CA1122385A - Procede d'obtention de nitrure de silicium dense contenant de l'oxyde d'yttrium et de l'oxyde d'aluminium, et resistant bien a la temperature et a l'oxydation - Google Patents

Procede d'obtention de nitrure de silicium dense contenant de l'oxyde d'yttrium et de l'oxyde d'aluminium, et resistant bien a la temperature et a l'oxydation

Info

Publication number: CA1122385A
Authority: CA; Canada
Prior art keywords: si3n4; weight percent; powder; silicon nitride; oxidation resistance
Prior art date: 1979-06-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA329,449A

Other languages

English (en)

Inventor

Carr L.W. Quackenbush

J. Thomas Smith

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Verizon Laboratories Inc

Original Assignee

GTE Laboratories Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1979-06-11

Filing date

1979-06-11

Publication date

1982-04-27

1979-06-11 Application filed by GTE Laboratories Inc filed Critical GTE Laboratories Inc

1979-06-11 Priority to CA329,449A priority Critical patent/CA1122385A/fr

1982-04-27 Application granted granted Critical

1982-04-27 Publication of CA1122385A publication Critical patent/CA1122385A/fr

Status Expired legal-status Critical Current

Links

229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 48
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 44
238000004519 manufacturing process Methods 0.000 title claims abstract description 6
230000003647 oxidation Effects 0.000 title abstract description 18
238000007254 oxidation reaction Methods 0.000 title abstract description 18
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title abstract description 3
SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 title abstract description 3
239000000843 powder Substances 0.000 claims abstract description 24
238000005245 sintering Methods 0.000 claims abstract description 16
239000012535 impurity Substances 0.000 claims abstract description 13
238000002425 crystallisation Methods 0.000 claims abstract description 8
230000008025 crystallization Effects 0.000 claims abstract description 8
238000010438 heat treatment Methods 0.000 claims abstract description 7
150000001768 cations Chemical class 0.000 claims abstract description 5
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
238000000034 method Methods 0.000 claims description 12
239000000203 mixture Substances 0.000 claims description 12
239000000463 material Substances 0.000 claims description 11
229910052681 coesite Inorganic materials 0.000 claims description 9
229910052906 cristobalite Inorganic materials 0.000 claims description 9
239000000377 silicon dioxide Substances 0.000 claims description 9
235000012239 silicon dioxide Nutrition 0.000 claims description 9
229910052682 stishovite Inorganic materials 0.000 claims description 9
229910052905 tridymite Inorganic materials 0.000 claims description 9
239000007858 starting material Substances 0.000 claims description 8
238000003825 pressing Methods 0.000 claims description 3
239000012298 atmosphere Substances 0.000 claims description 2
238000002156 mixing Methods 0.000 claims description 2
230000001590 oxidative effect Effects 0.000 claims description 2
239000002245 particle Substances 0.000 claims description 2
239000000654 additive Substances 0.000 abstract description 2
230000000996 additive effect Effects 0.000 abstract description 2
238000011084 recovery Methods 0.000 abstract description 2
239000002918 waste heat Substances 0.000 abstract description 2
239000012071 phase Substances 0.000 description 14
238000007731 hot pressing Methods 0.000 description 12
238000001272 pressureless sintering Methods 0.000 description 7
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
238000000280 densification Methods 0.000 description 6
238000003801 milling Methods 0.000 description 4
230000008569 process Effects 0.000 description 4
OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
238000007596 consolidation process Methods 0.000 description 3
230000000694 effects Effects 0.000 description 3
239000011521 glass Substances 0.000 description 3
229910052757 nitrogen Inorganic materials 0.000 description 3
239000000523 sample Substances 0.000 description 3
239000002002 slurry Substances 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
238000002441 X-ray diffraction Methods 0.000 description 2
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
238000005299 abrasion Methods 0.000 description 2
238000007792 addition Methods 0.000 description 2
229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
230000008901 benefit Effects 0.000 description 2
229910021419 crystalline silicon Inorganic materials 0.000 description 2
230000003247 decreasing effect Effects 0.000 description 2
238000009792 diffusion process Methods 0.000 description 2
230000009477 glass transition Effects 0.000 description 2
238000000227 grinding Methods 0.000 description 2
239000000543 intermediate Substances 0.000 description 2
239000003607 modifier Substances 0.000 description 2
239000001301 oxygen Substances 0.000 description 2
229910052760 oxygen Inorganic materials 0.000 description 2
229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
229910052582 BN Inorganic materials 0.000 description 1
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
239000003513 alkali Substances 0.000 description 1
WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
229910021502 aluminium hydroxide Inorganic materials 0.000 description 1
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
229910021417 amorphous silicon Inorganic materials 0.000 description 1
230000004888 barrier function Effects 0.000 description 1
230000009286 beneficial effect Effects 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
238000001816 cooling Methods 0.000 description 1
239000002178 crystalline material Substances 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000009837 dry grinding Methods 0.000 description 1
230000001747 exhibiting effect Effects 0.000 description 1
239000010419 fine particle Substances 0.000 description 1
239000007789 gas Substances 0.000 description 1
229910001679 gibbsite Inorganic materials 0.000 description 1
229910002804 graphite Inorganic materials 0.000 description 1
239000010439 graphite Substances 0.000 description 1
238000001513 hot isostatic pressing Methods 0.000 description 1
230000006872 improvement Effects 0.000 description 1
238000001746 injection moulding Methods 0.000 description 1
238000000462 isostatic pressing Methods 0.000 description 1
229910052747 lanthanoid Inorganic materials 0.000 description 1
150000002602 lanthanoids Chemical class 0.000 description 1
239000007791 liquid phase Substances 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
239000012299 nitrogen atmosphere Substances 0.000 description 1
239000002243 precursor Substances 0.000 description 1
230000000717 retained effect Effects 0.000 description 1
239000005368 silicate glass Substances 0.000 description 1
238000004088 simulation Methods 0.000 description 1
238000007569 slipcasting Methods 0.000 description 1
239000007787 solid Substances 0.000 description 1
239000000243 solution Substances 0.000 description 1
241000894007 species Species 0.000 description 1
230000007704 transition Effects 0.000 description 1
238000009834 vaporization Methods 0.000 description 1
230000008016 vaporization Effects 0.000 description 1

Classifications

- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines

Landscapes

Ceramic Products (AREA)

CA329,449A 1979-06-11 1979-06-11 Procede d'obtention de nitrure de silicium dense contenant de l'oxyde d'yttrium et de l'oxyde d'aluminium, et resistant bien a la temperature et a l'oxydation Expired CA1122385A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA329,449A CA1122385A (fr)	1979-06-11	1979-06-11	Procede d'obtention de nitrure de silicium dense contenant de l'oxyde d'yttrium et de l'oxyde d'aluminium, et resistant bien a la temperature et a l'oxydation

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA329,449A CA1122385A (fr)	1979-06-11	1979-06-11	Procede d'obtention de nitrure de silicium dense contenant de l'oxyde d'yttrium et de l'oxyde d'aluminium, et resistant bien a la temperature et a l'oxydation

Publications (1)

Publication Number	Publication Date
CA1122385A true CA1122385A (fr)	1982-04-27

Family

ID=4114403

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA329,449A Expired CA1122385A (fr)	1979-06-11	1979-06-11	Procede d'obtention de nitrure de silicium dense contenant de l'oxyde d'yttrium et de l'oxyde d'aluminium, et resistant bien a la temperature et a l'oxydation

Country Status (1)

Country	Link
CA (1)	CA1122385A (fr)

1979
- 1979-06-11 CA CA329,449A patent/CA1122385A/fr not_active Expired

Legal Events

Date	Code	Title	Description
1999-04-27	MKEX	Expiry

Publication	Publication Date	Title
CA1131257A (fr)	1982-09-07	Procede d'obtention de si.sub.3n.sub.4 a forte resistance thermique
CA1270264A (fr)	1990-06-12	Corps frittes denses a base de nitrures
US4179301A (en)	1979-12-18	Si3 N4 containing intergranular phase nucleating agent and method
CA1200257A (fr)	1986-02-04	Methode de mise en forme de produits en matiere ceramique, materiaux entrant dans la composition ceramique, et produits ainsi obtenus
CA1142334A (fr)	1983-03-08	Methode de fabrication d'outils de coupe a base de nitrure de silicone - i
EP0385509A1 (fr)	1990-09-05	Procédé de production de matériaux composites céramiques
US4376742A (en)	1983-03-15	Fugitive liquid phase densification of silicon nitride
EP0589997B1 (fr)	1995-07-19	Nitrure de silicium fritte a durete et a resistance elevees
US4093687A (en)	1978-06-06	Hot pressing of silicon nitride using magnesium silicide
EP0015285B1 (fr)	1984-02-22	Nitrure de silicium a haute resistance
JPS5851910B2 (ja)	1983-11-18	チツカケイソケイシヨウケツタイノセイゾウホウホウ
US4350771A (en)	1982-09-21	Oxidation resistant silicon nitride containing rare earth oxide
US5439853A (en)	1995-08-08	Mixed oxide composite ceramics and method of producing the same
US4806510A (en)	1989-02-21	Silicon nitride sintered body and method for producing same
CA1123862A (fr)	1982-05-18	Nitrure de silicium resistant a l'oxydation, contenant un oxyde de terre rare
EP0365553B1 (fr)	1992-08-12	Procede pour produire des materiaux composites en ceramique contenant de l'oxynitrure de silicium et de l'oxyde de zirconium
CA1122385A (fr)	1982-04-27	Procede d'obtention de nitrure de silicium dense contenant de l'oxyde d'yttrium et de l'oxyde d'aluminium, et resistant bien a la temperature et a l'oxydation
Popper	1983	Sintering of silicon nitride, a review
US5759933A (en)	1998-06-02	Gas pressure sintered silicon nitride having high strength and stress rupture resistance
US4510107A (en)	1985-04-09	Method of making densified Si3 N4 /oxynitride composite with premixed silicon and oxygen carrying agents
JP2766445B2 (ja)	1998-06-18	サイアロン質複合焼結体及びその製造方法
JP3152790B2 (ja)	2001-04-03	窒化珪素質焼結体の製造方法
JP3007732B2 (ja)	2000-02-07	窒化ケイ素−混合酸化物系焼結体およびその製造方法
CA1247335A (fr)	1988-12-28	Obtention d'un melange de sin.sub.4/oxynitrure plus dense grace a un melange preaalable de silicium et d'agents renfermant de l'oxygene
CA1234680A (fr)	1988-04-05	Obtention d'un melange dense d'oxynitrure/nitrure de silicium