CA1163022A - Dispositif pour enregistrer la distribution des hauteurs d'impulsion dans un indicateur d'epaisseur de pellicules utilisees pour detecter les fluorescences de rayons x - Google Patents
Dispositif pour enregistrer la distribution des hauteurs d'impulsion dans un indicateur d'epaisseur de pellicules utilisees pour detecter les fluorescences de rayons xInfo
- Publication number
- CA1163022A CA1163022A CA000395563A CA395563A CA1163022A CA 1163022 A CA1163022 A CA 1163022A CA 000395563 A CA000395563 A CA 000395563A CA 395563 A CA395563 A CA 395563A CA 1163022 A CA1163022 A CA 1163022A
- Authority
- CA
- Canada
- Prior art keywords
- staircase
- signal
- discriminator
- pulse height
- fluorescent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004458 analytical method Methods 0.000 abstract description 7
- 238000004876 x-ray fluorescence Methods 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002674 ointment Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D1/00—Measuring arrangements giving results other than momentary value of variable, of general application
- G01D1/14—Measuring arrangements giving results other than momentary value of variable, of general application giving a distribution function of a value, i.e. number of times the value comes within specified ranges of amplitude
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electromagnetism (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14678/81 | 1981-02-04 | ||
| JP1467881U JPS57129111U (fr) | 1981-02-04 | 1981-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1163022A true CA1163022A (fr) | 1984-02-28 |
Family
ID=11867869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000395563A Expired CA1163022A (fr) | 1981-02-04 | 1982-02-04 | Dispositif pour enregistrer la distribution des hauteurs d'impulsion dans un indicateur d'epaisseur de pellicules utilisees pour detecter les fluorescences de rayons x |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS57129111U (fr) |
| CA (1) | CA1163022A (fr) |
| DE (1) | DE3203746A1 (fr) |
| FR (1) | FR2499240A1 (fr) |
| GB (1) | GB2096313A (fr) |
| NL (1) | NL8200300A (fr) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3440537A (en) * | 1963-08-20 | 1969-04-22 | Non Linear Systems Inc | Bar-graph display instrument |
| JPS5810098Y2 (ja) * | 1973-05-07 | 1983-02-24 | 株式会社小松製作所 | ユアツソクテイソウチ |
| US4129827A (en) * | 1976-05-20 | 1978-12-12 | Southwick R | Amplitude probability detector |
-
1981
- 1981-02-04 JP JP1467881U patent/JPS57129111U/ja active Pending
-
1982
- 1982-01-27 NL NL8200300A patent/NL8200300A/nl not_active Application Discontinuation
- 1982-01-29 GB GB8202550A patent/GB2096313A/en not_active Withdrawn
- 1982-02-04 FR FR8201803A patent/FR2499240A1/fr active Pending
- 1982-02-04 DE DE19823203746 patent/DE3203746A1/de not_active Withdrawn
- 1982-02-04 CA CA000395563A patent/CA1163022A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE3203746A1 (de) | 1982-09-02 |
| FR2499240A1 (fr) | 1982-08-06 |
| JPS57129111U (fr) | 1982-08-12 |
| GB2096313A (en) | 1982-10-13 |
| NL8200300A (nl) | 1982-09-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |