CA1171932A - Hygrometrie capacitif et methode de fabrication - Google Patents

Hygrometrie capacitif et methode de fabrication

Info

Publication number: CA1171932A
Authority: CA; Canada
Prior art keywords: conductive; dielectric material; capacitor; fissured; dielectric
Prior art date: 1981-07-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA000382134A

Other languages

English (en)

Inventor

Bernard Chambaz

Gilles Delapierre

Louis Destannes

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

Original Assignee

Commissariat a lEnergie Atomique CEA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-07-21

Filing date

1981-07-21

Publication date

1984-07-31

1981-07-21 Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA

1981-07-21 Priority to CA000382134A priority Critical patent/CA1171932A/fr

1984-07-31 Application granted granted Critical

1984-07-31 Publication of CA1171932A publication Critical patent/CA1171932A/fr

Status Expired legal-status Critical Current

Links

238000000034 method Methods 0.000 title claims description 6
230000008569 process Effects 0.000 title claims description 6
239000003990 capacitor Substances 0.000 claims abstract description 18
239000003989 dielectric material Substances 0.000 claims abstract description 17
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
239000011248 coating agent Substances 0.000 claims description 10
238000000576 coating method Methods 0.000 claims description 10
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 9
229910052804 chromium Inorganic materials 0.000 claims description 9
239000011651 chromium Substances 0.000 claims description 9
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
239000010931 gold Substances 0.000 claims description 8
229910052737 gold Inorganic materials 0.000 claims description 8
238000005260 corrosion Methods 0.000 claims description 7
230000007797 corrosion Effects 0.000 claims description 7
239000000463 material Substances 0.000 claims description 5
239000004020 conductor Substances 0.000 claims description 4
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
229910052715 tantalum Inorganic materials 0.000 claims description 4
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
229920002678 cellulose Polymers 0.000 claims description 3
239000004642 Polyimide Substances 0.000 claims description 2
230000008020 evaporation Effects 0.000 claims description 2
238000001704 evaporation Methods 0.000 claims description 2
238000004519 manufacturing process Methods 0.000 claims description 2
229910052697 platinum Inorganic materials 0.000 claims description 2
229920001721 polyimide Polymers 0.000 claims description 2
239000010970 precious metal Substances 0.000 claims description 2
238000005259 measurement Methods 0.000 abstract description 2
229920000642 polymer Polymers 0.000 description 13
229910052751 metal Inorganic materials 0.000 description 10
239000002184 metal Substances 0.000 description 10
230000004044 response Effects 0.000 description 6
230000035945 sensitivity Effects 0.000 description 3
239000000758 substrate Substances 0.000 description 3
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
239000003344 environmental pollutant Substances 0.000 description 2
239000011888 foil Substances 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
231100000719 pollutant Toxicity 0.000 description 2
229920005989 resin Polymers 0.000 description 2
239000011347 resin Substances 0.000 description 2
229920000298 Cellophane Polymers 0.000 description 1
VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
229920005372 Plexiglas® Polymers 0.000 description 1
NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
239000005864 Sulphur Substances 0.000 description 1
239000006096 absorbing agent Substances 0.000 description 1
229920006217 cellulose acetate butyrate Polymers 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000001035 drying Methods 0.000 description 1
239000000428 dust Substances 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000011521 glass Substances 0.000 description 1
238000007654 immersion Methods 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
239000002245 particle Substances 0.000 description 1
230000035699 permeability Effects 0.000 description 1
238000007790 scraping Methods 0.000 description 1
230000007480 spreading Effects 0.000 description 1
229910001936 tantalum oxide Inorganic materials 0.000 description 1

Landscapes

Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

CA000382134A 1981-07-21 1981-07-21 Hygrometrie capacitif et methode de fabrication Expired CA1171932A (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA000382134A CA1171932A (fr)	1981-07-21	1981-07-21	Hygrometrie capacitif et methode de fabrication

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CA000382134A CA1171932A (fr)	1981-07-21	1981-07-21	Hygrometrie capacitif et methode de fabrication

Publications (1)

Publication Number	Publication Date
CA1171932A true CA1171932A (fr)	1984-07-31

Family

ID=4120479

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000382134A Expired CA1171932A (fr)	1981-07-21	1981-07-21	Hygrometrie capacitif et methode de fabrication

Country Status (1)

Country	Link
CA (1)	CA1171932A (fr)

1981
- 1981-07-21 CA CA000382134A patent/CA1171932A/fr not_active Expired

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Legal Events

Date	Code	Title	Description
2001-07-31	MKEX	Expiry