CA1096894A - Pressage a chaud de nitrure de silicium avec un additif a base de beryllium - Google Patents

Pressage a chaud de nitrure de silicium avec un additif a base de beryllium

Info

Publication number: CA1096894A
Authority: CA; Canada
Prior art keywords: silicon nitride; beryllium; hot; weight; ranging
Prior art date: 1978-02-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA297,237A

Other languages

English (en)

Inventor

Chester R. O'clair

Charles D. Greskovich

Svante Prochazka

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

General Electric Co

Original Assignee

General Electric Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-02-17

Filing date

1978-02-17

Publication date

1981-03-03

1978-02-17 Application filed by General Electric Co filed Critical General Electric Co

1978-02-17 Priority to CA297,237A priority Critical patent/CA1096894A/fr

1981-03-03 Application granted granted Critical

1981-03-03 Publication of CA1096894A publication Critical patent/CA1096894A/fr

Status Expired legal-status Critical Current

Links

229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 91
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 84
229910052790 beryllium Inorganic materials 0.000 title claims abstract description 53
ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 title claims abstract description 43
238000007731 hot pressing Methods 0.000 title claims abstract description 25
239000000654 additive Substances 0.000 title claims abstract description 20
230000000996 additive effect Effects 0.000 title claims abstract description 19
239000000203 mixture Substances 0.000 claims abstract description 23
229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 8
239000000843 powder Substances 0.000 claims description 65
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 34
238000000034 method Methods 0.000 claims description 27
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 22
239000001301 oxygen Substances 0.000 claims description 22
229910052760 oxygen Inorganic materials 0.000 claims description 22
229910052710 silicon Inorganic materials 0.000 claims description 20
239000010703 silicon Substances 0.000 claims description 20
229910052757 nitrogen Inorganic materials 0.000 claims description 16
239000006185 dispersion Substances 0.000 claims description 14
-1 beryllium nitride Chemical class 0.000 claims description 12
239000012535 impurity Substances 0.000 claims description 12
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
239000002245 particle Substances 0.000 claims description 9
BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 5
239000012298 atmosphere Substances 0.000 claims description 5
229910052681 coesite Inorganic materials 0.000 claims description 4
229910052906 cristobalite Inorganic materials 0.000 claims description 4
238000002844 melting Methods 0.000 claims description 4
230000008018 melting Effects 0.000 claims description 4
239000000377 silicon dioxide Substances 0.000 claims description 4
239000007787 solid Substances 0.000 claims description 4
229910052682 stishovite Inorganic materials 0.000 claims description 4
229910052905 tridymite Inorganic materials 0.000 claims description 4
JZKFIPKXQBZXMW-UHFFFAOYSA-L beryllium difluoride Chemical compound F[Be]F JZKFIPKXQBZXMW-UHFFFAOYSA-L 0.000 claims description 3
229910001633 beryllium fluoride Inorganic materials 0.000 claims description 3
229910052736 halogen Inorganic materials 0.000 claims description 3
150000002367 halogens Chemical class 0.000 claims description 3
239000012299 nitrogen atmosphere Substances 0.000 claims description 2
235000012239 silicon dioxide Nutrition 0.000 claims description 2
239000000463 material Substances 0.000 abstract description 7
230000003647 oxidation Effects 0.000 abstract description 2
238000007254 oxidation reaction Methods 0.000 abstract description 2
239000000047 product Substances 0.000 description 42
229940058494 beryllium Drugs 0.000 description 37
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 12
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 9
238000002156 mixing Methods 0.000 description 9
150000004767 nitrides Chemical class 0.000 description 9
238000006243 chemical reaction Methods 0.000 description 8
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
238000003825 pressing Methods 0.000 description 7
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
229910052582 BN Inorganic materials 0.000 description 6
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 6
239000007789 gas Substances 0.000 description 6
229910002804 graphite Inorganic materials 0.000 description 6
239000010439 graphite Substances 0.000 description 6
230000004907 flux Effects 0.000 description 5
239000007788 liquid Substances 0.000 description 5
238000003801 milling Methods 0.000 description 5
238000005979 thermal decomposition reaction Methods 0.000 description 5
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
238000002441 X-ray diffraction Methods 0.000 description 4
BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
238000007792 addition Methods 0.000 description 3
229910052786 argon Inorganic materials 0.000 description 3
238000000280 densification Methods 0.000 description 3
238000005530 etching Methods 0.000 description 3
239000001307 helium Substances 0.000 description 3
229910052734 helium Inorganic materials 0.000 description 3
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
238000000399 optical microscopy Methods 0.000 description 3
239000012188 paraffin wax Substances 0.000 description 3
239000002002 slurry Substances 0.000 description 3
229910015849 BeSiN2 Inorganic materials 0.000 description 2
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
OJYGBLRPYBAHRT-UHFFFAOYSA-N alphachloralose Chemical compound O1C(C(Cl)(Cl)Cl)OC2C(O)C(C(O)CO)OC21 OJYGBLRPYBAHRT-UHFFFAOYSA-N 0.000 description 2
229910021529 ammonia Inorganic materials 0.000 description 2
238000004458 analytical method Methods 0.000 description 2
238000000498 ball milling Methods 0.000 description 2
239000011230 binding agent Substances 0.000 description 2
238000009835 boiling Methods 0.000 description 2
238000001354 calcination Methods 0.000 description 2
229910052791 calcium Inorganic materials 0.000 description 2
239000011575 calcium Substances 0.000 description 2
238000007796 conventional method Methods 0.000 description 2
229910001873 dinitrogen Inorganic materials 0.000 description 2
238000001035 drying Methods 0.000 description 2
238000004993 emission spectroscopy Methods 0.000 description 2
238000000227 grinding Methods 0.000 description 2
239000001257 hydrogen Substances 0.000 description 2
229910052739 hydrogen Inorganic materials 0.000 description 2
230000006698 induction Effects 0.000 description 2
229910052742 iron Inorganic materials 0.000 description 2
229910052751 metal Inorganic materials 0.000 description 2
239000002184 metal Substances 0.000 description 2
239000004570 mortar (masonry) Substances 0.000 description 2
229910000069 nitrogen hydride Inorganic materials 0.000 description 2
239000000376 reactant Substances 0.000 description 2
229910000077 silane Inorganic materials 0.000 description 2
238000012360 testing method Methods 0.000 description 2
238000007088 Archimedes method Methods 0.000 description 1
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
239000004698 Polyethylene Substances 0.000 description 1
229910005091 Si3N Inorganic materials 0.000 description 1
108091093126 WHP Posttrascriptional Response Element Proteins 0.000 description 1
229910017878 a-Si3N4 Inorganic materials 0.000 description 1
238000010521 absorption reaction Methods 0.000 description 1
239000002253 acid Substances 0.000 description 1
229910021417 amorphous silicon Inorganic materials 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
238000003486 chemical etching Methods 0.000 description 1
150000008280 chlorinated hydrocarbons Chemical class 0.000 description 1
238000001816 cooling Methods 0.000 description 1
229910021419 crystalline silicon Inorganic materials 0.000 description 1
238000002425 crystallisation Methods 0.000 description 1
238000000354 decomposition reaction Methods 0.000 description 1
230000002939 deleterious effect Effects 0.000 description 1
238000001514 detection method Methods 0.000 description 1
230000002542 deteriorative effect Effects 0.000 description 1
230000001627 detrimental effect Effects 0.000 description 1
238000002050 diffraction method Methods 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
238000002003 electron diffraction Methods 0.000 description 1
238000001493 electron microscopy Methods 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
239000012467 final product Substances 0.000 description 1
238000010304 firing Methods 0.000 description 1
238000009472 formulation Methods 0.000 description 1
239000005350 fused silica glass Substances 0.000 description 1
239000011521 glass Substances 0.000 description 1
229930195733 hydrocarbon Natural products 0.000 description 1
150000002430 hydrocarbons Chemical class 0.000 description 1
JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
238000005259 measurement Methods 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000003947 neutron activation analysis Methods 0.000 description 1
229910017604 nitric acid Inorganic materials 0.000 description 1
125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
239000003960 organic solvent Substances 0.000 description 1
238000005498 polishing Methods 0.000 description 1
229920000573 polyethylene Polymers 0.000 description 1
239000011148 porous material Substances 0.000 description 1
239000002243 precursor Substances 0.000 description 1
238000002360 preparation method Methods 0.000 description 1
238000002310 reflectometry Methods 0.000 description 1
230000000717 retained effect Effects 0.000 description 1
238000004626 scanning electron microscopy Methods 0.000 description 1
239000005368 silicate glass Substances 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
239000011863 silicon-based powder Substances 0.000 description 1
238000001228 spectrum Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
230000004580 weight loss Effects 0.000 description 1

Landscapes

Ceramic Products (AREA)

CA297,237A 1978-02-17 1978-02-17 Pressage a chaud de nitrure de silicium avec un additif a base de beryllium Expired CA1096894A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA297,237A CA1096894A (fr)	1978-02-17	1978-02-17	Pressage a chaud de nitrure de silicium avec un additif a base de beryllium

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA297,237A CA1096894A (fr)	1978-02-17	1978-02-17	Pressage a chaud de nitrure de silicium avec un additif a base de beryllium

Publications (1)

Publication Number	Publication Date
CA1096894A true CA1096894A (fr)	1981-03-03

Family

ID=4110810

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA297,237A Expired CA1096894A (fr)	1978-02-17	1978-02-17	Pressage a chaud de nitrure de silicium avec un additif a base de beryllium

Country Status (1)

Country	Link
CA (1)	CA1096894A (fr)

1978
- 1978-02-17 CA CA297,237A patent/CA1096894A/fr not_active Expired

Legal Events

Date	Code	Title	Description
1998-03-03	MKEX	Expiry

Publication	Publication Date	Title
US4093687A (en)	1978-06-06	Hot pressing of silicon nitride using magnesium silicide
CA1088960A (fr)	1980-11-04	Frittage du nitrure de silicone avec des additifs au mg et au be
Mitomo et al.	1979	Fabrication of high strength β-sialon by reaction sintering
Renlund et al.	1991	Silicon oxycarbide glasses: Part I. Preparation and chemistry
US4119689A (en)	1978-10-10	Sintering of silicon nitride using Be additive
CA1149133A (fr)	1983-07-05	Frittes a base d'oxynitrure d'aluminium a structure cubique stabilisee
CA1261887A (fr)	1989-09-26	Corps moules denses de nitrure d'aluminium polycristallin, et methode pour leur mise en forme sans apport d'agent de frittage
US4506020A (en)	1985-03-19	Methods of forming ceramic materials and ceramic products, and ceramic materials and ceramic products formed thereby
CA1076611A (fr)	1980-04-29	Si3n4 obtenu par la nitruration de silicium fritte et a teneur de bore
CA1257298A (fr)	1989-07-11	Corps frittes de nitrure de silicium, en leur fabrication
CA1145919A (fr)	1983-05-10	METHODE DE PREPARATION D'UNE POUDRE A BASE DE NITRURE .alpha.-SILICIE
US4467043A (en)	1984-08-21	Dense shaped articles of polycrystalline α-silicon carbide and process for the manufacture thereof by hot-pressing
US4342837A (en)	1982-08-03	Sinterable silicon carbide powders and sintered body produced therefrom
US4122140A (en)	1978-10-24	Hot pressing of silicon nitride using beryllium additive
US4040848A (en)	1977-08-09	Polycrystalline silicon articles containing boron by sintering
Schmidt et al.	1990	Silicon nitride derived from an organometallic polymeric precursor: Preparation and characterization
US4326039A (en)	1982-04-20	Dense shaped articles of polycrystalline β-silicon carbide and process for the manufacture thereof by hot-pressing
CA1314294C (fr)	1993-03-09	Element fritte en carbure de silicium et methode de fabrication
US5126294A (en)	1992-06-30	Sintered silicon nitride and production method thereof
US4372902A (en)	1983-02-08	Preparation of dense ceramics
US4225356A (en)	1980-09-30	Sintering of silicon nitride using Be additive
CA1096894A (fr)	1981-03-03	Pressage a chaud de nitrure de silicium avec un additif a base de beryllium
CA1096893A (fr)	1981-03-03	Pressage a chaud de nitrure de silicium au moyen siliciure de magnesium
Sacks et al.	1988	Polymer‐Derived SiC‐Based Fibers with High Tensile Strength and Improved Creep Resistance
Choi et al.	1999	Carbothermic synthesis of monodispersed spherical Si3N4/SiC nanocomposite powder