CA1096407A - Frittage de nitrure de silicium comprenant un additif de be - Google Patents

Frittage de nitrure de silicium comprenant un additif de be

Info

Publication number: CA1096407A
Authority: CA; Canada
Prior art keywords: beryllium; silicon nitride; weight; nitrogen; amount
Prior art date: 1978-02-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA297,187A

Other languages

English (en)

Inventor

Charles D. Greskovich

Svante Prochazka

Richard J. Charles

Robert A. Giddings

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

General Electric Co

Original Assignee

General Electric Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-02-17

Filing date

1978-02-17

Publication date

1981-02-24

1978-02-17 Application filed by General Electric Co filed Critical General Electric Co

1978-02-17 Priority to CA297,187A priority Critical patent/CA1096407A/fr

1981-02-24 Application granted granted Critical

1981-02-24 Publication of CA1096407A publication Critical patent/CA1096407A/fr

Status Expired legal-status Critical Current

Links

229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 66
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 64
238000005245 sintering Methods 0.000 title claims abstract description 41
239000000654 additive Substances 0.000 title claims abstract description 19
230000000996 additive effect Effects 0.000 title claims abstract description 17
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 79
229910052790 beryllium Inorganic materials 0.000 claims abstract description 52
ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims abstract description 47
229910052757 nitrogen Inorganic materials 0.000 claims abstract description 39
238000000034 method Methods 0.000 claims abstract description 34
239000006185 dispersion Substances 0.000 claims abstract description 4
229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 4
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 25
239000001301 oxygen Substances 0.000 claims description 25
229910052760 oxygen Inorganic materials 0.000 claims description 25
239000000203 mixture Substances 0.000 claims description 20
239000002245 particle Substances 0.000 claims description 7
238000005979 thermal decomposition reaction Methods 0.000 claims description 7
-1 beryllium nitride Chemical class 0.000 claims description 6
238000002441 X-ray diffraction Methods 0.000 claims description 4
JZKFIPKXQBZXMW-UHFFFAOYSA-L beryllium difluoride Chemical compound F[Be]F JZKFIPKXQBZXMW-UHFFFAOYSA-L 0.000 claims description 3
229910001633 beryllium fluoride Inorganic materials 0.000 claims description 3
UQVOJETYKFAIRZ-UHFFFAOYSA-N beryllium carbide Chemical compound [Be][C][Be] UQVOJETYKFAIRZ-UHFFFAOYSA-N 0.000 claims description 2
239000007970 homogeneous dispersion Substances 0.000 claims description 2
238000007493 shaping process Methods 0.000 claims description 2
239000011236 particulate material Substances 0.000 claims 1
238000004519 manufacturing process Methods 0.000 abstract 1
239000000843 powder Substances 0.000 description 73
239000000047 product Substances 0.000 description 52
229910052710 silicon Inorganic materials 0.000 description 34
239000010703 silicon Substances 0.000 description 34
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 33
150000004767 nitrides Chemical class 0.000 description 27
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 9
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
239000011575 calcium Substances 0.000 description 8
229910052791 calcium Inorganic materials 0.000 description 7
239000000919 ceramic Substances 0.000 description 7
239000000463 material Substances 0.000 description 7
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
238000006243 chemical reaction Methods 0.000 description 6
239000012535 impurity Substances 0.000 description 6
238000003801 milling Methods 0.000 description 6
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 5
CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 5
238000000137 annealing Methods 0.000 description 5
238000000354 decomposition reaction Methods 0.000 description 5
229910052742 iron Inorganic materials 0.000 description 5
239000007788 liquid Substances 0.000 description 5
238000002156 mixing Methods 0.000 description 5
230000002269 spontaneous effect Effects 0.000 description 5
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
229910005091 Si3N Inorganic materials 0.000 description 4
238000000280 densification Methods 0.000 description 4
238000009472 formulation Methods 0.000 description 4
150000002500 ions Chemical class 0.000 description 4
239000002002 slurry Substances 0.000 description 4
239000007787 solid Substances 0.000 description 4
230000004580 weight loss Effects 0.000 description 4
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
229910052782 aluminium Inorganic materials 0.000 description 3
229910021529 ammonia Inorganic materials 0.000 description 3
238000004458 analytical method Methods 0.000 description 3
239000007789 gas Substances 0.000 description 3
239000011777 magnesium Substances 0.000 description 3
239000000395 magnesium oxide Substances 0.000 description 3
230000003647 oxidation Effects 0.000 description 3
238000007254 oxidation reaction Methods 0.000 description 3
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
238000010521 absorption reaction Methods 0.000 description 2
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
239000011230 binding agent Substances 0.000 description 2
238000001354 calcination Methods 0.000 description 2
229910052799 carbon Inorganic materials 0.000 description 2
230000003247 decreasing effect Effects 0.000 description 2
230000002939 deleterious effect Effects 0.000 description 2
229910001873 dinitrogen Inorganic materials 0.000 description 2
238000001035 drying Methods 0.000 description 2
238000000227 grinding Methods 0.000 description 2
229910052736 halogen Inorganic materials 0.000 description 2
150000002367 halogens Chemical class 0.000 description 2
238000007731 hot pressing Methods 0.000 description 2
239000001257 hydrogen Substances 0.000 description 2
229910052739 hydrogen Inorganic materials 0.000 description 2
229910052749 magnesium Inorganic materials 0.000 description 2
239000011159 matrix material Substances 0.000 description 2
229910044991 metal oxide Inorganic materials 0.000 description 2
150000004706 metal oxides Chemical class 0.000 description 2
239000011148 porous material Substances 0.000 description 2
238000003825 pressing Methods 0.000 description 2
239000002904 solvent Substances 0.000 description 2
241000894007 species Species 0.000 description 2
MQOMKCIKNDDXEZ-UHFFFAOYSA-N 1-dibutylphosphoryloxy-4-nitrobenzene Chemical compound CCCCP(=O)(CCCC)OC1=CC=C([N+]([O-])=O)C=C1 MQOMKCIKNDDXEZ-UHFFFAOYSA-N 0.000 description 1
229910015849 BeSiN2 Inorganic materials 0.000 description 1
229910052684 Cerium Inorganic materials 0.000 description 1
241000905957 Channa melasoma Species 0.000 description 1
101000713211 Colocasia esculenta Mannose-specific lectin TAR1 Proteins 0.000 description 1
235000008247 Echinochloa frumentacea Nutrition 0.000 description 1
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
229910020056 Mg3N2 Inorganic materials 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
101100270435 Mus musculus Arhgef12 gene Proteins 0.000 description 1
101100230509 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) hat-1 gene Proteins 0.000 description 1
240000004072 Panicum sumatrense Species 0.000 description 1
241001208007 Procas Species 0.000 description 1
241000364027 Sinoe Species 0.000 description 1
229910052776 Thorium Inorganic materials 0.000 description 1
238000007792 addition Methods 0.000 description 1
229910021417 amorphous silicon Inorganic materials 0.000 description 1
229940030850 avar Drugs 0.000 description 1
238000009835 boiling Methods 0.000 description 1
ANTSCNMPPGJYLG-UHFFFAOYSA-N chlordiazepoxide Chemical compound O=N=1CC(NC)=NC2=CC=C(Cl)C=C2C=1C1=CC=CC=C1 ANTSCNMPPGJYLG-UHFFFAOYSA-N 0.000 description 1
150000008280 chlorinated hydrocarbons Chemical class 0.000 description 1
229910052681 coesite Inorganic materials 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
238000007596 consolidation process Methods 0.000 description 1
239000000356 contaminant Substances 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
230000000875 corresponding effect Effects 0.000 description 1
229910052906 cristobalite Inorganic materials 0.000 description 1
229910021419 crystalline silicon Inorganic materials 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
230000002542 deteriorative effect Effects 0.000 description 1
230000001627 detrimental effect Effects 0.000 description 1
238000007723 die pressing method Methods 0.000 description 1
KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
238000009826 distribution Methods 0.000 description 1
230000009977 dual effect Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
230000008030 elimination Effects 0.000 description 1
238000003379 elimination reaction Methods 0.000 description 1
239000012467 final product Substances 0.000 description 1
239000005350 fused silica glass Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
229910052734 helium Inorganic materials 0.000 description 1
239000001307 helium Substances 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
229930195733 hydrocarbon Natural products 0.000 description 1
150000002430 hydrocarbons Chemical class 0.000 description 1
229910052738 indium Inorganic materials 0.000 description 1
239000004615 ingredient Substances 0.000 description 1
238000001616 ion spectroscopy Methods 0.000 description 1
229910052746 lanthanum Inorganic materials 0.000 description 1
238000011068 loading method Methods 0.000 description 1
238000003754 machining Methods 0.000 description 1
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
238000002844 melting Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
230000003340 mental effect Effects 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
239000004570 mortar (masonry) Substances 0.000 description 1
229910052863 mullite Inorganic materials 0.000 description 1
125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
229910000069 nitrogen hydride Inorganic materials 0.000 description 1
239000000615 nonconductor Substances 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
239000003960 organic solvent Substances 0.000 description 1
239000002243 precursor Substances 0.000 description 1
238000005086 pumping Methods 0.000 description 1
238000010926 purge Methods 0.000 description 1
239000000376 reactant Substances 0.000 description 1
230000035939 shock Effects 0.000 description 1
229910000077 silane Inorganic materials 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
238000004611 spectroscopical analysis Methods 0.000 description 1
229910052682 stishovite Inorganic materials 0.000 description 1
239000000126 substance Substances 0.000 description 1
229910052717 sulfur Inorganic materials 0.000 description 1
KUAZQDVKQLNFPE-UHFFFAOYSA-N thiram Chemical compound CN(C)C(=S)SSC(=S)N(C)C KUAZQDVKQLNFPE-UHFFFAOYSA-N 0.000 description 1
229910052905 tridymite Inorganic materials 0.000 description 1
UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
229910052727 yttrium Inorganic materials 0.000 description 1
229910052726 zirconium Inorganic materials 0.000 description 1

Landscapes

Ceramic Products (AREA)

CA297,187A 1978-02-17 1978-02-17 Frittage de nitrure de silicium comprenant un additif de be Expired CA1096407A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA297,187A CA1096407A (fr)	1978-02-17	1978-02-17	Frittage de nitrure de silicium comprenant un additif de be

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA297,187A CA1096407A (fr)	1978-02-17	1978-02-17	Frittage de nitrure de silicium comprenant un additif de be

Publications (1)

Publication Number	Publication Date
CA1096407A true CA1096407A (fr)	1981-02-24

Family

ID=4110802

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA297,187A Expired CA1096407A (fr)	1978-02-17	1978-02-17	Frittage de nitrure de silicium comprenant un additif de be

Country Status (1)

Country	Link
CA (1)	CA1096407A (fr)

1978
- 1978-02-17 CA CA297,187A patent/CA1096407A/fr not_active Expired

Legal Events

Date	Code	Title	Description
1998-02-24	MKEX	Expiry

Publication	Publication Date	Title
CA1088960A (fr)	1980-11-04	Frittage du nitrure de silicone avec des additifs au mg et au be
US4119689A (en)	1978-10-10	Sintering of silicon nitride using Be additive
CA1076611A (fr)	1980-04-29	Si3n4 obtenu par la nitruration de silicium fritte et a teneur de bore
CA1089882A (fr)	1980-11-18	Poudre de carbure de silicium
US4124402A (en)	1978-11-07	Hot pressing of silicon nitride using magnesium silicide
US5603876A (en)	1997-02-18	Method for producing high density sintered silicon nitride (SI3 N.sub.4
CA1272581A (fr)	1990-08-14	Nitruration d'articles en poudre de silicium par sejour sous hautes temperatures et pressions
US5134097A (en)	1992-07-28	Silicon nitride-silicon carbide composite material and process for production thereof
US4379110A (en)	1983-04-05	Sintering of silicon nitride to high density
CA1093589A (fr)	1981-01-13	Si.sub.3n.sub.4 forme par nitruration d'un produit compacte de silicium fritte
US5405592A (en)	1995-04-11	Non-densified silicon nitride beta-phase material
US4040848A (en)	1977-08-09	Polycrystalline silicon articles containing boron by sintering
US4225356A (en)	1980-09-30	Sintering of silicon nitride using Be additive
US4539300A (en)	1985-09-03	Method for the fabrication of hexagonal BN toughened matrix composites
CA1314294C (fr)	1993-03-09	Element fritte en carbure de silicium et methode de fabrication
US5122485A (en)	1992-06-16	Sintered silicon carbide and silicon nitride base composite
US4122140A (en)	1978-10-24	Hot pressing of silicon nitride using beryllium additive
US4889834A (en)	1989-12-26	SiC-Al2 O3 composite sintered bodies and method of producing the same
US5118644A (en)	1992-06-02	Thermal shock-resistant silicon nitride sintered material
CA1096407A (fr)	1981-02-24	Frittage de nitrure de silicium comprenant un additif de be
Briggs	1977	Pressureless sintering of sialon ceramics
US4495122A (en)	1985-01-22	Method for the production of a polycrystalline shaped body of silicon carbide
US5445776A (en)	1995-08-29	Method for producing high density sintered silicon nitride (Si3 N.sub.4
US4374792A (en)	1983-02-22	Sintering of silicon nitride with Be additive
JPH07315937A (ja)	1995-12-05	窒化ホウ素常圧焼結体及びその製造方法