CA1111664A - Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium - Google Patents

Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium

Info

Publication number: CA1111664A
Authority: CA; Canada
Prior art keywords: silicon; diamond; hot; rich alloy; mass
Prior art date: 1978-10-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA314,455A

Other languages

English (en)

Inventor

Minyoung Lee

Lawrence E. Szala

Robert C. Devries

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

General Electric Co

Original Assignee

General Electric Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-10-26

Filing date

1978-10-26

Publication date

1981-11-03

1978-10-26 Application filed by General Electric Co filed Critical General Electric Co

1978-10-26 Priority to CA314,455A priority Critical patent/CA1111664A/fr

1981-11-03 Application granted granted Critical

1981-11-03 Publication of CA1111664A publication Critical patent/CA1111664A/fr

Status Expired legal-status Critical Current

Links

239000010432 diamond Substances 0.000 title claims abstract description 385
229910003460 diamond Inorganic materials 0.000 title claims abstract description 369
239000000758 substrate Substances 0.000 title claims abstract description 114
239000002131 composite material Substances 0.000 title claims abstract description 109
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 106
229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 99
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 90
229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 81
229910045601 alloy Inorganic materials 0.000 claims abstract description 190
239000000956 alloy Substances 0.000 claims abstract description 190
229910052710 silicon Inorganic materials 0.000 claims abstract description 172
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 168
239000010703 silicon Substances 0.000 claims abstract description 165
239000013078 crystal Substances 0.000 claims abstract description 133
239000000843 powder Substances 0.000 claims abstract description 61
239000012530 fluid Substances 0.000 claims abstract description 52
238000001816 cooling Methods 0.000 claims abstract description 7
238000007731 hot pressing Methods 0.000 claims description 97
229910052751 metal Inorganic materials 0.000 claims description 50
239000002184 metal Substances 0.000 claims description 50
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 46
239000007787 solid Substances 0.000 claims description 39
238000000034 method Methods 0.000 claims description 38
229910052799 carbon Inorganic materials 0.000 claims description 34
230000008569 process Effects 0.000 claims description 24
229910021332 silicide Inorganic materials 0.000 claims description 22
229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 21
FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 21
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 18
229910052726 zirconium Inorganic materials 0.000 claims description 17
238000003825 pressing Methods 0.000 claims description 16
239000011148 porous material Substances 0.000 claims description 13
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 11
230000002939 deleterious effect Effects 0.000 claims description 11
229910052750 molybdenum Inorganic materials 0.000 claims description 11
239000011733 molybdenum Substances 0.000 claims description 11
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 9
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 9
239000012298 atmosphere Substances 0.000 claims description 9
239000011651 chromium Substances 0.000 claims description 9
229910052715 tantalum Inorganic materials 0.000 claims description 9
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 9
239000010936 titanium Substances 0.000 claims description 9
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
229910052719 titanium Inorganic materials 0.000 claims description 8
229910052720 vanadium Inorganic materials 0.000 claims description 8
238000011049 filling Methods 0.000 claims description 7
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 7
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
229910052721 tungsten Inorganic materials 0.000 claims description 7
239000010937 tungsten Substances 0.000 claims description 7
ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 6
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
229910052776 Thorium Inorganic materials 0.000 claims description 6
229910052770 Uranium Inorganic materials 0.000 claims description 6
229910052804 chromium Inorganic materials 0.000 claims description 6
229910052735 hafnium Inorganic materials 0.000 claims description 6
VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 6
238000004519 manufacturing process Methods 0.000 claims description 6
229910052702 rhenium Inorganic materials 0.000 claims description 6
WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 6
239000010948 rhodium Substances 0.000 claims description 6
JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 claims description 6
LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 6
229910052727 yttrium Inorganic materials 0.000 claims description 6
VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 6
KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 5
238000002441 X-ray diffraction Methods 0.000 claims description 5
239000000543 intermediate Substances 0.000 claims description 5
229910052703 rhodium Inorganic materials 0.000 claims description 5
MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 5
229910052707 ruthenium Inorganic materials 0.000 claims description 5
229910017052 cobalt Inorganic materials 0.000 claims description 4
239000010941 cobalt Substances 0.000 claims description 4
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
239000000470 constituent Substances 0.000 claims description 4
229910052742 iron Inorganic materials 0.000 claims description 4
WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 4
229910052759 nickel Inorganic materials 0.000 claims description 4
229910052763 palladium Inorganic materials 0.000 claims description 4
230000001681 protective effect Effects 0.000 claims description 4
229910052697 platinum Inorganic materials 0.000 claims 3
229910000684 Cobalt-chrome Inorganic materials 0.000 claims 1
WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical compound [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 claims 1
239000010952 cobalt-chrome Substances 0.000 claims 1
239000000919 ceramic Substances 0.000 abstract 1
238000005520 cutting process Methods 0.000 description 42
239000000203 mixture Substances 0.000 description 33
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 24
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 22
230000005496 eutectics Effects 0.000 description 22
238000002844 melting Methods 0.000 description 18
230000008018 melting Effects 0.000 description 18
239000010410 layer Substances 0.000 description 17
230000008595 infiltration Effects 0.000 description 16
238000001764 infiltration Methods 0.000 description 16
239000000654 additive Substances 0.000 description 15
239000012071 phase Substances 0.000 description 15
230000000996 additive effect Effects 0.000 description 14
229910052790 beryllium Inorganic materials 0.000 description 14
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 12
ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 12
229910052796 boron Inorganic materials 0.000 description 12
229910002804 graphite Inorganic materials 0.000 description 12
239000010439 graphite Substances 0.000 description 12
229910052757 nitrogen Inorganic materials 0.000 description 12
229960005419 nitrogen Drugs 0.000 description 12
238000005245 sintering Methods 0.000 description 12
230000001464 adherent effect Effects 0.000 description 10
-1 alloying me-tal Chemical compound 0.000 description 10
210000001736 capillary Anatomy 0.000 description 10
238000000227 grinding Methods 0.000 description 9
238000012360 testing method Methods 0.000 description 9
229910052582 BN Inorganic materials 0.000 description 8
229910000676 Si alloy Inorganic materials 0.000 description 8
229910000831 Steel Inorganic materials 0.000 description 8
230000006698 induction Effects 0.000 description 8
239000011229 interlayer Substances 0.000 description 8
229910052749 magnesium Inorganic materials 0.000 description 8
239000011777 magnesium Substances 0.000 description 8
239000000463 material Substances 0.000 description 8
239000010959 steel Substances 0.000 description 8
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 7
238000006243 chemical reaction Methods 0.000 description 7
239000006185 dispersion Substances 0.000 description 7
239000012634 fragment Substances 0.000 description 7
238000011065 in-situ storage Methods 0.000 description 7
230000003287 optical effect Effects 0.000 description 7
239000002245 particle Substances 0.000 description 7
229910001093 Zr alloy Inorganic materials 0.000 description 6
239000006023 eutectic alloy Substances 0.000 description 6
238000003754 machining Methods 0.000 description 6
239000011800 void material Substances 0.000 description 6
229910052580 B4C Inorganic materials 0.000 description 5
238000005275 alloying Methods 0.000 description 5
238000005422 blasting Methods 0.000 description 5
INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 5
230000007547 defect Effects 0.000 description 5
238000002474 experimental method Methods 0.000 description 5
238000010438 heat treatment Methods 0.000 description 5
239000007788 liquid Substances 0.000 description 5
238000012856 packing Methods 0.000 description 5
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
229910001018 Cast iron Inorganic materials 0.000 description 4
229910000905 alloy phase Inorganic materials 0.000 description 4
238000010586 diagram Methods 0.000 description 4
239000010419 fine particle Substances 0.000 description 4
239000001257 hydrogen Substances 0.000 description 4
229910052739 hydrogen Inorganic materials 0.000 description 4
239000007791 liquid phase Substances 0.000 description 4
239000012299 nitrogen atmosphere Substances 0.000 description 4
239000000047 product Substances 0.000 description 4
239000007790 solid phase Substances 0.000 description 4
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
230000009969 flowable effect Effects 0.000 description 3
238000001802 infusion Methods 0.000 description 3
230000035515 penetration Effects 0.000 description 3
238000010587 phase diagram Methods 0.000 description 3
238000007514 turning Methods 0.000 description 3
GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 3
238000004458 analytical method Methods 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
230000008901 benefit Effects 0.000 description 2
JZKFIPKXQBZXMW-UHFFFAOYSA-L beryllium difluoride Chemical compound F[Be]F JZKFIPKXQBZXMW-UHFFFAOYSA-L 0.000 description 2
229910001633 beryllium fluoride Inorganic materials 0.000 description 2
239000011230 binding agent Substances 0.000 description 2
238000000354 decomposition reaction Methods 0.000 description 2
230000007423 decrease Effects 0.000 description 2
230000003247 decreasing effect Effects 0.000 description 2
230000002542 deteriorative effect Effects 0.000 description 2
238000002050 diffraction method Methods 0.000 description 2
238000009826 distribution Methods 0.000 description 2
239000012535 impurity Substances 0.000 description 2
239000011261 inert gas Substances 0.000 description 2
YTHCQFKNFVSQBC-UHFFFAOYSA-N magnesium silicide Chemical compound [Mg]=[Si]=[Mg] YTHCQFKNFVSQBC-UHFFFAOYSA-N 0.000 description 2
229910021338 magnesium silicide Inorganic materials 0.000 description 2
239000011572 manganese Substances 0.000 description 2
239000000155 melt Substances 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
239000010955 niobium Substances 0.000 description 2
238000007493 shaping process Methods 0.000 description 2
239000002893 slag Substances 0.000 description 2
239000006104 solid solution Substances 0.000 description 2
241000894007 species Species 0.000 description 2
238000010183 spectrum analysis Methods 0.000 description 2
238000005303 weighing Methods 0.000 description 2
229910000599 Cr alloy Inorganic materials 0.000 description 1
PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
TZRXHJWUDPFEEY-UHFFFAOYSA-N Pentaerythritol Tetranitrate Chemical compound [O-][N+](=O)OCC(CO[N+]([O-])=O)(CO[N+]([O-])=O)CO[N+]([O-])=O TZRXHJWUDPFEEY-UHFFFAOYSA-N 0.000 description 1
229920000265 Polyparaphenylene Polymers 0.000 description 1
206010037660 Pyrexia Diseases 0.000 description 1
208000036366 Sensation of pressure Diseases 0.000 description 1
241001168730 Simo Species 0.000 description 1
229910001315 Tool steel Inorganic materials 0.000 description 1
MKPXGEVFQSIKGE-UHFFFAOYSA-N [Mg].[Si] Chemical compound [Mg].[Si] MKPXGEVFQSIKGE-UHFFFAOYSA-N 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
230000009471 action Effects 0.000 description 1
230000002730 additional effect Effects 0.000 description 1
VREFGVBLTWBCJP-UHFFFAOYSA-N alprazolam Chemical class C12=CC(Cl)=CC=C2N2C(C)=NN=C2CN=C1C1=CC=CC=C1 VREFGVBLTWBCJP-UHFFFAOYSA-N 0.000 description 1
230000004888 barrier function Effects 0.000 description 1
UQVOJETYKFAIRZ-UHFFFAOYSA-N beryllium carbide Chemical compound [Be][C][Be] UQVOJETYKFAIRZ-UHFFFAOYSA-N 0.000 description 1
150000001639 boron compounds Chemical class 0.000 description 1
230000008859 change Effects 0.000 description 1
239000000788 chromium alloy Substances 0.000 description 1
DYRBFMPPJATHRF-UHFFFAOYSA-N chromium silicon Chemical compound [Si].[Cr] DYRBFMPPJATHRF-UHFFFAOYSA-N 0.000 description 1
238000007596 consolidation process Methods 0.000 description 1
230000002844 continuous effect Effects 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
229910021419 crystalline silicon Inorganic materials 0.000 description 1
238000000280 densification Methods 0.000 description 1
230000000994 depressogenic effect Effects 0.000 description 1
238000011161 development Methods 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000000635 electron micrograph Methods 0.000 description 1
238000001493 electron microscopy Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
239000012467 final product Substances 0.000 description 1
239000001307 helium Substances 0.000 description 1
229910052734 helium Inorganic materials 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
239000007970 homogeneous dispersion Substances 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
230000002706 hydrostatic effect Effects 0.000 description 1
238000007689 inspection Methods 0.000 description 1
229910000765 intermetallic Inorganic materials 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
238000010902 jet-milling Methods 0.000 description 1
FKWSMBAMOQCVPV-UHFFFAOYSA-N magnesium dicyanide Chemical compound [Mg+2].N#[C-].N#[C-] FKWSMBAMOQCVPV-UHFFFAOYSA-N 0.000 description 1
ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
229910001635 magnesium fluoride Inorganic materials 0.000 description 1
UPKIHOQVIBBESY-UHFFFAOYSA-N magnesium;carbanide Chemical compound [CH3-].[CH3-].[Mg+2] UPKIHOQVIBBESY-UHFFFAOYSA-N 0.000 description 1
229910052748 manganese Inorganic materials 0.000 description 1
238000001000 micrograph Methods 0.000 description 1
229910052758 niobium Inorganic materials 0.000 description 1
GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
150000004767 nitrides Chemical class 0.000 description 1
229910052755 nonmetal Inorganic materials 0.000 description 1
239000011368 organic material Substances 0.000 description 1
238000005498 polishing Methods 0.000 description 1
229920000642 polymer Polymers 0.000 description 1
239000002244 precipitate Substances 0.000 description 1
BALXUFOVQVENIU-KXNXZCPBSA-N pseudoephedrine hydrochloride Chemical compound [H+].[Cl-].CN[C@@H](C)[C@@H](O)C1=CC=CC=C1 BALXUFOVQVENIU-KXNXZCPBSA-N 0.000 description 1
230000008707 rearrangement Effects 0.000 description 1
230000009467 reduction Effects 0.000 description 1
230000004044 response Effects 0.000 description 1
239000004576 sand Substances 0.000 description 1
231100000241 scar Toxicity 0.000 description 1
VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
UVGLBOPDEUYYCS-UHFFFAOYSA-N silicon zirconium Chemical compound [Si].[Zr] UVGLBOPDEUYYCS-UHFFFAOYSA-N 0.000 description 1
238000004513 sizing Methods 0.000 description 1
230000006641 stabilisation Effects 0.000 description 1
238000013112 stability test Methods 0.000 description 1
238000011105 stabilization Methods 0.000 description 1
238000005979 thermal decomposition reaction Methods 0.000 description 1
238000004627 transmission electron microscopy Methods 0.000 description 1
239000011345 viscous material Substances 0.000 description 1

Landscapes

Ceramic Products (AREA)

CA314,455A 1978-10-26 1978-10-26 Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium Expired CA1111664A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA314,455A CA1111664A (fr)	1978-10-26	1978-10-26	Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA314,455A CA1111664A (fr)	1978-10-26	1978-10-26	Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium

Publications (1)

Publication Number	Publication Date
CA1111664A true CA1111664A (fr)	1981-11-03

Family

ID=4112714

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA314,455A Expired CA1111664A (fr)	1978-10-26	1978-10-26	Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium

Country Status (1)

Country	Link
CA (1)	CA1111664A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN114473651A (zh) *	2022-03-02	2022-05-13	广东机电职业技术学院	一种用于刀刃磨削的智能控制系统

1978
- 1978-10-26 CA CA314,455A patent/CA1111664A/fr not_active Expired

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN114473651A (zh) *	2022-03-02	2022-05-13	广东机电职业技术学院	一种用于刀刃磨削的智能控制系统

Legal Events

Date	Code	Title	Description
1998-11-03	MKEX	Expiry

Publication	Publication Date	Title
US4241135A (en)	1980-12-23	Polycrystalline diamond body/silicon carbide substrate composite
US4171339A (en)	1979-10-16	Process for preparing a polycrystalline diamond body/silicon carbide substrate composite
US4110084A (en)	1978-08-29	Composite of bonded cubic boron nitride crystals on a silicon carbide substrate
CA1105496A (fr)	1981-07-21	Element diamantaire polycristallin
CA1136428A (fr)	1982-11-30	Corps diamantaire polycristallin
US4168957A (en)	1979-09-25	Process for preparing a silicon-bonded polycrystalline diamond body
US4167399A (en)	1979-09-11	Process for preparing a polycrystalline diamond body
IE48038B1 (en)	1984-09-05	Polycrystalline diamond body/silicon carbide or silicon nitride substrate composite
CA1140728A (fr)	1983-02-08	Obtention de nitrure de bore cubique a partir de nitrure de bore hexagonal en poudre, sans catalyseur
US4173614A (en)	1979-11-06	Process for preparing a polycrystalline diamond body/silicon nitride substrate composite
CA1136429A (fr)	1982-11-30	Corps abrasifs compacts
US4650776A (en)	1987-03-17	Cubic boron nitride compact and method of making
EP0531310B1 (fr)	1997-04-02	Comprime abrasif de nitrure de bore cubique et procede de fabrication
US4151686A (en)	1979-05-01	Silicon carbide and silicon bonded polycrystalline diamond body and method of making it
US3982911A (en)	1976-09-28	Process for the preparation of a composite cubic boron nitride layer abrasive body
CA1324889C (fr)	1993-12-07	Agglomere de diamant de faible resistivite
JP2004505786A (ja)	2004-02-26	ダイヤモンド含有研磨用製品の製法
US4234661A (en)	1980-11-18	Polycrystalline diamond body/silicon nitride substrate composite
Tennery et al.	1983	Structure-property correlations for TiB2-based ceramics densified using active liquid metals
US6315945B1 (en)	2001-11-13	Method to form dense complex shaped articles
CA1105948A (fr)	1981-07-28	Element diamantaire polycristallin
CA1111664A (fr)	1981-11-03	Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium
USRE30503E (en)	1981-02-03	Composite of bonded cubic boron nitride crystals on a silicon carbide substrate
CA1103940A (fr)	1981-06-30	Traduction non-disponible
JPH0368938B2 (fr)	1991-10-30

CA1111664A - Compose pour substrat a base de cristaux de diamant et de carbure ou nitrure de silicium - Google Patents

Info

Links

Landscapes

Priority Applications (1)

Applications Claiming Priority (1)

Publications (1)

Family

ID=4112714

Family Applications (1)

Country Status (1)

Cited By (1)

Cited By (1)

Similar Documents

Legal Events