CA1170077A - Senseur de pression a semiconducteur avec resistances inclinees - Google Patents

Senseur de pression a semiconducteur avec resistances inclinees

Info

Publication number: CA1170077A
Authority: CA; Canada
Prior art keywords: strain; diaphragm; resistor; ridge; resistors
Prior art date: 1982-09-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA000411049A

Other languages

English (en)

Inventor

Ronald E. Brown

William D. Higdon

Lamonte R. Edison

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Motors Liquidation Co

Original Assignee

General Motors Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-09-09

Filing date

1982-09-09

Publication date

1984-07-03

1982-09-09 Application filed by General Motors Corp filed Critical General Motors Corp

1982-09-09 Priority to CA000411049A priority Critical patent/CA1170077A/fr

1984-07-03 Application granted granted Critical

1984-07-03 Publication of CA1170077A publication Critical patent/CA1170077A/fr

Status Expired legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title claims abstract description 14
230000004044 response Effects 0.000 claims abstract description 20
238000004519 manufacturing process Methods 0.000 claims description 10
230000008859 change Effects 0.000 abstract description 8
238000005530 etching Methods 0.000 abstract description 5
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
229910052710 silicon Inorganic materials 0.000 abstract description 4
239000010703 silicon Substances 0.000 abstract description 4
210000000188 diaphragm Anatomy 0.000 description 24
230000008901 benefit Effects 0.000 description 3
238000000034 method Methods 0.000 description 2
230000008569 process Effects 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 1
BXNANOICGRISHX-UHFFFAOYSA-N coumaphos Chemical compound CC1=C(Cl)C(=O)OC2=CC(OP(=S)(OCC)OCC)=CC=C21 BXNANOICGRISHX-UHFFFAOYSA-N 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
230000006872 improvement Effects 0.000 description 1
238000005468 ion implantation Methods 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1

Landscapes

Measuring Fluid Pressure (AREA)
Pressure Sensors (AREA)

CA000411049A 1982-09-09 1982-09-09 Senseur de pression a semiconducteur avec resistances inclinees Expired CA1170077A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA000411049A CA1170077A (fr)	1982-09-09	1982-09-09	Senseur de pression a semiconducteur avec resistances inclinees

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA000411049A CA1170077A (fr)	1982-09-09	1982-09-09	Senseur de pression a semiconducteur avec resistances inclinees

Publications (1)

Publication Number	Publication Date
CA1170077A true CA1170077A (fr)	1984-07-03

Family

ID=4123549

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000411049A Expired CA1170077A (fr)	1982-09-09	1982-09-09	Senseur de pression a semiconducteur avec resistances inclinees

Country Status (1)

Country	Link
CA (1)	CA1170077A (fr)

1982
- 1982-09-09 CA CA000411049A patent/CA1170077A/fr not_active Expired

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Legal Events

Date	Code	Title	Description
2001-07-03	MKEX	Expiry