CA1088193A - Methode de fabrication de dispositifs optoelectriques par implantation ionique - Google Patents

Methode de fabrication de dispositifs optoelectriques par implantation ionique

Info

Publication number
CA1088193A
CA1088193A CA257,941A CA257941A CA1088193A CA 1088193 A CA1088193 A CA 1088193A CA 257941 A CA257941 A CA 257941A CA 1088193 A CA1088193 A CA 1088193A
Authority
CA
Canada
Prior art keywords
substrate
ion implantation
type
fabrication
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA257,941A
Other languages
English (en)
Inventor
Jean Marine
Maurice Quillec
Michel Ravetto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to CA257,941A priority Critical patent/CA1088193A/fr
Application granted granted Critical
Publication of CA1088193A publication Critical patent/CA1088193A/fr
Expired legal-status Critical Current

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  • Led Devices (AREA)
CA257,941A 1976-07-28 1976-07-28 Methode de fabrication de dispositifs optoelectriques par implantation ionique Expired CA1088193A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA257,941A CA1088193A (fr) 1976-07-28 1976-07-28 Methode de fabrication de dispositifs optoelectriques par implantation ionique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA257,941A CA1088193A (fr) 1976-07-28 1976-07-28 Methode de fabrication de dispositifs optoelectriques par implantation ionique

Publications (1)

Publication Number Publication Date
CA1088193A true CA1088193A (fr) 1980-10-21

Family

ID=4106524

Family Applications (1)

Application Number Title Priority Date Filing Date
CA257,941A Expired CA1088193A (fr) 1976-07-28 1976-07-28 Methode de fabrication de dispositifs optoelectriques par implantation ionique

Country Status (1)

Country Link
CA (1) CA1088193A (fr)

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