CA1163022A - Dispositif pour enregistrer la distribution des hauteurs d'impulsion dans un indicateur d'epaisseur de pellicules utilisees pour detecter les fluorescences de rayons x - Google Patents

Dispositif pour enregistrer la distribution des hauteurs d'impulsion dans un indicateur d'epaisseur de pellicules utilisees pour detecter les fluorescences de rayons x

Info

Publication number
CA1163022A
CA1163022A CA000395563A CA395563A CA1163022A CA 1163022 A CA1163022 A CA 1163022A CA 000395563 A CA000395563 A CA 000395563A CA 395563 A CA395563 A CA 395563A CA 1163022 A CA1163022 A CA 1163022A
Authority
CA
Canada
Prior art keywords
staircase
signal
discriminator
pulse height
fluorescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000395563A
Other languages
English (en)
Inventor
Toshiyuki Koga
Hiroshi Ishijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of CA1163022A publication Critical patent/CA1163022A/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D1/00Measuring arrangements giving results other than momentary value of variable, of general application
    • G01D1/14Measuring arrangements giving results other than momentary value of variable, of general application giving a distribution function of a value, i.e. number of times the value comes within specified ranges of amplitude
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/265Contactless testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
CA000395563A 1981-02-04 1982-02-04 Dispositif pour enregistrer la distribution des hauteurs d'impulsion dans un indicateur d'epaisseur de pellicules utilisees pour detecter les fluorescences de rayons x Expired CA1163022A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14678/81 1981-02-04
JP1467881U JPS57129111U (fr) 1981-02-04 1981-02-04

Publications (1)

Publication Number Publication Date
CA1163022A true CA1163022A (fr) 1984-02-28

Family

ID=11867869

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000395563A Expired CA1163022A (fr) 1981-02-04 1982-02-04 Dispositif pour enregistrer la distribution des hauteurs d'impulsion dans un indicateur d'epaisseur de pellicules utilisees pour detecter les fluorescences de rayons x

Country Status (6)

Country Link
JP (1) JPS57129111U (fr)
CA (1) CA1163022A (fr)
DE (1) DE3203746A1 (fr)
FR (1) FR2499240A1 (fr)
GB (1) GB2096313A (fr)
NL (1) NL8200300A (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3440537A (en) * 1963-08-20 1969-04-22 Non Linear Systems Inc Bar-graph display instrument
JPS5810098Y2 (ja) * 1973-05-07 1983-02-24 株式会社小松製作所 ユアツソクテイソウチ
US4129827A (en) * 1976-05-20 1978-12-12 Southwick R Amplitude probability detector

Also Published As

Publication number Publication date
DE3203746A1 (de) 1982-09-02
FR2499240A1 (fr) 1982-08-06
JPS57129111U (fr) 1982-08-12
GB2096313A (en) 1982-10-13
NL8200300A (nl) 1982-09-01

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Legal Events

Date Code Title Description
MKEX Expiry