CA1319809C - Methode de fabrication de carbure de silicium - Google Patents

Methode de fabrication de carbure de silicium

Info

Publication number: CA1319809C
Authority: CA; Canada
Prior art keywords: reactants; silicon carbide; carbon; pressure; reaction
Prior art date: 1989-03-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CA000600141A

Other languages

English (en)

Inventor

Vladimir D. Krstic

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Individual

Original Assignee

Individual

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-03-15

Filing date

1989-05-18

Publication date

1993-07-06

1989-03-15 Priority claimed from US07/323,713 external-priority patent/US5021230A/en

1989-05-18 Application filed by Individual filed Critical Individual

1993-07-06 Application granted granted Critical

1993-07-06 Publication of CA1319809C publication Critical patent/CA1319809C/fr

2010-07-06 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 77
229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 71
238000004519 manufacturing process Methods 0.000 title claims abstract description 22
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 143
238000006243 chemical reaction Methods 0.000 claims abstract description 82
239000000377 silicon dioxide Substances 0.000 claims abstract description 70
238000000034 method Methods 0.000 claims abstract description 57
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 55
UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 48
239000000843 powder Substances 0.000 claims abstract description 44
229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 41
229910052799 carbon Inorganic materials 0.000 claims abstract description 35
239000000203 mixture Substances 0.000 claims abstract description 17
238000002156 mixing Methods 0.000 claims abstract description 8
239000000376 reactant Substances 0.000 claims description 50
LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 46
239000002245 particle Substances 0.000 claims description 27
239000007789 gas Substances 0.000 claims description 26
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
238000010438 heat treatment Methods 0.000 claims description 10
229910002804 graphite Inorganic materials 0.000 claims description 9
239000010439 graphite Substances 0.000 claims description 9
238000013019 agitation Methods 0.000 claims description 8
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
239000001301 oxygen Substances 0.000 claims description 7
229910052760 oxygen Inorganic materials 0.000 claims description 7
230000036961 partial effect Effects 0.000 claims description 7
229910052786 argon Inorganic materials 0.000 claims description 6
239000006229 carbon black Substances 0.000 claims description 6
239000011261 inert gas Substances 0.000 claims description 5
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
238000005054 agglomeration Methods 0.000 claims description 2
230000002776 aggregation Effects 0.000 claims description 2
229910052750 molybdenum Inorganic materials 0.000 claims description 2
239000011733 molybdenum Substances 0.000 claims description 2
239000002006 petroleum coke Substances 0.000 claims description 2
238000012546 transfer Methods 0.000 claims description 2
230000008569 process Effects 0.000 abstract description 29
230000003647 oxidation Effects 0.000 abstract description 7
238000007254 oxidation reaction Methods 0.000 abstract description 7
238000000227 grinding Methods 0.000 abstract description 3
239000002253 acid Substances 0.000 abstract description 2
238000002386 leaching Methods 0.000 abstract description 2
239000000047 product Substances 0.000 description 17
235000012239 silicon dioxide Nutrition 0.000 description 17
238000005755 formation reaction Methods 0.000 description 15
239000000463 material Substances 0.000 description 15
230000015572 biosynthetic process Effects 0.000 description 13
229910052681 coesite Inorganic materials 0.000 description 8
229910052906 cristobalite Inorganic materials 0.000 description 8
239000002994 raw material Substances 0.000 description 8
RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 8
229910052682 stishovite Inorganic materials 0.000 description 8
229910052905 tridymite Inorganic materials 0.000 description 8
230000002829 reductive effect Effects 0.000 description 7
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
239000010703 silicon Substances 0.000 description 6
229910052710 silicon Inorganic materials 0.000 description 5
230000003068 static effect Effects 0.000 description 5
230000035484 reaction time Effects 0.000 description 4
230000008859 change Effects 0.000 description 3
238000010304 firing Methods 0.000 description 3
239000008188 pellet Substances 0.000 description 3
238000012545 processing Methods 0.000 description 3
239000007787 solid Substances 0.000 description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
230000008901 benefit Effects 0.000 description 2
239000007795 chemical reaction product Substances 0.000 description 2
235000013312 flour Nutrition 0.000 description 2
230000002401 inhibitory effect Effects 0.000 description 2
238000003801 milling Methods 0.000 description 2
230000001737 promoting effect Effects 0.000 description 2
239000004576 sand Substances 0.000 description 2
238000001878 scanning electron micrograph Methods 0.000 description 2
VOXZDWNPVJITMN-ZBRFXRBCSA-N 17β-estradiol Chemical compound OC1=CC=C2[C@H]3CC[C@](C)([C@H](CC4)O)[C@@H]4[C@@H]3CCC2=C1 VOXZDWNPVJITMN-ZBRFXRBCSA-N 0.000 description 1
239000006244 Medium Thermal Substances 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
238000010306 acid treatment Methods 0.000 description 1
230000004913 activation Effects 0.000 description 1
238000004458 analytical method Methods 0.000 description 1
238000010923 batch production Methods 0.000 description 1
125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
238000004140 cleaning Methods 0.000 description 1
239000000470 constituent Substances 0.000 description 1
238000011109 contamination Methods 0.000 description 1
238000005260 corrosion Methods 0.000 description 1
230000007797 corrosion Effects 0.000 description 1
238000000354 decomposition reaction Methods 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
238000011161 development Methods 0.000 description 1
IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
238000009826 distribution Methods 0.000 description 1
238000001035 drying Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
230000002349 favourable effect Effects 0.000 description 1
239000012467 final product Substances 0.000 description 1
238000011010 flushing procedure Methods 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000004615 ingredient Substances 0.000 description 1
238000004898 kneading Methods 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
230000005012 migration Effects 0.000 description 1
238000013508 migration Methods 0.000 description 1
238000005453 pelletization Methods 0.000 description 1
238000003825 pressing Methods 0.000 description 1
230000009257 reactivity Effects 0.000 description 1
230000009467 reduction Effects 0.000 description 1
238000012552 review Methods 0.000 description 1
238000007790 scraping Methods 0.000 description 1
230000035939 shock Effects 0.000 description 1
229910052814 silicon oxide Inorganic materials 0.000 description 1
238000012360 testing method Methods 0.000 description 1
238000009834 vaporization Methods 0.000 description 1
238000013022 venting Methods 0.000 description 1

Landscapes

Carbon And Carbon Compounds (AREA)

CA000600141A 1989-03-15 1989-05-18 Methode de fabrication de carbure de silicium Expired - Fee Related CA1319809C (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US07/323,713 US5021230A (en)	1987-04-22	1989-03-15	Method of making silicon carbide
US323,713		1989-03-15

Publications (1)

Publication Number	Publication Date
CA1319809C true CA1319809C (fr)	1993-07-06

Family

ID=23260393

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000600141A Expired - Fee Related CA1319809C (fr)	1989-03-15	1989-05-18	Methode de fabrication de carbure de silicium

Country Status (1)

Country	Link
CA (1)	CA1319809C (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN114057196A (zh) *	2020-08-03	2022-02-18	比亚迪股份有限公司	一种高纯α相碳化硅粉料的制备方法
CN116443880A (zh) *	2023-03-02	2023-07-18	安徽微芯长江半导体材料有限公司	一种提高碳化硅粉料堆积密度的方法

1989
- 1989-05-18 CA CA000600141A patent/CA1319809C/fr not_active Expired - Fee Related

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN114057196A (zh) *	2020-08-03	2022-02-18	比亚迪股份有限公司	一种高纯α相碳化硅粉料的制备方法
CN114057196B (zh) *	2020-08-03	2023-05-05	比亚迪股份有限公司	一种高纯α相碳化硅粉料的制备方法
CN116443880A (zh) *	2023-03-02	2023-07-18	安徽微芯长江半导体材料有限公司	一种提高碳化硅粉料堆积密度的方法

Legal Events

Date	Code	Title	Description
1998-07-06	MKLA	Lapsed

Publication	Publication Date	Title
Krstic	1992	Production of fine, high‐purity beta silicon carbide powders
US8470279B2 (en)	2013-06-25	High purity silicon-containing products and method of manufacture
Siddiqi et al.	1985	The influence of iron on the preparation of silicon nitride from silica
US5021230A (en)	1991-06-04	Method of making silicon carbide
Koc et al.	1998	Synthesis of beta silicon carbide powders using carbon coated fumed silica
US4360506A (en)	1982-11-23	Method of preparing sialon products
Kevorkijan et al.	1992	Low-temperature synthesis of sinterable SiC powders by carbothermic reduction of colloidal SiO2
EP0343873B1 (fr)	1993-10-06	Procédé pour la production de poudres céramiques en carbure de bore et diborure de titane comme substratum et composition produite ainsi
US4517305A (en)	1985-05-14	Finely divided silicon carbide having a high content of 2H-type silicon carbide and method of producing the same
US4217335A (en)	1980-08-12	Process for producing β-silicon carbide fine powder
IE61432B1 (en)	1994-11-02	Powders for ceramics of metal carbides and nitrides made by carbothermal reduction and process for their manufacture
Koc et al.	2001	β-SiC production by reacting silica gel with hydrocarbon gas
US4122152A (en)	1978-10-24	Process for preparing silicon nitride powder having a high α-phase content
US5338523A (en)	1994-08-16	Method of making transition metal carbide and boride powders
US2448479A (en)	1948-08-31	Uranium monocarbide and method of preparation
US4224073A (en)	1980-09-23	Active silicon carbide powder containing a boron component and process for producing the same
CA1319809C (fr)	1993-07-06	Methode de fabrication de carbure de silicium
US5169832A (en)	1992-12-08	Synthesis of refractory metal boride powders of predetermined particle size
US4118464A (en)	1978-10-03	Process for separating silica from silicate-bearing materials
US5348919A (en)	1994-09-20	High-packing silicon nitride powder and method for making
Real et al.	1997	Synthesis of silicon carbide whiskers from carbothermal reduction of silica gel by means of the constant rate thermal analysis (CRTA) method
Lee et al.	1999	Effect of hold time on reaction of silicon monoxide with activated carbon fiber composites
US5585084A (en)	1996-12-17	Silicon nitride powder
KR100381993B1 (ko)	2003-05-09	초미분 탄화 규소 분체 및 이의 제조 방법
US5382554A (en)	1995-01-17	High-packing silicon nitride powder and method for making