CA1167980A - Dispositif de projection d'une serie d'images sur des ebauches de puces semiconductrices - Google Patents

Dispositif de projection d'une serie d'images sur des ebauches de puces semiconductrices

Info

Publication number
CA1167980A
CA1167980A CA000402954A CA402954A CA1167980A CA 1167980 A CA1167980 A CA 1167980A CA 000402954 A CA000402954 A CA 000402954A CA 402954 A CA402954 A CA 402954A CA 1167980 A CA1167980 A CA 1167980A
Authority
CA
Canada
Prior art keywords
reticle
pattern
image
wafer
die
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000402954A
Other languages
English (en)
Inventor
Ronald S. Hershel
Martin E. Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPX Technologies Inc
Original Assignee
General Signal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Signal Corp filed Critical General Signal Corp
Priority to CA000402954A priority Critical patent/CA1167980A/fr
Application granted granted Critical
Publication of CA1167980A publication Critical patent/CA1167980A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA000402954A 1982-05-14 1982-05-14 Dispositif de projection d'une serie d'images sur des ebauches de puces semiconductrices Expired CA1167980A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000402954A CA1167980A (fr) 1982-05-14 1982-05-14 Dispositif de projection d'une serie d'images sur des ebauches de puces semiconductrices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000402954A CA1167980A (fr) 1982-05-14 1982-05-14 Dispositif de projection d'une serie d'images sur des ebauches de puces semiconductrices

Publications (1)

Publication Number Publication Date
CA1167980A true CA1167980A (fr) 1984-05-22

Family

ID=4122776

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000402954A Expired CA1167980A (fr) 1982-05-14 1982-05-14 Dispositif de projection d'une serie d'images sur des ebauches de puces semiconductrices

Country Status (1)

Country Link
CA (1) CA1167980A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112824974A (zh) * 2019-11-20 2021-05-21 墨子光电有限公司 微制像设备及其加工方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112824974A (zh) * 2019-11-20 2021-05-21 墨子光电有限公司 微制像设备及其加工方法

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Legal Events

Date Code Title Description
MKEX Expiry