CA1110464A - Transducteur de pression differentielle en courant electrique a circuit resistif sensible a la tension mecanique sur un substrat ayant un module d'elasticite eleve - Google Patents
Transducteur de pression differentielle en courant electrique a circuit resistif sensible a la tension mecanique sur un substrat ayant un module d'elasticite eleveInfo
- Publication number
- CA1110464A CA1110464A CA312,439A CA312439A CA1110464A CA 1110464 A CA1110464 A CA 1110464A CA 312439 A CA312439 A CA 312439A CA 1110464 A CA1110464 A CA 1110464A
- Authority
- CA
- Canada
- Prior art keywords
- slab
- housing
- secured
- rod
- header
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 title abstract description 4
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 17
- 239000010980 sapphire Substances 0.000 claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 230000008859 change Effects 0.000 claims abstract description 8
- 239000002775 capsule Substances 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 239000004606 Fillers/Extenders Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229940000425 combination drug Drugs 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US83853877A | 1977-10-03 | 1977-10-03 | |
| US838,538 | 1977-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1110464A true CA1110464A (fr) | 1981-10-13 |
Family
ID=25277360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA312,439A Expired CA1110464A (fr) | 1977-10-03 | 1978-10-02 | Transducteur de pression differentielle en courant electrique a circuit resistif sensible a la tension mecanique sur un substrat ayant un module d'elasticite eleve |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5458481A (fr) |
| CA (1) | CA1110464A (fr) |
| DE (1) | DE2842474A1 (fr) |
| GB (1) | GB2005425B (fr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2825222C2 (de) * | 1978-06-06 | 1981-09-17 | Siemens AG, 1000 Berlin und 8000 München | Druckmeßumformer |
| DE2952843A1 (de) * | 1978-06-09 | 1980-12-18 | K Hayashi | Pressure transducer |
| JPS56129831A (en) * | 1980-03-17 | 1981-10-12 | Yokogawa Hokushin Electric Corp | Pressure converter |
| CA1161273A (fr) * | 1980-07-25 | 1984-01-31 | Bourns Instruments, Inc. | Transducteur de pression differentielle a cantilever a effort constant et a grande souplesse |
| GB2175398A (en) * | 1985-05-21 | 1986-11-26 | Stc Plc | Pressure transducer |
| DE3621795A1 (de) * | 1986-06-28 | 1988-01-07 | Eckardt Ag | Differenzdruckgeber |
-
1978
- 1978-09-22 JP JP11604478A patent/JPS5458481A/ja active Pending
- 1978-09-29 DE DE19782842474 patent/DE2842474A1/de not_active Withdrawn
- 1978-10-02 CA CA312,439A patent/CA1110464A/fr not_active Expired
- 1978-10-03 GB GB7839097A patent/GB2005425B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2842474A1 (de) | 1979-04-12 |
| GB2005425B (en) | 1982-05-26 |
| JPS5458481A (en) | 1979-05-11 |
| GB2005425A (en) | 1979-04-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0373010B1 (fr) | Capteur de pression utilisable dans les puits de forage de pétrole | |
| EP0616688B1 (fr) | Conception de capteur de pression au silicium piezo-resistant | |
| US5396802A (en) | Differential pressure transducer utilizing a variable ferrofluid keeper as an active magnetic circuit element | |
| US5731522A (en) | Transmitter with isolation assembly for pressure sensor | |
| JP5634026B2 (ja) | 差動流体圧力測定装置 | |
| US5792958A (en) | Pressure sensor with a compressible insert to prevent damage from freezing | |
| US5712428A (en) | Pressure sensor with a solid to minimize temperature-related measurement error | |
| CA1110464A (fr) | Transducteur de pression differentielle en courant electrique a circuit resistif sensible a la tension mecanique sur un substrat ayant un module d'elasticite eleve | |
| EP0165302A1 (fr) | Detecteur de pression avec butee de surpression sensiblement plate pour le diaphragme de mesure | |
| CA3068237C (fr) | Ensemble capteur de pression | |
| US4212209A (en) | Differential pressure to electric current transducer employing a strain sensitive resistive pattern on a substrate having a high modulus of elasticity | |
| US8353215B2 (en) | Torque output differential pressure sensor | |
| EP0943782A3 (fr) | Réseau de capteurs utilisable dans les puits de forage | |
| AU777303B2 (en) | Fiber Bragg grating reference sensor for precise reference temperature measurement | |
| GB2441785A (en) | A ruggedized pressure sensor for high presure applications | |
| AU2014202001A1 (en) | Sensor with isolated diaphragm | |
| US10288514B2 (en) | System and method for reducing thermal offset in a pressure gauge | |
| EP1634046A1 (fr) | Capteur de pression a structure integree | |
| EP0650041A2 (fr) | Transducteur de pression muni d'un capteur à effet Hall | |
| US11366035B2 (en) | System and method for reducing thermal offset in a pressure gauge | |
| US4766769A (en) | Differential-pressure measuring apparatus with improved arrangement for coupling pressures to a semiconductor sensor | |
| US4693121A (en) | Differential-pressure measuring apparatus with improved overpressure protection | |
| KR200283536Y1 (ko) | 반도체형 압력센서를 이용한 간극수압계 | |
| USH606H (en) | Pressure sensor assembly | |
| GB2175398A (en) | Pressure transducer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |