CA1281475C - Precurseurs de type organopolysilazane pour la production d'un melange sic/se3n4 riche en nitrure de silicium - Google Patents

Precurseurs de type organopolysilazane pour la production d'un melange sic/se3n4 riche en nitrure de silicium

Info

Publication number: CA1281475C
Authority: CA; Canada
Prior art keywords: carbon atoms; substituted; preceramic; group; polymer
Prior art date: 1986-08-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

CA000583229A

Other languages

English (en)

Inventor

Dietmar Seyferth

Joanne M. Schwark

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Massachusetts Institute of Technology

Original Assignee

Massachusetts Institute of Technology

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-08-22

Filing date

1988-11-16

Publication date

1991-03-12

1986-08-22 Priority claimed from US06/899,471 external-priority patent/US4720532A/en

1986-10-07 Priority claimed from US06/916,109 external-priority patent/US4767876A/en

1988-11-16 Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology

1991-03-12 Application granted granted Critical

1991-03-12 Publication of CA1281475C publication Critical patent/CA1281475C/fr

2008-03-12 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000002243 precursor Substances 0.000 title claims abstract description 15
229910052581 Si3N4 Inorganic materials 0.000 title description 41
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title description 13
229920000642 polymer Polymers 0.000 claims abstract description 113
238000000034 method Methods 0.000 claims abstract description 48
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 38
125000004432 carbon atom Chemical group C* 0.000 claims abstract description 34
239000000203 mixture Substances 0.000 claims abstract description 33
125000000217 alkyl group Chemical group 0.000 claims abstract description 27
229910010293 ceramic material Inorganic materials 0.000 claims abstract description 19
229910021529 ammonia Inorganic materials 0.000 claims abstract description 16
125000003118 aryl group Chemical group 0.000 claims abstract description 12
150000001875 compounds Chemical class 0.000 claims abstract description 12
125000003342 alkenyl group Chemical group 0.000 claims abstract description 11
125000000753 cycloalkyl group Chemical group 0.000 claims abstract description 9
239000012039 electrophile Substances 0.000 claims abstract description 7
239000011261 inert gas Substances 0.000 claims abstract description 6
239000003054 catalyst Substances 0.000 claims abstract description 5
229910052736 halogen Inorganic materials 0.000 claims abstract description 5
125000005843 halogen group Chemical group 0.000 claims abstract 3
239000000919 ceramic Substances 0.000 claims description 61
239000000835 fiber Substances 0.000 claims description 26
-1 alkali metal alkoxides Chemical class 0.000 claims description 25
229910052739 hydrogen Inorganic materials 0.000 claims description 19
229910052784 alkaline earth metal Inorganic materials 0.000 claims description 8
125000000962 organic group Chemical group 0.000 claims description 8
229910052783 alkali metal Inorganic materials 0.000 claims description 7
229920001558 organosilicon polymer Polymers 0.000 claims description 7
150000001340 alkali metals Chemical class 0.000 claims description 6
239000001257 hydrogen Substances 0.000 claims description 6
QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical group [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 5
239000003513 alkali Substances 0.000 claims description 5
BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical group [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 4
125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 claims description 3
150000001342 alkaline earth metals Chemical class 0.000 claims description 2
238000010894 electron beam technology Methods 0.000 claims 1
125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
238000006459 hydrosilylation reaction Methods 0.000 claims 1
229910052987 metal hydride Inorganic materials 0.000 claims 1
150000004681 metal hydrides Chemical class 0.000 claims 1
WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 171
YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 86
239000000047 product Substances 0.000 description 85
VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 64
238000000197 pyrolysis Methods 0.000 description 62
238000006243 chemical reaction Methods 0.000 description 55
229910010271 silicon carbide Inorganic materials 0.000 description 49
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 48
239000007787 solid Substances 0.000 description 42
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 40
229910052799 carbon Inorganic materials 0.000 description 37
239000003921 oil Substances 0.000 description 30
125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 27
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 25
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 25
239000000243 solution Substances 0.000 description 25
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 24
239000002904 solvent Substances 0.000 description 22
239000000463 material Substances 0.000 description 20
229910052710 silicon Inorganic materials 0.000 description 20
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
229920003257 polycarbosilane Polymers 0.000 description 18
239000010703 silicon Substances 0.000 description 18
FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical group [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 17
238000005915 ammonolysis reaction Methods 0.000 description 16
229910052757 nitrogen Inorganic materials 0.000 description 15
INQOMBQAUSQDDS-UHFFFAOYSA-N iodomethane Chemical compound IC INQOMBQAUSQDDS-UHFFFAOYSA-N 0.000 description 14
239000000843 powder Substances 0.000 description 14
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 13
239000007789 gas Substances 0.000 description 13
229920001296 polysiloxane Polymers 0.000 description 13
239000011541 reaction mixture Substances 0.000 description 13
238000005481 NMR spectroscopy Methods 0.000 description 12
229910052786 argon Inorganic materials 0.000 description 12
238000004821 distillation Methods 0.000 description 12
239000007788 liquid Substances 0.000 description 11
238000010992 reflux Methods 0.000 description 11
230000009471 action Effects 0.000 description 10
QSLPNSWXUQHVLP-UHFFFAOYSA-N $l^{1}-sulfanylmethane Chemical compound [S]C QSLPNSWXUQHVLP-UHFFFAOYSA-N 0.000 description 9
101150041968 CDC13 gene Proteins 0.000 description 9
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
HEDRZPFGACZZDS-MICDWDOJSA-N Trichloro(2H)methane Chemical compound [2H]C(Cl)(Cl)Cl HEDRZPFGACZZDS-MICDWDOJSA-N 0.000 description 9
238000004458 analytical method Methods 0.000 description 8
239000002585 base Substances 0.000 description 8
239000000460 chlorine Substances 0.000 description 8
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 7
150000002500 ions Chemical class 0.000 description 7
230000008569 process Effects 0.000 description 7
239000007795 chemical reaction product Substances 0.000 description 6
125000004122 cyclic group Chemical group 0.000 description 6
229920001709 polysilazane Polymers 0.000 description 6
238000002360 preparation method Methods 0.000 description 6
101100237844 Mus musculus Mmp19 gene Proteins 0.000 description 5
229910052681 coesite Inorganic materials 0.000 description 5
229910052906 cristobalite Inorganic materials 0.000 description 5
150000004767 nitrides Chemical class 0.000 description 5
239000003960 organic solvent Substances 0.000 description 5
239000002244 precipitate Substances 0.000 description 5
229910052701 rubidium Inorganic materials 0.000 description 5
229910052682 stishovite Inorganic materials 0.000 description 5
239000006228 supernatant Substances 0.000 description 5
229910052905 tridymite Inorganic materials 0.000 description 5
ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
239000011230 binding agent Substances 0.000 description 4
150000001721 carbon Chemical group 0.000 description 4
230000003197 catalytic effect Effects 0.000 description 4
229910052801 chlorine Inorganic materials 0.000 description 4
125000001309 chloro group Chemical group Cl* 0.000 description 4
238000002474 experimental method Methods 0.000 description 4
150000004820 halides Chemical class 0.000 description 4
125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 4
125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
238000010791 quenching Methods 0.000 description 4
239000000377 silicon dioxide Substances 0.000 description 4
235000012239 silicon dioxide Nutrition 0.000 description 4
239000011734 sodium Substances 0.000 description 4
238000003756 stirring Methods 0.000 description 4
WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 3
241000486661 Ceramica Species 0.000 description 3
YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 3
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
241001072332 Monia Species 0.000 description 3
125000004429 atom Chemical group 0.000 description 3
GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 3
229910052794 bromium Inorganic materials 0.000 description 3
238000005119 centrifugation Methods 0.000 description 3
230000008859 change Effects 0.000 description 3
238000000576 coating method Methods 0.000 description 3
239000002131 composite material Substances 0.000 description 3
239000011737 fluorine Substances 0.000 description 3
229910052731 fluorine Inorganic materials 0.000 description 3
239000011521 glass Substances 0.000 description 3
150000002367 halogens Chemical group 0.000 description 3
150000004678 hydrides Chemical class 0.000 description 3
WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
239000000178 monomer Substances 0.000 description 3
NTTOTNSKUYCDAV-UHFFFAOYSA-N potassium hydride Chemical compound [KH] NTTOTNSKUYCDAV-UHFFFAOYSA-N 0.000 description 3
229910000105 potassium hydride Inorganic materials 0.000 description 3
229910052708 sodium Inorganic materials 0.000 description 3
239000007858 starting material Substances 0.000 description 3
PPDADIYYMSXQJK-UHFFFAOYSA-N trichlorosilicon Chemical compound Cl[Si](Cl)Cl PPDADIYYMSXQJK-UHFFFAOYSA-N 0.000 description 3
OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
241000237074 Centris Species 0.000 description 2
HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
239000005046 Chlorosilane Substances 0.000 description 2
101100536354 Drosophila melanogaster tant gene Proteins 0.000 description 2
240000002989 Euphorbia neriifolia Species 0.000 description 2
229910004721 HSiCl3 Inorganic materials 0.000 description 2
CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
229910008045 Si-Si Inorganic materials 0.000 description 2
229910006411 Si—Si Inorganic materials 0.000 description 2
FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
HLXRWTJXGMHOFN-XJSNKYLASA-N Verbenalin Chemical compound O([C@@H]1OC=C([C@H]2C(=O)C[C@H](C)[C@H]21)C(=O)OC)[C@@H]1O[C@H](CO)[C@@H](O)[C@H](O)[C@H]1O HLXRWTJXGMHOFN-XJSNKYLASA-N 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 2
239000011248 coating agent Substances 0.000 description 2
LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 2
125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
238000010438 heat treatment Methods 0.000 description 2
230000007062 hydrolysis Effects 0.000 description 2
238000006460 hydrolysis reaction Methods 0.000 description 2
239000011630 iodine Substances 0.000 description 2
229910052740 iodine Inorganic materials 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
229910052751 metal Inorganic materials 0.000 description 2
239000002184 metal Substances 0.000 description 2
JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 2
239000004570 mortar (masonry) Substances 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
239000003415 peat Substances 0.000 description 2
238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 2
239000000376 reactant Substances 0.000 description 2
210000002966 serum Anatomy 0.000 description 2
241000894007 species Species 0.000 description 2
VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
239000001993 wax Substances 0.000 description 2
RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
ZUXNHFFVQWADJL-UHFFFAOYSA-N 3,4,5-trimethoxy-n-(2-methoxyethyl)-n-(4-phenyl-1,3-thiazol-2-yl)benzamide Chemical compound N=1C(C=2C=CC=CC=2)=CSC=1N(CCOC)C(=O)C1=CC(OC)=C(OC)C(OC)=C1 ZUXNHFFVQWADJL-UHFFFAOYSA-N 0.000 description 1
241001415166 Alona Species 0.000 description 1
241001120493 Arene Species 0.000 description 1
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
ZKLPARSLTMPFCP-UHFFFAOYSA-N Cetirizine Chemical compound C1CN(CCOCC(=O)O)CCN1C(C=1C=CC(Cl)=CC=1)C1=CC=CC=C1 ZKLPARSLTMPFCP-UHFFFAOYSA-N 0.000 description 1
LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 1
241000689227 Cora <basidiomycete fungus> Species 0.000 description 1
101100130497 Drosophila melanogaster Mical gene Proteins 0.000 description 1
OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
229910003946 H3Si Inorganic materials 0.000 description 1
101100004031 Mus musculus Aven gene Proteins 0.000 description 1
101100345589 Mus musculus Mical1 gene Proteins 0.000 description 1
241001465805 Nymphalidae Species 0.000 description 1
241001163743 Perlodes Species 0.000 description 1
241001296096 Probles Species 0.000 description 1
101100409194 Rattus norvegicus Ppargc1b gene Proteins 0.000 description 1
101150057388 Reln gene Proteins 0.000 description 1
101100184636 Rhodobacter capsulatus modA gene Proteins 0.000 description 1
229910018540 Si C Inorganic materials 0.000 description 1
229910007991 Si-N Inorganic materials 0.000 description 1
229910005091 Si3N Inorganic materials 0.000 description 1
229910003828 SiH3 Inorganic materials 0.000 description 1
229910006294 Si—N Inorganic materials 0.000 description 1
HFCYZXMHUIHAQI-UHFFFAOYSA-N Thidiazuron Chemical compound C=1C=CC=CC=1NC(=O)NC1=CN=NS1 HFCYZXMHUIHAQI-UHFFFAOYSA-N 0.000 description 1
HLXRWTJXGMHOFN-UHFFFAOYSA-N Verbenalin Natural products C12C(C)CC(=O)C2C(C(=O)OC)=COC1OC1OC(CO)C(O)C(O)C1O HLXRWTJXGMHOFN-UHFFFAOYSA-N 0.000 description 1
LZCDAPDGXCYOEH-UHFFFAOYSA-N adapalene Chemical compound C1=C(C(O)=O)C=CC2=CC(C3=CC=C(C(=C3)C34CC5CC(CC(C5)C3)C4)OC)=CC=C21 LZCDAPDGXCYOEH-UHFFFAOYSA-N 0.000 description 1
150000001335 aliphatic alkanes Chemical class 0.000 description 1
125000001931 aliphatic group Chemical group 0.000 description 1
150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
229910000102 alkali metal hydride Inorganic materials 0.000 description 1
150000008046 alkali metal hydrides Chemical class 0.000 description 1
150000001350 alkyl halides Chemical class 0.000 description 1
125000005103 alkyl silyl group Chemical group 0.000 description 1
150000001408 amides Chemical class 0.000 description 1
150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 description 1
235000011089 carbon dioxide Nutrition 0.000 description 1
125000005587 carbonate group Chemical group 0.000 description 1
150000001768 cations Chemical class 0.000 description 1
238000005524 ceramic coating Methods 0.000 description 1
239000012700 ceramic precursor Substances 0.000 description 1
238000012512 characterization method Methods 0.000 description 1
SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
229940126214 compound 3 Drugs 0.000 description 1
238000009833 condensation Methods 0.000 description 1
230000005494 condensation Effects 0.000 description 1
229920006037 cross link polymer Polymers 0.000 description 1
239000013078 crystal Substances 0.000 description 1
150000004292 cyclic ethers Chemical class 0.000 description 1
230000009089 cytolysis Effects 0.000 description 1
230000002950 deficient Effects 0.000 description 1
150000001983 dialkylethers Chemical class 0.000 description 1
PFMKUUJQLUQKHT-UHFFFAOYSA-N dichloro(ethyl)silicon Chemical compound CC[Si](Cl)Cl PFMKUUJQLUQKHT-UHFFFAOYSA-N 0.000 description 1
125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
229940002658 differin Drugs 0.000 description 1
229910001873 dinitrogen Inorganic materials 0.000 description 1
238000001035 drying Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
150000002170 ethers Chemical class 0.000 description 1
NNYBQONXHNTVIJ-UHFFFAOYSA-N etodolac Chemical compound C1COC(CC)(CC(O)=O)C2=C1C(C=CC=C1CC)=C1N2 NNYBQONXHNTVIJ-UHFFFAOYSA-N 0.000 description 1
238000001704 evaporation Methods 0.000 description 1
230000008020 evaporation Effects 0.000 description 1
239000004744 fabric Substances 0.000 description 1
239000006260 foam Substances 0.000 description 1
239000012634 fragment Substances 0.000 description 1
238000001754 furnace pyrolysis Methods 0.000 description 1
239000000499 gel Substances 0.000 description 1
125000001145 hydrido group Chemical group *[H] 0.000 description 1
150000002431 hydrogen Chemical group 0.000 description 1
XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
230000006872 improvement Effects 0.000 description 1
238000011065 in-situ storage Methods 0.000 description 1
229910052738 indium Inorganic materials 0.000 description 1
238000001764 infiltration Methods 0.000 description 1
230000008595 infiltration Effects 0.000 description 1
229940063718 lodine Drugs 0.000 description 1
230000007774 longterm Effects 0.000 description 1
229910052943 magnesium sulfate Inorganic materials 0.000 description 1
235000019341 magnesium sulphate Nutrition 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
238000005259 measurement Methods 0.000 description 1
239000005055 methyl trichlorosilane Substances 0.000 description 1
125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 description 1
UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
239000002480 mineral oil Substances 0.000 description 1
235000010446 mineral oil Nutrition 0.000 description 1
230000007935 neutral effect Effects 0.000 description 1
125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
229910000069 nitrogen hydride Inorganic materials 0.000 description 1
238000000655 nuclear magnetic resonance spectrum Methods 0.000 description 1
230000000269 nucleophilic effect Effects 0.000 description 1
235000014571 nuts Nutrition 0.000 description 1
210000000056 organ Anatomy 0.000 description 1
150000001451 organic peroxides Chemical class 0.000 description 1
150000002902 organometallic compounds Chemical class 0.000 description 1
150000003961 organosilicon compounds Chemical class 0.000 description 1
230000001590 oxidative effect Effects 0.000 description 1
238000006303 photolysis reaction Methods 0.000 description 1
230000015843 photosynthesis, light reaction Effects 0.000 description 1
229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
229920005596 polymer binder Polymers 0.000 description 1
239000002491 polymer binding agent Substances 0.000 description 1
239000002861 polymer material Substances 0.000 description 1
238000006116 polymerization reaction Methods 0.000 description 1
229920005591 polysilicon Polymers 0.000 description 1
238000009700 powder processing Methods 0.000 description 1
230000005855 radiation Effects 0.000 description 1
IOVGROKTTNBUGK-SJCJKPOMSA-N ritodrine Chemical compound N([C@@H](C)[C@H](O)C=1C=CC(O)=CC=1)CCC1=CC=C(O)C=C1 IOVGROKTTNBUGK-SJCJKPOMSA-N 0.000 description 1
102200056507 rs104894175 Human genes 0.000 description 1
101150081985 scrib gene Proteins 0.000 description 1
229910000077 silane Inorganic materials 0.000 description 1
OLRJXMHANKMLTD-UHFFFAOYSA-N silyl Chemical compound [SiH3] OLRJXMHANKMLTD-UHFFFAOYSA-N 0.000 description 1
239000011780 sodium chloride Substances 0.000 description 1
RBWSWDPRDBEWCR-RKJRWTFHSA-N sodium;(2r)-2-[(2r)-3,4-dihydroxy-5-oxo-2h-furan-2-yl]-2-hydroxyethanolate Chemical compound [Na+].[O-]C[C@@H](O)[C@H]1OC(=O)C(O)=C1O RBWSWDPRDBEWCR-RKJRWTFHSA-N 0.000 description 1
239000012265 solid product Substances 0.000 description 1
239000011877 solvent mixture Substances 0.000 description 1
238000001228 spectrum Methods 0.000 description 1
238000009987 spinning Methods 0.000 description 1
230000002269 spontaneous effect Effects 0.000 description 1
238000010561 standard procedure Methods 0.000 description 1
238000003860 storage Methods 0.000 description 1
229910052717 sulfur Inorganic materials 0.000 description 1
239000010414 supernatant solution Substances 0.000 description 1
239000000725 suspension Substances 0.000 description 1
239000010409 thin film Substances 0.000 description 1
GQIUQDDJKHLHTB-UHFFFAOYSA-N trichloro(ethenyl)silane Chemical compound Cl[Si](Cl)(Cl)C=C GQIUQDDJKHLHTB-UHFFFAOYSA-N 0.000 description 1
125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
229920002554 vinyl polymer Polymers 0.000 description 1
239000005050 vinyl trichlorosilane Substances 0.000 description 1
239000008096 xylene Substances 0.000 description 1
150000003738 xylenes Chemical class 0.000 description 1

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Ceramic Products (AREA)

CA000583229A 1986-08-22 1988-11-16 Precurseurs de type organopolysilazane pour la production d'un melange sic/se3n4 riche en nitrure de silicium Expired - Lifetime CA1281475C (fr)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
US899,471		1986-08-22
US06/899,471 US4720532A (en)	1986-08-22	1986-08-22	Organopolysilazane precursors to silicon nitride-rich mixed SiC/Si3 N4
US06/916,109 US4767876A (en)	1985-09-30	1986-10-07	Method for converting organosilicon polymers containing SIH repeat units and organopolysilazane precursors to new and useful preceramic polymers and silicon nitride enriched ceramic materials
US916,109		1986-10-07

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000545027A Division CA1304875C (fr)	1986-08-22	1987-08-21	Methode pour la conversion de polymeres de type organosilicium contenant des unites repetees sih et des precurseurs de l'organopolysilazane, destinees a la fabrication de polymeres utiles nouveaux, et matieres ceramiques enrichies de nitrure de silicium

Publications (1)

Publication Number	Publication Date
CA1281475C true CA1281475C (fr)	1991-03-12

Family

ID=27129240

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
CA000545027A Expired - Lifetime CA1304875C (fr)	1986-08-22	1987-08-21	Methode pour la conversion de polymeres de type organosilicium contenant des unites repetees sih et des precurseurs de l'organopolysilazane, destinees a la fabrication de polymeres utiles nouveaux, et matieres ceramiques enrichies de nitrure de silicium
CA000583229A Expired - Lifetime CA1281475C (fr)	1986-08-22	1988-11-16	Precurseurs de type organopolysilazane pour la production d'un melange sic/se3n4 riche en nitrure de silicium

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
CA000545027A Expired - Lifetime CA1304875C (fr)	1986-08-22	1987-08-21	Methode pour la conversion de polymeres de type organosilicium contenant des unites repetees sih et des precurseurs de l'organopolysilazane, destinees a la fabrication de polymeres utiles nouveaux, et matieres ceramiques enrichies de nitrure de silicium

Country Status (1)

Country	Link
CA (2)	CA1304875C (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN120988492A (zh) *	2025-10-22	2025-11-21	成都俊马密封科技股份有限公司	一种应用于900℃以上工况的抗高温密封材料及其制备方法

1987
- 1987-08-21 CA CA000545027A patent/CA1304875C/fr not_active Expired - Lifetime
1988
- 1988-11-16 CA CA000583229A patent/CA1281475C/fr not_active Expired - Lifetime

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN120988492A (zh) *	2025-10-22	2025-11-21	成都俊马密封科技股份有限公司	一种应用于900℃以上工况的抗高温密封材料及其制备方法
CN120988492B (zh) *	2025-10-22	2026-02-17	成都俊马密封科技股份有限公司	一种应用于900℃以上工况的抗高温密封材料及其制备方法

Also Published As

Publication number	Publication date
CA1304875C (fr)	1992-07-07

Legal Events

Date	Code	Title	Description
2003-03-12	MKLA	Lapsed

Publication	Publication Date	Title
US4767876A (en)	1988-08-30	Method for converting organosilicon polymers containing SIH repeat units and organopolysilazane precursors to new and useful preceramic polymers and silicon nitride enriched ceramic materials
EP0153008B1 (fr)	1989-06-28	Polymères d'organosilazane formant des matières céramiques
US4720532A (en)	1988-01-19	Organopolysilazane precursors to silicon nitride-rich mixed SiC/Si3 N4
US4645807A (en)	1987-02-24	Method for forming new preceramic polymers for SiC and Si3 N4 /SiC systems
EP0021844A1 (fr)	1981-01-07	Fibres inorganiques continues et procédé pour leur fabrication
US5206327A (en)	1993-04-27	Preceramic polymers incorporating boron and their application in the sintering of carbide ceramics
JPS6316325B2 (fr)	1988-04-08
JPH042686B2 (fr)	1992-01-20
US4705837A (en)	1987-11-10	Method for converting Si-H containing polysiloxanes to new and useful preceramic polymers and ceramic materials
JPS62290730A (ja)	1987-12-17	有機シラザン重合体の製造方法
EP0295062B1 (fr)	1992-12-02	Polysilacyclobutasilazanes
US4886860A (en)	1989-12-12	Polymetalosilazane and process for preparing same
JPH01188531A (ja)	1989-07-27	ポリシラザン、それらの製造方法、それから製造されうる窒化ケイ素含有セラミック材料ならびにそれらの製造方法
CA1287432C (fr)	1991-08-06	Polymeres preceramiques obtenus a partir de silazanes cycliques et de disilanes halogenes; methode de preparation
CA1287433C (fr)	1991-08-06	Polymeres preceramique derives de silazanes et d'halosilazanes cycliques et methode pour leur preparation
CA1281475C (fr)	1991-03-12	Precurseurs de type organopolysilazane pour la production d'un melange sic/se3n4 riche en nitrure de silicium
EP0662463B1 (fr)	2001-06-13	Poudre composite contenant de l'yttrium, corps fritté composite, et méthode de préparation
JP4669200B2 (ja)	2011-04-13	炭窒化ケイ素ホウ素セラミック及び先駆化合物、それらの製造方法及び使用
EP0209360B1 (fr)	1993-01-27	Procédé de transformation de polymères de silicium ayant des groupes Si-H en polymères pré-céramiques et en matières céramiques
EP0278001B1 (fr)	1992-01-29	Procede d'utilisation de precurseurs d'organopolysilazane pour former de nouveaux polymeres preceramiques et des materiaux ceramiques riches en nitrure de silicium
US4861532A (en)	1989-08-29	Method of preparing ceramics from polymers derived from cyclic silazanes, and halosilanes
US5187252A (en)	1993-02-16	Silazane polymers containing sicl groups, process for their preparation, silicon nitride-containing ceramic materials which can be prepared from them, and their preparation
JP3606900B2 (ja)	2005-01-05	低酸素窒化硅素質セラミックス成形体、繊維及びその製造方法
JP2575280B2 (ja)	1997-01-22	酸窒化珪素繊維の製法
JPH0570654B2 (fr)	1993-10-05