CA1140251A - Systeme de detection des defauts dans un motif regulier - Google Patents
Systeme de detection des defauts dans un motif regulierInfo
- Publication number
- CA1140251A CA1140251A CA000347468A CA347468A CA1140251A CA 1140251 A CA1140251 A CA 1140251A CA 000347468 A CA000347468 A CA 000347468A CA 347468 A CA347468 A CA 347468A CA 1140251 A CA1140251 A CA 1140251A
- Authority
- CA
- Canada
- Prior art keywords
- signal
- pattern
- inspection system
- scan
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 31
- 230000007547 defect Effects 0.000 title claims abstract description 24
- 230000003111 delayed effect Effects 0.000 claims abstract description 21
- 230000007704 transition Effects 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 241001163743 Perlodes Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010835 comparative analysis Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000002431 foraging effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2182679A | 1979-03-19 | 1979-03-19 | |
| US06/021,822 US4292672A (en) | 1979-03-19 | 1979-03-19 | Inspection system for detecting defects in regular patterns |
| US021,822 | 1987-03-04 | ||
| US021,826 | 1987-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1140251A true CA1140251A (fr) | 1983-01-25 |
Family
ID=26695138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000347468A Expired CA1140251A (fr) | 1979-03-19 | 1980-03-12 | Systeme de detection des defauts dans un motif regulier |
Country Status (9)
| Country | Link |
|---|---|
| KR (1) | KR830001829B1 (fr) |
| CA (1) | CA1140251A (fr) |
| DD (1) | DD149585A5 (fr) |
| DE (1) | DE3010559C2 (fr) |
| FI (1) | FI800767A7 (fr) |
| FR (1) | FR2452101A1 (fr) |
| GB (1) | GB2044925B (fr) |
| IT (1) | IT1130315B (fr) |
| PL (1) | PL137040B1 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1196085A (fr) * | 1980-11-07 | 1985-10-29 | John W.V. Miller | Methode et dispositif de controle des defauts dans des bouteilles en verre par comparaison de leurs frequences |
| DE3578768D1 (de) * | 1985-03-14 | 1990-08-23 | Toppan Printing Co Ltd | Einrichtung zum ueberpruefen von abdruecken. |
| DE3522179A1 (de) * | 1985-06-21 | 1987-01-02 | Forschungsgemeinschaft Aut Sic | Vorrichtung zur durchfuehrung optischer messungen an eingebauten windschutzscheiben |
| DE3737869A1 (de) * | 1987-11-09 | 1989-05-24 | Wagner Hans Juergen Dipl Ing | Verfahren und einrichtung zum optischen pruefen von gegenstaenden |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1234941A (en) * | 1967-08-16 | 1971-06-09 | Emi Ltd | Improvements in or relating to pattern recognition devices |
| US3620630A (en) * | 1969-05-28 | 1971-11-16 | Raytheon Co | Radiation-sensitive mesh defect inspection system |
-
1980
- 1980-03-06 IT IT20392/80A patent/IT1130315B/it active
- 1980-03-10 FR FR8005292A patent/FR2452101A1/fr active Granted
- 1980-03-12 FI FI800767A patent/FI800767A7/fi not_active Application Discontinuation
- 1980-03-12 CA CA000347468A patent/CA1140251A/fr not_active Expired
- 1980-03-14 GB GB8008672A patent/GB2044925B/en not_active Expired
- 1980-03-15 KR KR1019800001095A patent/KR830001829B1/ko not_active Expired
- 1980-03-17 DD DD80219717A patent/DD149585A5/de unknown
- 1980-03-19 PL PL1980222821A patent/PL137040B1/pl unknown
- 1980-03-19 DE DE3010559A patent/DE3010559C2/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB2044925B (en) | 1983-02-09 |
| FI800767A7 (fi) | 1981-01-01 |
| FR2452101A1 (fr) | 1980-10-17 |
| DE3010559C2 (de) | 1984-07-12 |
| IT1130315B (it) | 1986-06-11 |
| DE3010559A1 (de) | 1980-10-23 |
| PL137040B1 (en) | 1986-04-30 |
| IT8020392A0 (it) | 1980-03-06 |
| FR2452101B1 (fr) | 1984-07-20 |
| DD149585A5 (de) | 1981-07-15 |
| PL222821A1 (fr) | 1981-01-30 |
| GB2044925A (en) | 1980-10-22 |
| KR830001829B1 (ko) | 1983-09-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4292672A (en) | Inspection system for detecting defects in regular patterns | |
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| JPH0423205B2 (fr) | ||
| EP0176406B1 (fr) | Dispositif de correction des défauts d'uniformité induits dans les signaux issus d'une caméra de télévision par les variations de vitesse d'analyse | |
| US7619783B2 (en) | Scanner analog-front-end calibration using percent of freedom | |
| JPH0575046B2 (fr) | ||
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |