 0.000 description 5
238000010276 construction Methods 0.000 description 5
238000009792 diffusion process Methods 0.000 description 5
230000000694 effects Effects 0.000 description 5
239000010408 film Substances 0.000 description 5
239000013642 negative control Substances 0.000 description 5
238000012856 packing Methods 0.000 description 5
230000008901 benefit Effects 0.000 description 4
230000007423 decrease Effects 0.000 description 4
238000013461 design Methods 0.000 description 4
230000005684 electric field Effects 0.000 description 4
238000005530 etching Methods 0.000 description 4
230000001276 controlling effect Effects 0.000 description 3
238000005516 engineering process Methods 0.000 description 3
229920002120 photoresistant polymer Polymers 0.000 description 3
238000005036 potential barrier Methods 0.000 description 3
238000012545 processing Methods 0.000 description 3
230000007704 transition Effects 0.000 description 3
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
101150087426 Gnal gene Proteins 0.000 description 2
241000283986 Lepus Species 0.000 description 2
229910052581 Si3N4 Inorganic materials 0.000 description 2
241000950638 Symphysodon discus Species 0.000 description 2
229940024548 aluminum oxide Drugs 0.000 description 2
238000004458 analytical method Methods 0.000 description 2
238000013459 approach Methods 0.000 description 2
230000005540 biological transmission Effects 0.000 description 2
229910052796 boron Inorganic materials 0.000 description 2
238000004364 calculation method Methods 0.000 description 2
229910052681 coesite Inorganic materials 0.000 description 2
229910052906 cristobalite Inorganic materials 0.000 description 2
230000003247 decreasing effect Effects 0.000 description 2
230000001419 dependent effect Effects 0.000 description 2
238000000151 deposition Methods 0.000 description 2
238000010586 diagram Methods 0.000 description 2
239000003989 dielectric material Substances 0.000 description 2
238000011049 filling Methods 0.000 description 2
238000011068 loading method Methods 0.000 description 2
238000012986 modification Methods 0.000 description 2
230000004048 modification Effects 0.000 description 2
239000002674 ointment Substances 0.000 description 2
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
230000036961 partial effect Effects 0.000 description 2
229920000136 polysorbate Polymers 0.000 description 2
230000003334 potential effect Effects 0.000 description 2
230000003389 potentiating effect Effects 0.000 description 2
238000000926 separation method Methods 0.000 description 2
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
229910052682 stishovite Inorganic materials 0.000 description 2
229910052905 tridymite Inorganic materials 0.000 description 2
MXBCYQUALCBQIJ-RYVPXURESA-N (8s,9s,10r,13s,14s,17r)-13-ethyl-17-ethynyl-11-methylidene-1,2,3,6,7,8,9,10,12,14,15,16-dodecahydrocyclopenta[a]phenanthren-17-ol;(8r,9s,13s,14s,17r)-17-ethynyl-13-methyl-7,8,9,11,12,14,15,16-octahydro-6h-cyclopenta[a]phenanthrene-3,17-diol Chemical compound OC1=CC=C2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1.C1CC[C@@H]2[C@H]3C(=C)C[C@](CC)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 MXBCYQUALCBQIJ-RYVPXURESA-N 0.000 description 1
101150034533 ATIC gene Proteins 0.000 description 1
NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
101100039010 Caenorhabditis elegans dis-3 gene Proteins 0.000 description 1
102000016917 Complement C1 Human genes 0.000 description 1
108010028774 Complement C1 Proteins 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
101001034845 Mus musculus Interferon-induced transmembrane protein 3 Proteins 0.000 description 1
101100154697 Pseudomonas aeruginosa (strain ATCC 15692 / DSM 22644 / CIP 104116 / JCM 14847 / LMG 12228 / 1C / PRS 101 / PAO1) tsi2 gene Proteins 0.000 description 1
229910000676 Si alloy Inorganic materials 0.000 description 1
102100031308 UBX domain-containing protein 4 Human genes 0.000 description 1
101710109022 UBX domain-containing protein 4 Proteins 0.000 description 1
VYRNMWDESIRGOS-UHFFFAOYSA-N [Mo].[Au] Chemical compound [Mo].[Au] VYRNMWDESIRGOS-UHFFFAOYSA-N 0.000 description 1
230000009471 action Effects 0.000 description 1
238000007792 addition Methods 0.000 description 1
230000002730 additional effect Effects 0.000 description 1
230000002411 adverse Effects 0.000 description 1
238000005275 alloying Methods 0.000 description 1
UTSDGYKWHMMTDM-UHFFFAOYSA-N alumane;tungsten Chemical compound [AlH3].[W] UTSDGYKWHMMTDM-UHFFFAOYSA-N 0.000 description 1
CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
229910021417 amorphous silicon Inorganic materials 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
238000004140 cleaning Methods 0.000 description 1
238000004891 communication Methods 0.000 description 1
239000002131 composite material Substances 0.000 description 1
230000001186 cumulative effect Effects 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
230000003111 delayed effect Effects 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000001514 detection method Methods 0.000 description 1
238000011161 development Methods 0.000 description 1
230000018109 developmental process Effects 0.000 description 1
238000009826 distribution Methods 0.000 description 1
230000009977 dual effect Effects 0.000 description 1
238000010894 electron beam technology Methods 0.000 description 1
230000008030 elimination Effects 0.000 description 1
230000005669 field effect Effects 0.000 description 1
230000004927 fusion Effects 0.000 description 1
229910052732 germanium Inorganic materials 0.000 description 1
GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
FHUGMWWUMCDXBC-UHFFFAOYSA-N gold platinum titanium Chemical compound [Ti][Pt][Au] FHUGMWWUMCDXBC-UHFFFAOYSA-N 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 1
239000011810 insulating material Substances 0.000 description 1
239000012212 insulator Substances 0.000 description 1
238000002955 isolation Methods 0.000 description 1
238000005304 joining Methods 0.000 description 1
238000001465 metallisation Methods 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
238000007639 printing Methods 0.000 description 1
230000001902 propagating effect Effects 0.000 description 1
QHGVXILFMXYDRS-UHFFFAOYSA-N pyraclofos Chemical compound C1=C(OP(=O)(OCC)SCCC)C=NN1C1=CC=C(Cl)C=C1 QHGVXILFMXYDRS-UHFFFAOYSA-N 0.000 description 1
230000002829 reductive effect Effects 0.000 description 1
230000008054 signal transmission Effects 0.000 description 1
101150115956 slc25a26 gene Proteins 0.000 description 1
241000894007 species Species 0.000 description 1
230000003068 static effect Effects 0.000 description 1
230000001360 synchronised effect Effects 0.000 description 1
238000012795 verification Methods 0.000 description 1

Landscapes

Solid State Image Pick-Up Elements (AREA)

CA191,656A 1971-01-14 1974-02-04 Circuits a transfert de charge Expired CA1080848A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA191,656A CA1080848A (fr)	1971-01-14	1974-02-04	Circuits a transfert de charge

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US10638171A	1971-01-14	1971-01-14
CA129,812A CA1080847A (fr)	1971-01-14	1971-12-09	Circuits a transfert de charge
CA191,656A CA1080848A (fr)	1971-01-14	1974-02-04	Circuits a transfert de charge

Publications (1)

Publication Number	Publication Date
CA1080848A true CA1080848A (fr)	1980-07-01

Family

ID=27161623

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA191,656A Expired CA1080848A (fr)	1971-01-14	1974-02-04	Circuits a transfert de charge

Country Status (1)

Country	Link
CA (1)	CA1080848A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN113646663A (zh) *	2019-03-27	2021-11-12	松下知识产权经营株式会社	距离测量设备、距离测量系统、距离测量方法和程序

1974
- 1974-02-04 CA CA191,656A patent/CA1080848A/fr not_active Expired

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN113646663A (zh) *	2019-03-27	2021-11-12	松下知识产权经营株式会社	距离测量设备、距离测量系统、距离测量方法和程序

Legal Events

Date	Code	Title	Description
1997-07-02	MKEX	Expiry

Publication	Publication Date	Title
US3858232A (en)	1974-12-31	Information storage devices
US3852799A (en)	1974-12-03	Buried channel charge coupled apparatus
US4012759A (en)	1977-03-15	Bulk channel charge transfer device
US3656011A (en)	1972-04-11	Charge coupled device
US4646119A (en)	1987-02-24	Charge coupled circuits
US4110777A (en)	1978-08-29	Charge-coupled device
EP0205203B1 (fr)	1990-09-05	Dispositif à couplage de charges
US4510516A (en)	1985-04-09	Three-electrode MOS electron device
US4159430A (en)	1979-06-26	Charge transfer device for processing video-frequency signals
US3735156A (en)	1973-05-22	Reversible two-phase charge coupled devices
CA1106062A (fr)	1981-07-28	Dispositif a transfert de charge biphase
US4672645A (en)	1987-06-09	Charge transfer device having an improved read-out portion
US3697786A (en)	1972-10-10	Capacitively driven charge transfer devices
US4163239A (en)	1979-07-31	Second level phase lines for CCD line imager
US4124807A (en)	1978-11-07	Bistable semiconductor flip-flop having a high resistance feedback
CA1080848A (fr)	1980-07-01	Circuits a transfert de charge
US4019247A (en)	1977-04-26	Fabrication of a charge-coupled device
CA1080847A (fr)	1980-07-01	Circuits a transfert de charge
US4142199A (en)	1979-02-27	Bucket brigade device and process
JPS6230505B2 (fr)	1987-07-02
US3935477A (en)	1976-01-27	Analog inverter for use in charge transfer apparatus
US4099317A (en)	1978-07-11	Method for fabricating self-aligned CCD devices and their output self-aligned MOS transistors on a single semiconductor substrate
US4065847A (en)	1978-01-03	Method of fabrication of a charge-coupled device
US4165537A (en)	1979-08-21	Analog charge transfer apparatus
US4300279A (en)	1981-11-17	Method for the manufacture of a monolithic, static memory cell

CA1080848A - Circuits a transfert de charge - Google Patents

Info

Links

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Priority Applications (1)

Applications Claiming Priority (3)

Publications (1)

Family

ID=27161623

Family Applications (1)

Country Status (1)

Cited By (1)

Cited By (1)

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