CA1158932A - Enrobage de particules de ceramique avec du tantale ou du niobium a l'aide d'un agent de nucleation - Google Patents
Enrobage de particules de ceramique avec du tantale ou du niobium a l'aide d'un agent de nucleationInfo
- Publication number
- CA1158932A CA1158932A CA000358146A CA358146A CA1158932A CA 1158932 A CA1158932 A CA 1158932A CA 000358146 A CA000358146 A CA 000358146A CA 358146 A CA358146 A CA 358146A CA 1158932 A CA1158932 A CA 1158932A
- Authority
- CA
- Canada
- Prior art keywords
- tantalum
- niobium
- halide
- substrate
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 title claims abstract description 33
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 title claims description 48
- 229910052715 tantalum Inorganic materials 0.000 title claims description 44
- 239000010955 niobium Substances 0.000 title claims description 18
- 229910052758 niobium Inorganic materials 0.000 title claims description 16
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 title claims description 12
- 239000002667 nucleating agent Substances 0.000 title claims description 7
- 239000000919 ceramic Substances 0.000 title claims description 5
- 230000008021 deposition Effects 0.000 title description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 34
- 239000000843 powder Substances 0.000 claims abstract description 31
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000003990 capacitor Substances 0.000 claims abstract description 12
- 230000006911 nucleation Effects 0.000 claims abstract description 10
- 238000010899 nucleation Methods 0.000 claims abstract description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000001257 hydrogen Substances 0.000 claims abstract description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 22
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 18
- -1 niobium halide Chemical class 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 229910021529 ammonia Inorganic materials 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 8
- 239000008246 gaseous mixture Substances 0.000 claims description 7
- 230000002441 reversible effect Effects 0.000 claims description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 5
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 5
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 5
- 230000002427 irreversible effect Effects 0.000 claims description 5
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- OEIMLTQPLAGXMX-UHFFFAOYSA-I tantalum(v) chloride Chemical group Cl[Ta](Cl)(Cl)(Cl)Cl OEIMLTQPLAGXMX-UHFFFAOYSA-I 0.000 claims description 3
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- 239000005864 Sulphur Substances 0.000 claims description 2
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910010277 boron hydride Inorganic materials 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 229910052990 silicon hydride Inorganic materials 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 abstract description 17
- 239000011248 coating agent Substances 0.000 abstract description 16
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 150000004820 halides Chemical class 0.000 abstract description 5
- 238000001465 metallisation Methods 0.000 abstract description 3
- 229910017464 nitrogen compound Inorganic materials 0.000 abstract description 3
- 150000002830 nitrogen compounds Chemical class 0.000 abstract description 3
- 239000011810 insulating material Substances 0.000 abstract description 2
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 1
- 239000012254 powdered material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 11
- 238000005137 deposition process Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- WTDHULULXKLSOZ-UHFFFAOYSA-N Hydroxylamine hydrochloride Chemical compound Cl.ON WTDHULULXKLSOZ-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005056 compaction Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229910000039 hydrogen halide Inorganic materials 0.000 description 2
- 239000012433 hydrogen halide Substances 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 241000905957 Channa melasoma Species 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000011221 initial treatment Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000358146A CA1158932A (fr) | 1980-08-13 | 1980-08-13 | Enrobage de particules de ceramique avec du tantale ou du niobium a l'aide d'un agent de nucleation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000358146A CA1158932A (fr) | 1980-08-13 | 1980-08-13 | Enrobage de particules de ceramique avec du tantale ou du niobium a l'aide d'un agent de nucleation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1158932A true CA1158932A (fr) | 1983-12-20 |
Family
ID=4117641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000358146A Expired CA1158932A (fr) | 1980-08-13 | 1980-08-13 | Enrobage de particules de ceramique avec du tantale ou du niobium a l'aide d'un agent de nucleation |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1158932A (fr) |
-
1980
- 1980-08-13 CA CA000358146A patent/CA1158932A/fr not_active Expired
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |