CA1183103A - Appareil de pulverisation cathodique a magnetron - Google Patents
Appareil de pulverisation cathodique a magnetronInfo
- Publication number
- CA1183103A CA1183103A CA000423658A CA423658A CA1183103A CA 1183103 A CA1183103 A CA 1183103A CA 000423658 A CA000423658 A CA 000423658A CA 423658 A CA423658 A CA 423658A CA 1183103 A CA1183103 A CA 1183103A
- Authority
- CA
- Canada
- Prior art keywords
- tubular member
- magnets
- sputtering
- magnetic
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 35
- 239000011248 coating agent Substances 0.000 claims abstract description 64
- 238000000576 coating method Methods 0.000 claims abstract description 64
- 230000005291 magnetic effect Effects 0.000 claims abstract description 62
- 239000000463 material Substances 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000001816 cooling Methods 0.000 claims abstract description 5
- 239000013077 target material Substances 0.000 claims description 12
- 230000003628 erosive effect Effects 0.000 claims description 10
- 239000002826 coolant Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims 1
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 239000000110 cooling liquid Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 101100162194 Caenorhabditis elegans spg-7 gene Proteins 0.000 description 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000423658A CA1183103A (fr) | 1983-03-15 | 1983-03-15 | Appareil de pulverisation cathodique a magnetron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000423658A CA1183103A (fr) | 1983-03-15 | 1983-03-15 | Appareil de pulverisation cathodique a magnetron |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1183103A true CA1183103A (fr) | 1985-02-26 |
Family
ID=4124790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000423658A Expired CA1183103A (fr) | 1983-03-15 | 1983-03-15 | Appareil de pulverisation cathodique a magnetron |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1183103A (fr) |
-
1983
- 1983-03-15 CA CA000423658A patent/CA1183103A/fr not_active Expired
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEC | Expiry (correction) | ||
| MKEX | Expiry |