CA1185106A - Dispositif de refroidissement de specimen pour microscope electronique a balayage - Google Patents

Dispositif de refroidissement de specimen pour microscope electronique a balayage

Info

Publication number
CA1185106A
CA1185106A CA000428070A CA428070A CA1185106A CA 1185106 A CA1185106 A CA 1185106A CA 000428070 A CA000428070 A CA 000428070A CA 428070 A CA428070 A CA 428070A CA 1185106 A CA1185106 A CA 1185106A
Authority
CA
Canada
Prior art keywords
cooling device
sample
inlet
outlet
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000428070A
Other languages
English (en)
Inventor
Wing C. Fong
Albert J. Fournier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Department of National Defence
Original Assignee
Department of National Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Department of National Defence filed Critical Department of National Defence
Priority to CA000428070A priority Critical patent/CA1185106A/fr
Application granted granted Critical
Publication of CA1185106A publication Critical patent/CA1185106A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
    • F25D3/10—Devices using other cold materials; Devices using cold-storage bodies using liquefied gases, e.g. liquid air

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Sampling And Sample Adjustment (AREA)
CA000428070A 1983-05-13 1983-05-13 Dispositif de refroidissement de specimen pour microscope electronique a balayage Expired CA1185106A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000428070A CA1185106A (fr) 1983-05-13 1983-05-13 Dispositif de refroidissement de specimen pour microscope electronique a balayage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000428070A CA1185106A (fr) 1983-05-13 1983-05-13 Dispositif de refroidissement de specimen pour microscope electronique a balayage

Publications (1)

Publication Number Publication Date
CA1185106A true CA1185106A (fr) 1985-04-09

Family

ID=4125224

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000428070A Expired CA1185106A (fr) 1983-05-13 1983-05-13 Dispositif de refroidissement de specimen pour microscope electronique a balayage

Country Status (1)

Country Link
CA (1) CA1185106A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110164744A (zh) * 2019-05-17 2019-08-23 中国科学院理化技术研究所 基于低温固体冷却的扫描电子显微镜制冷系统及方法
CN117190561A (zh) * 2023-10-08 2023-12-08 北京金竟科技有限责任公司 一种用于扫描电镜的低温恒温器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110164744A (zh) * 2019-05-17 2019-08-23 中国科学院理化技术研究所 基于低温固体冷却的扫描电子显微镜制冷系统及方法
CN110164744B (zh) * 2019-05-17 2024-04-16 中国科学院理化技术研究所 基于低温固体冷却的扫描电子显微镜制冷系统及方法
CN117190561A (zh) * 2023-10-08 2023-12-08 北京金竟科技有限责任公司 一种用于扫描电镜的低温恒温器

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Legal Events

Date Code Title Description
MKEC Expiry (correction)
MKEX Expiry