CA1293309C - Systeme de controle optique d'objets cylindriques - Google Patents
Systeme de controle optique d'objets cylindriquesInfo
- Publication number
- CA1293309C CA1293309C CA000560773A CA560773A CA1293309C CA 1293309 C CA1293309 C CA 1293309C CA 000560773 A CA000560773 A CA 000560773A CA 560773 A CA560773 A CA 560773A CA 1293309 C CA1293309 C CA 1293309C
- Authority
- CA
- Canada
- Prior art keywords
- light
- trace
- mask
- masks
- light trace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title abstract description 13
- 238000007689 inspection Methods 0.000 title abstract description 8
- 238000000034 method Methods 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims 4
- 230000007547 defect Effects 0.000 abstract description 2
- 230000003068 static effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 101150034533 ATIC gene Proteins 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000013101 initial test Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000560773A CA1293309C (fr) | 1987-03-09 | 1988-03-08 | Systeme de controle optique d'objets cylindriques |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US023,324 | 1987-03-09 | ||
| CA000560773A CA1293309C (fr) | 1987-03-09 | 1988-03-08 | Systeme de controle optique d'objets cylindriques |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1293309C true CA1293309C (fr) | 1991-12-17 |
Family
ID=4137588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000560773A Expired - Lifetime CA1293309C (fr) | 1987-03-09 | 1988-03-08 | Systeme de controle optique d'objets cylindriques |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1293309C (fr) |
-
1988
- 1988-03-08 CA CA000560773A patent/CA1293309C/fr not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |