CA1292967C - Appareil de metallisation sous vide de disques - Google Patents
Appareil de metallisation sous vide de disquesInfo
- Publication number
- CA1292967C CA1292967C CA000528387A CA528387A CA1292967C CA 1292967 C CA1292967 C CA 1292967C CA 000528387 A CA000528387 A CA 000528387A CA 528387 A CA528387 A CA 528387A CA 1292967 C CA1292967 C CA 1292967C
- Authority
- CA
- Canada
- Prior art keywords
- disc
- cathodes
- chamber
- coating
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 19
- 238000000576 coating method Methods 0.000 claims abstract description 42
- 239000011248 coating agent Substances 0.000 claims abstract description 40
- 239000000463 material Substances 0.000 claims abstract description 15
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 31
- 230000008569 process Effects 0.000 description 30
- 238000012545 processing Methods 0.000 description 21
- 238000007789 sealing Methods 0.000 description 18
- 239000013077 target material Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 240000005002 Erythronium dens canis Species 0.000 description 5
- 238000000429 assembly Methods 0.000 description 5
- 230000000712 assembly Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000282326 Felis catus Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- GZUITABIAKMVPG-UHFFFAOYSA-N raloxifene Chemical compound C1=CC(O)=CC=C1C1=C(C(=O)C=2C=CC(OCCN3CCCCC3)=CC=2)C2=CC=C(O)C=C2S1 GZUITABIAKMVPG-UHFFFAOYSA-N 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000528387A CA1292967C (fr) | 1987-01-28 | 1987-01-28 | Appareil de metallisation sous vide de disques |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000528387A CA1292967C (fr) | 1987-01-28 | 1987-01-28 | Appareil de metallisation sous vide de disques |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1292967C true CA1292967C (fr) | 1991-12-10 |
Family
ID=4134845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000528387A Expired - Fee Related CA1292967C (fr) | 1987-01-28 | 1987-01-28 | Appareil de metallisation sous vide de disques |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1292967C (fr) |
-
1987
- 1987-01-28 CA CA000528387A patent/CA1292967C/fr not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |