CA1288030C - Systeme d'analyse de reacteur - Google Patents

Systeme d'analyse de reacteur

Info

Publication number: CA1288030C
Authority: CA; Canada
Prior art keywords: gas; analyzer; sample; reactor; samples
Prior art date: 1986-05-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

CA000537273A

Other languages

English (en)

Inventor

Arthur W. Francis, Jr.

Thomas G. Wolfe

Raymond P. Roberge

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Union Carbide Corp

Original Assignee

Union Carbide Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-05-20

Filing date

1987-05-15

Publication date

1991-08-27

1987-05-15 Application filed by Union Carbide Corp filed Critical Union Carbide Corp

1991-08-27 Application granted granted Critical

1991-08-27 Publication of CA1288030C publication Critical patent/CA1288030C/fr

2008-08-27 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000004458 analytical method Methods 0.000 title claims abstract description 62
238000010926 purge Methods 0.000 claims abstract description 52
230000004044 response Effects 0.000 claims abstract description 12
239000007789 gas Substances 0.000 claims description 268
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 48
239000001301 oxygen Substances 0.000 claims description 48
229910052760 oxygen Inorganic materials 0.000 claims description 48
238000012544 monitoring process Methods 0.000 claims description 20
238000000034 method Methods 0.000 claims description 14
230000008569 process Effects 0.000 claims description 14
238000006243 chemical reaction Methods 0.000 claims description 12
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
238000004868 gas analysis Methods 0.000 claims description 8
229930195733 hydrocarbon Natural products 0.000 claims description 7
150000002430 hydrocarbons Chemical class 0.000 claims description 7
238000010079 rubber tapping Methods 0.000 claims description 6
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
238000005259 measurement Methods 0.000 claims description 3
229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
239000001569 carbon dioxide Substances 0.000 claims description 2
230000003197 catalytic effect Effects 0.000 claims description 2
238000007599 discharging Methods 0.000 claims description 2
239000007800 oxidant agent Substances 0.000 claims description 2
238000005086 pumping Methods 0.000 claims description 2
239000012535 impurity Substances 0.000 abstract description 6
230000008030 elimination Effects 0.000 abstract description 2
238000003379 elimination reaction Methods 0.000 abstract description 2
238000012545 processing Methods 0.000 description 18
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 15
229910000041 hydrogen chloride Inorganic materials 0.000 description 15
IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 15
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
239000004065 semiconductor Substances 0.000 description 8
239000012298 atmosphere Substances 0.000 description 6
230000008901 benefit Effects 0.000 description 6
238000004519 manufacturing process Methods 0.000 description 5
229910052757 nitrogen Inorganic materials 0.000 description 5
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
230000000694 effects Effects 0.000 description 4
239000000047 product Substances 0.000 description 4
235000012431 wafers Nutrition 0.000 description 4
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 3
238000011161 development Methods 0.000 description 3
239000003792 electrolyte Substances 0.000 description 3
239000011261 inert gas Substances 0.000 description 3
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
238000013024 troubleshooting Methods 0.000 description 3
238000013459 approach Methods 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
239000011248 coating agent Substances 0.000 description 2
238000000576 coating method Methods 0.000 description 2
239000013078 crystal Substances 0.000 description 2
125000004122 cyclic group Chemical group 0.000 description 2
238000013461 design Methods 0.000 description 2
238000010438 heat treatment Methods 0.000 description 2
239000001307 helium Substances 0.000 description 2
229910052734 helium Inorganic materials 0.000 description 2
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
239000012528 membrane Substances 0.000 description 2
235000012239 silicon dioxide Nutrition 0.000 description 2
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
241001469893 Oxyzygonectes dovii Species 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
238000000137 annealing Methods 0.000 description 1
239000003054 catalyst Substances 0.000 description 1
238000004140 cleaning Methods 0.000 description 1
238000011109 contamination Methods 0.000 description 1
238000001816 cooling Methods 0.000 description 1
230000009849 deactivation Effects 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
238000001035 drying Methods 0.000 description 1
238000003487 electrochemical reaction Methods 0.000 description 1
230000002708 enhancing effect Effects 0.000 description 1
230000004907 flux Effects 0.000 description 1
239000000446 fuel Substances 0.000 description 1
238000010249 in-situ analysis Methods 0.000 description 1
238000011065 in-situ storage Methods 0.000 description 1
230000000977 initiatory effect Effects 0.000 description 1
238000002347 injection Methods 0.000 description 1
239000007924 injection Substances 0.000 description 1
238000005461 lubrication Methods 0.000 description 1
238000003754 machining Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
239000012299 nitrogen atmosphere Substances 0.000 description 1
239000012466 permeate Substances 0.000 description 1
238000011165 process development Methods 0.000 description 1
238000011112 process operation Methods 0.000 description 1
239000010453 quartz Substances 0.000 description 1
238000005070 sampling Methods 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
MKWYFZFMAMBPQK-UHFFFAOYSA-J sodium feredetate Chemical compound [Na+].[Fe+3].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O MKWYFZFMAMBPQK-UHFFFAOYSA-J 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
239000010935 stainless steel Substances 0.000 description 1
238000012360 testing method Methods 0.000 description 1
239000010409 thin film Substances 0.000 description 1

Landscapes

Sampling And Sample Adjustment (AREA)
Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

CA000537273A 1986-05-20 1987-05-15 Systeme d'analyse de reacteur Expired - Lifetime CA1288030C (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US86500586A	1986-05-20	1986-05-20
US865,005		1986-05-20

Publications (1)

Publication Number	Publication Date
CA1288030C true CA1288030C (fr)	1991-08-27

Family

ID=25344513

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000537273A Expired - Lifetime CA1288030C (fr)	1986-05-20	1987-05-15	Systeme d'analyse de reacteur

Country Status (1)

Country	Link
CA (1)	CA1288030C (fr)

1987
- 1987-05-15 CA CA000537273A patent/CA1288030C/fr not_active Expired - Lifetime

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Legal Events

Date	Code	Title	Description
1994-02-28	MKLA	Lapsed