CA1086870A - Mesure de l'epaisseur de couches minces au moyen d'un systeme a fluorescence excitee par rayons x - Google Patents

Mesure de l'epaisseur de couches minces au moyen d'un systeme a fluorescence excitee par rayons x

Info

Publication number
CA1086870A
CA1086870A CA277,086A CA277086A CA1086870A CA 1086870 A CA1086870 A CA 1086870A CA 277086 A CA277086 A CA 277086A CA 1086870 A CA1086870 A CA 1086870A
Authority
CA
Canada
Prior art keywords
thickness
alpha
sample
layer
counts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA277,086A
Other languages
English (en)
Inventor
Dan Maydan
Juan R. Maldonado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Inc
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA1086870A publication Critical patent/CA1086870A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA277,086A 1976-05-18 1977-04-27 Mesure de l'epaisseur de couches minces au moyen d'un systeme a fluorescence excitee par rayons x Expired CA1086870A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68746276A 1976-05-18 1976-05-18
US687,462 1976-05-18

Publications (1)

Publication Number Publication Date
CA1086870A true CA1086870A (fr) 1980-09-30

Family

ID=24760542

Family Applications (1)

Application Number Title Priority Date Filing Date
CA277,086A Expired CA1086870A (fr) 1976-05-18 1977-04-27 Mesure de l'epaisseur de couches minces au moyen d'un systeme a fluorescence excitee par rayons x

Country Status (6)

Country Link
JP (1) JPS52140355A (fr)
CA (1) CA1086870A (fr)
DE (1) DE2721589A1 (fr)
FR (1) FR2393266A1 (fr)
GB (1) GB1561313A (fr)
NL (1) NL185306C (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI59489C (fi) * 1978-11-21 1981-08-10 Enso Gutzeit Oy Foerfarande foer maetning av belaeggningsmaengder
JPS5758300U (fr) * 1980-09-22 1982-04-06
DE3129049A1 (de) * 1981-07-23 1983-02-24 Hoesch Werke Ag, 4600 Dortmund Verfahren und vorrichtung zur zerstoerungsfreien bestimmung der dicke der eisen-zinn-zwischenschicht an elektrolytisch verzinntem blech
JPS60140105A (ja) * 1983-12-27 1985-07-25 Shimadzu Corp 多層膜分析装置
JPS60142205A (ja) * 1983-12-29 1985-07-27 Shimadzu Corp 多層膜分析装置
DD278866A1 (de) * 1987-11-20 1990-05-16 Akad Wissenschaften Ddr Verfahren zur phosphorgehaltsbestimmung in stromlos abgeschiedenen metallueberzuegen
JP3706989B2 (ja) * 1999-04-07 2005-10-19 富士通株式会社 蛍光ｘ線を用いた膜厚測定方法
JP4966160B2 (ja) * 2007-10-26 2012-07-04 シャープ株式会社 膜厚測定方法
JP5494322B2 (ja) * 2009-12-28 2014-05-14 株式会社デンソー Ｃｎｔワイヤの製造方法
CN116858144A (zh) * 2023-06-19 2023-10-10 中国第一汽车股份有限公司 一种铬镍铜复合镀层厚度的无损测量方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146631B2 (fr) * 1971-12-29 1976-12-10
JPS4919222A (fr) * 1972-06-15 1974-02-20

Also Published As

Publication number Publication date
DE2721589A1 (de) 1977-12-01
NL185306B (nl) 1989-10-02
FR2393266B1 (fr) 1982-03-19
JPS52140355A (en) 1977-11-22
NL7705443A (nl) 1977-11-22
GB1561313A (en) 1980-02-20
JPS5735768B2 (fr) 1982-07-30
FR2393266A1 (fr) 1978-12-29
NL185306C (nl) 1990-03-01

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Legal Events

Date Code Title Description
MKEX Expiry