CA1102010A - Magnetic heat sink for semiconductor ship - Google Patents
Magnetic heat sink for semiconductor shipInfo
- Publication number
- CA1102010A CA1102010A CA305,488A CA305488A CA1102010A CA 1102010 A CA1102010 A CA 1102010A CA 305488 A CA305488 A CA 305488A CA 1102010 A CA1102010 A CA 1102010A
- Authority
- CA
- Canada
- Prior art keywords
- chip
- heat sink
- heat
- magnet
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/20—Arrangements for cooling
- H10W40/25—Arrangements for cooling characterised by their materials
- H10W40/257—Arrangements for cooling characterised by their materials having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh or porous structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
- H10W40/77—Auxiliary members characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/013—Manufacture or treatment of die-attach connectors
- H10W72/01308—Manufacture or treatment of die-attach connectors using permanent auxiliary members, e.g. using alignment marks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07311—Treating the bonding area before connecting, e.g. by applying flux or cleaning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
- H10W72/07353—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in shapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/331—Shapes of die-attach connectors
- H10W72/334—Cross-sectional shape, i.e. in side view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/381—Auxiliary members
- H10W72/387—Flow barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/877—Bump connectors and die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/879—Bump connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/931—Shapes of bond pads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
MAGNETIC HEAT SINK FOR SEMICONDUCTOR CHIP
ABSTRACT OF THE DISCLOSURE
Heat generated in a multicontact semiconductor chip can be conducted away by the use of a magnetic fluid held in place by the field from a magnet which in turn conducts the heat transmitted through the fluid to a heat sink to which the magnet is bonded for thermal transfer.
ABSTRACT OF THE DISCLOSURE
Heat generated in a multicontact semiconductor chip can be conducted away by the use of a magnetic fluid held in place by the field from a magnet which in turn conducts the heat transmitted through the fluid to a heat sink to which the magnet is bonded for thermal transfer.
Description
- 9 Ai the capabillty to lncorporate more and more devices ln large scale semlconductor chlps advances, however tiny the power dissipa-11 tion ln an indlvldual devlce, the dlfflculty of gettlng the heat out 12 of the chlp becomes compounded by several conflicting considerations.
13 For example, as the devlce~ become smaller, the contact area devoted 14 to signal input and output becomes totally lnadequate to also be relied upon to conduct the heat generated within the chlp. Further, because 16 of the llmited physlcal strength of the small connections rigid mechanical J 17 contact for thermal transfer, as a general rule, cannot be employed because lB a mismatch in thermal expanslon coefficients can result in an unacceptably 19 large stress.
'~ .
SUMMARY OF THE INVENTION
21 Through the use of a magnet thermally bonded to a large area 22 heat sink, the heat 8enerated in the chip can be conducted through 23 a magnetic fluid and (held in place and shaped by the flux emanating 24 from the magnet) covering a large area on the back of the chip. The fluid permits both conduction and convection heat transfer and allows 26 for repair and changes to the chip.
Y0977-oo~ . - 1 -, . . :
. ''~'~', ' . , ' ~
- : . I : , .
.. , . , . . , . `: . ` `
11~2~
More particularly, there is provided:
Heat transfer apparatus for conducting heat from a semiconductor chip to a heat sink comprising in combina-tion:
a fluid composed of magnetically responsive particles suspended in a vehicle positioned in contact with a semi-conductor chip and in contact with a magnetic heat sink.
. . .
There is also provided:
In semiconductor integrated circuit apparatus of the type wherein signals to and from a semiconductor chip are entered and leave the chip from one side, the improvement comprising:
means for dissipating heat from the back of said chip via a fluid composed of magnetically responsive particles suspended in a vehicle, said fluid cooperating with a shaped magnetic field emanating from a magnet bonded to a heat sink to thereby conduct heat from said chip to said heat sink.
: _ _.. _ .... ... ..... . . .. ,.. , . .. ...... . .. . . _ ., .. .. . " .. . .
There is further pro~ided: ...
. Semiconductor integrated circuit apparatus comprising in combination:
a substrate;
a semiconductor integrated circuit chip;
a plurality of interconnections between electrical points on said substrate and electrical points on a first side of said chip;
a heat sink, a magnet thermally bonded to said heat sir.k and a fluid composed of magnetically responsive particles suspended in a vehicle forming contact between said magnet and the opposite side of said chip.
-la-3Z~ 3
13 For example, as the devlce~ become smaller, the contact area devoted 14 to signal input and output becomes totally lnadequate to also be relied upon to conduct the heat generated within the chlp. Further, because 16 of the llmited physlcal strength of the small connections rigid mechanical J 17 contact for thermal transfer, as a general rule, cannot be employed because lB a mismatch in thermal expanslon coefficients can result in an unacceptably 19 large stress.
'~ .
SUMMARY OF THE INVENTION
21 Through the use of a magnet thermally bonded to a large area 22 heat sink, the heat 8enerated in the chip can be conducted through 23 a magnetic fluid and (held in place and shaped by the flux emanating 24 from the magnet) covering a large area on the back of the chip. The fluid permits both conduction and convection heat transfer and allows 26 for repair and changes to the chip.
Y0977-oo~ . - 1 -, . . :
. ''~'~', ' . , ' ~
- : . I : , .
.. , . , . . , . `: . ` `
11~2~
More particularly, there is provided:
Heat transfer apparatus for conducting heat from a semiconductor chip to a heat sink comprising in combina-tion:
a fluid composed of magnetically responsive particles suspended in a vehicle positioned in contact with a semi-conductor chip and in contact with a magnetic heat sink.
. . .
There is also provided:
In semiconductor integrated circuit apparatus of the type wherein signals to and from a semiconductor chip are entered and leave the chip from one side, the improvement comprising:
means for dissipating heat from the back of said chip via a fluid composed of magnetically responsive particles suspended in a vehicle, said fluid cooperating with a shaped magnetic field emanating from a magnet bonded to a heat sink to thereby conduct heat from said chip to said heat sink.
: _ _.. _ .... ... ..... . . .. ,.. , . .. ...... . .. . . _ ., .. .. . " .. . .
There is further pro~ided: ...
. Semiconductor integrated circuit apparatus comprising in combination:
a substrate;
a semiconductor integrated circuit chip;
a plurality of interconnections between electrical points on said substrate and electrical points on a first side of said chip;
a heat sink, a magnet thermally bonded to said heat sir.k and a fluid composed of magnetically responsive particles suspended in a vehicle forming contact between said magnet and the opposite side of said chip.
-la-3Z~ 3
2 FIG. 1 is a sketch of the magnetic heat sink of the invention, and
3 FIG. 2 is a cross sectional view of FIG. 1 showlng the details
4 of the magnetic flux of the magnet.
DETAILED DESCRIPTION OF THE INVENTION
6 Where semiconductor chips are mounted on a substrate which 7 generally carries the wiring to communicate with the other parts of the 8 apparatus of which the chip i8 a part, there will be a plurality of 9 electrical current carrying pads on the chip. These pads for signal speed and for area conservation are generally so small that the heat 11 generated by the individual active elements in the chip cannot be 12 dissipated through them. In addition to area and signal response con-13 siderations, thermal expansion coefficient mismatches may be encountered 14 that limit the ability to increase the physical size of the pads.
Through this invention a magnetic fluid i8 applied to the back 16 of the chip. The fluid is shaped and its thermal path is governed by 17 the flux from a magnet thermally bonded to a large heat sink. This allows 18 the different elements to move with respect to each other for coefficient 19 of expansion problems. At the same time a maximum of thermal transfer is achieved.
21 Referring now to FIG. 1 a substrate 1 is provided which may be 22 one or a plurality of insulating layers containing wiring and having signal 23 pads 2 to which connections 3 to a corresponding pad on chip 4 are made.
24 The connections illustrated involve the solder reflow technique wherein surface tension of a solder quantity limited in area by the size of the 26 pad operates to lift the chip above the substrate and at the same time 27 provide an electrical connection. Another chip connection technique, 28 well known in the art, involves wire bonding from a lead frame. This i~VZ~
1 technique was not illustra~ed but it will bè clear that the principle 2 involved in both generallzed techniques or any other light involves 3 fairly small connections whose physical size is governed by use of 4 available area, signal responsiveness, and coefficient of expansion matching such th~t making the individual connections large enough to carry 6 the heat generated in the chip, becomes less and less practical.
7 In accordance with the invention, on the back of the chip 4, a 8 magnetic fluid 5 is applied. This fluid is one of a number available in 9 the art and conslsts of a vehicle in which magnetic particles are suspended.
The fluid has a viscosity such that it will not creep over the edge of the 11 chip and has a particle sugpension such that a magnetic fluid will change 12 the shape of the fluid quantity. One commercially available fluid is 13 manufactured by a corporation known as Ferro Fluidics Corporation. The 14 fluid must remain stable through the operating temperature of the chip.
The magnet 6, which is preferably a permanent magnet for simplicity, in 16 turn is thermally bonded, generally by direct contact to a heat sink 7 17 which is shown as having fins 8, although ie will be apparent to one 18 skilled in the art that any heat sinking approach including direct contact 19 with further fluids, is acceptable within the purview of the invention.
Referring next to FIG. 2 a cross sectional area of FIG. 1 showing 21 the details of the magnet 6 and the magnetic fluid 5 are provided. In 22 FIG. 2 the chip 3 is agaln shown using the solder reflow type connections 2 23 to the substrate 1. On the back of the chip 3 is shown the magnetic fluid 24 5. The magnet 6 has a shape such that the lines of flux go as is illus-trated from an outside region 9 to a centralized region 10, such that the 26 flux causes the magnetic fluid 5 to assume a shape permitting a larger 27 fluid quantity than viscosity would ordinarily permit and in turn facilita-28 ting increased convection and conduction of the heat from the back of the i~32~:~;63 1 chips to the magnet 6 which in turn is bonded thermally to the heat sink 7 2 which ln turn transfers the heat through the fins 8 to the surrounding 3 environment.
4 The magnet 6 has a shape through its perlphery 9 and its central portion 10 to accomplish the following functions. It shapes the magnetic 6 fluid 5 to permit more fluid than viscosity will permit if needed, and it7 holds the fluid in place during vibrations and thermal expansion. The 8 shape of the fluid is such that heat transfer by both conduction and con-9 vection is enhanced. The non-uniform magnetic field generally draws the fluid to the region of higher magnetic field strengths which is generally 11 the center of the chip. If the quality of fluid is property ad~usted, the12 fluid will seal the region between the back of the chip and the magnet so13 that good thermal contact is produced between the chip and the heat sink,14 and the fluid connection will be independent of orientation of the structure.
Since no rigid contact exists the chip and the magnet can readily be brought 16 together and separated allowing assembly and repair to be accomplished con-17 veniently.
18 What has been described i8 the use of a magnet and a magnetic 19 fluid to enhance both conduction and convection of heat from the back of a chip to a heat sink while at the same time maintaining a non-rigid but 21 thermally efficient contact.
DETAILED DESCRIPTION OF THE INVENTION
6 Where semiconductor chips are mounted on a substrate which 7 generally carries the wiring to communicate with the other parts of the 8 apparatus of which the chip i8 a part, there will be a plurality of 9 electrical current carrying pads on the chip. These pads for signal speed and for area conservation are generally so small that the heat 11 generated by the individual active elements in the chip cannot be 12 dissipated through them. In addition to area and signal response con-13 siderations, thermal expansion coefficient mismatches may be encountered 14 that limit the ability to increase the physical size of the pads.
Through this invention a magnetic fluid i8 applied to the back 16 of the chip. The fluid is shaped and its thermal path is governed by 17 the flux from a magnet thermally bonded to a large heat sink. This allows 18 the different elements to move with respect to each other for coefficient 19 of expansion problems. At the same time a maximum of thermal transfer is achieved.
21 Referring now to FIG. 1 a substrate 1 is provided which may be 22 one or a plurality of insulating layers containing wiring and having signal 23 pads 2 to which connections 3 to a corresponding pad on chip 4 are made.
24 The connections illustrated involve the solder reflow technique wherein surface tension of a solder quantity limited in area by the size of the 26 pad operates to lift the chip above the substrate and at the same time 27 provide an electrical connection. Another chip connection technique, 28 well known in the art, involves wire bonding from a lead frame. This i~VZ~
1 technique was not illustra~ed but it will bè clear that the principle 2 involved in both generallzed techniques or any other light involves 3 fairly small connections whose physical size is governed by use of 4 available area, signal responsiveness, and coefficient of expansion matching such th~t making the individual connections large enough to carry 6 the heat generated in the chip, becomes less and less practical.
7 In accordance with the invention, on the back of the chip 4, a 8 magnetic fluid 5 is applied. This fluid is one of a number available in 9 the art and conslsts of a vehicle in which magnetic particles are suspended.
The fluid has a viscosity such that it will not creep over the edge of the 11 chip and has a particle sugpension such that a magnetic fluid will change 12 the shape of the fluid quantity. One commercially available fluid is 13 manufactured by a corporation known as Ferro Fluidics Corporation. The 14 fluid must remain stable through the operating temperature of the chip.
The magnet 6, which is preferably a permanent magnet for simplicity, in 16 turn is thermally bonded, generally by direct contact to a heat sink 7 17 which is shown as having fins 8, although ie will be apparent to one 18 skilled in the art that any heat sinking approach including direct contact 19 with further fluids, is acceptable within the purview of the invention.
Referring next to FIG. 2 a cross sectional area of FIG. 1 showing 21 the details of the magnet 6 and the magnetic fluid 5 are provided. In 22 FIG. 2 the chip 3 is agaln shown using the solder reflow type connections 2 23 to the substrate 1. On the back of the chip 3 is shown the magnetic fluid 24 5. The magnet 6 has a shape such that the lines of flux go as is illus-trated from an outside region 9 to a centralized region 10, such that the 26 flux causes the magnetic fluid 5 to assume a shape permitting a larger 27 fluid quantity than viscosity would ordinarily permit and in turn facilita-28 ting increased convection and conduction of the heat from the back of the i~32~:~;63 1 chips to the magnet 6 which in turn is bonded thermally to the heat sink 7 2 which ln turn transfers the heat through the fins 8 to the surrounding 3 environment.
4 The magnet 6 has a shape through its perlphery 9 and its central portion 10 to accomplish the following functions. It shapes the magnetic 6 fluid 5 to permit more fluid than viscosity will permit if needed, and it7 holds the fluid in place during vibrations and thermal expansion. The 8 shape of the fluid is such that heat transfer by both conduction and con-9 vection is enhanced. The non-uniform magnetic field generally draws the fluid to the region of higher magnetic field strengths which is generally 11 the center of the chip. If the quality of fluid is property ad~usted, the12 fluid will seal the region between the back of the chip and the magnet so13 that good thermal contact is produced between the chip and the heat sink,14 and the fluid connection will be independent of orientation of the structure.
Since no rigid contact exists the chip and the magnet can readily be brought 16 together and separated allowing assembly and repair to be accomplished con-17 veniently.
18 What has been described i8 the use of a magnet and a magnetic 19 fluid to enhance both conduction and convection of heat from the back of a chip to a heat sink while at the same time maintaining a non-rigid but 21 thermally efficient contact.
Claims (6)
1. Heat transfer apparatus for conducting heat from a semiconductor chip to a heat sink comprising in combina-tion:
a fluid composed of magnetically responsive particles suspended in a vehicle positioned in contact with a semi-conductor chip and in contact with a magnetic heat sink.
a fluid composed of magnetically responsive particles suspended in a vehicle positioned in contact with a semi-conductor chip and in contact with a magnetic heat sink.
2. The heat transfer apparatus of claim 1 wherein said magnetic heat sink is made up of a magnet bonded to a finned heat transfer member.
3. The heat transfer apparatus of claim 2 wherein said magnetic heat sink has a shape producing a circular mag-netic flux from a peripheral ring to a centralized region.
4. In semiconductor integrated circuit apparatus of the type wherein signals to and from a semiconductor chip are entered and leave the chip from one side, the improvement comprising:
means for dissipating heat from the back of said chip via a fluid composed of magnetically responsive particles suspended in a vehicle, said fluid cooperating with a shaped magnetic field emanating from a magnet bonded to a heat sink to thereby conduct heat from said chip to said heat sink.
means for dissipating heat from the back of said chip via a fluid composed of magnetically responsive particles suspended in a vehicle, said fluid cooperating with a shaped magnetic field emanating from a magnet bonded to a heat sink to thereby conduct heat from said chip to said heat sink.
5. Semiconductor integrated circuit apparatus comprising in combination:
a substrate;
a semiconductor integrated circuit chip;
a plurality of interconnections between electrical points on said substrate and electrical points on a first side of said chip;
a heat sink, a magnet thermally bonded to said heat sink and a fluid composed of magnetically responsive particles suspended in a vehicle forming contact between said magnet and the opposite side of said chip.
a substrate;
a semiconductor integrated circuit chip;
a plurality of interconnections between electrical points on said substrate and electrical points on a first side of said chip;
a heat sink, a magnet thermally bonded to said heat sink and a fluid composed of magnetically responsive particles suspended in a vehicle forming contact between said magnet and the opposite side of said chip.
6. The apparatus of claim 5 wherein said magnet pro-vides a shaped magnetic field from a peripheral region to a centralized region.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US82419777A | 1977-08-12 | 1977-08-12 | |
| US824,197 | 1977-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1102010A true CA1102010A (en) | 1981-05-26 |
Family
ID=25240847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA305,488A Expired CA1102010A (en) | 1977-08-12 | 1978-06-14 | Magnetic heat sink for semiconductor ship |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0000856B1 (en) |
| JP (1) | JPS5432074A (en) |
| CA (1) | CA1102010A (en) |
| DE (1) | DE2861442D1 (en) |
| IT (1) | IT1112288B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2495846A1 (en) * | 1980-12-05 | 1982-06-11 | Cii Honeywell Bull | ELECTRICAL CONNECTION DEVICE HAVING HIGH DENSITY OF CONTACTS |
| FR2495838A1 (en) * | 1980-12-05 | 1982-06-11 | Cii Honeywell Bull | REMOVABLE COOLING DEVICE FOR INTEGRATED CIRCUIT CARRIERS |
| US5594355A (en) * | 1994-07-19 | 1997-01-14 | Delta Design, Inc. | Electrical contactor apparatus for testing integrated circuit devices |
| JPH09210801A (en) * | 1996-02-05 | 1997-08-15 | Yuji Inomata | Detection device for placement in the flow path |
| FR2811476B1 (en) * | 2000-07-07 | 2002-12-06 | Thomson Csf | ELECTRONIC DEVICE WITH THERMALLY CONDUCTIVE ENCAPSULANT |
| US7031160B2 (en) * | 2003-10-07 | 2006-04-18 | The Boeing Company | Magnetically enhanced convection heat sink |
| US7516778B2 (en) | 2005-09-06 | 2009-04-14 | Sun Microsystems, Inc. | Magneto-hydrodynamic heat sink |
| US8730674B2 (en) * | 2011-12-12 | 2014-05-20 | Toyota Motor Engineering & Manufacturing North America, Inc. | Magnetic fluid cooling devices and power electronics assemblies |
| JP6036431B2 (en) * | 2013-03-18 | 2016-11-30 | 富士通株式会社 | Semiconductor device |
| CN114390772B (en) * | 2021-12-29 | 2024-03-08 | 江苏密特科智能装备制造有限公司 | Precision component of semiconductor equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3706127A (en) * | 1970-04-27 | 1972-12-19 | Ibm | Method for forming heat sinks on semiconductor device chips |
| GB1441433A (en) * | 1973-09-18 | 1976-06-30 | Ind Instr Ltd | Heat conductive pastes |
-
1978
- 1978-06-14 CA CA305,488A patent/CA1102010A/en not_active Expired
- 1978-07-07 JP JP8215378A patent/JPS5432074A/en active Granted
- 1978-07-20 DE DE7878430006T patent/DE2861442D1/en not_active Expired
- 1978-07-20 EP EP78430006A patent/EP0000856B1/en not_active Expired
- 1978-07-26 IT IT26104/78A patent/IT1112288B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| IT7826104A0 (en) | 1978-07-26 |
| EP0000856A1 (en) | 1979-02-21 |
| EP0000856B1 (en) | 1981-12-16 |
| DE2861442D1 (en) | 1982-02-11 |
| JPS5635026B2 (en) | 1981-08-14 |
| JPS5432074A (en) | 1979-03-09 |
| IT1112288B (en) | 1986-01-13 |
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Legal Events
| Date | Code | Title | Description |
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| MKEX | Expiry |