CA1333752C - Jauge de contrainte interferometrique universelle - Google Patents
Jauge de contrainte interferometrique universelleInfo
- Publication number
- CA1333752C CA1333752C CA 557749 CA557749A CA1333752C CA 1333752 C CA1333752 C CA 1333752C CA 557749 CA557749 CA 557749 CA 557749 A CA557749 A CA 557749A CA 1333752 C CA1333752 C CA 1333752C
- Authority
- CA
- Canada
- Prior art keywords
- interferometer
- substrate
- arm
- mirror
- radiant energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 557749 CA1333752C (fr) | 1988-01-29 | 1988-01-29 | Jauge de contrainte interferometrique universelle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 557749 CA1333752C (fr) | 1988-01-29 | 1988-01-29 | Jauge de contrainte interferometrique universelle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1333752C true CA1333752C (fr) | 1995-01-03 |
Family
ID=4137352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 557749 Expired - Fee Related CA1333752C (fr) | 1988-01-29 | 1988-01-29 | Jauge de contrainte interferometrique universelle |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1333752C (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107144383A (zh) * | 2017-03-15 | 2017-09-08 | 上海大学 | 薄膜应力测试装置和薄膜应力测试方法 |
| CN108489414A (zh) * | 2018-05-07 | 2018-09-04 | 中国矿业大学 | 一种微纳尺度记忆合金双程记忆应变测试装置及测试方法 |
| CN111721455A (zh) * | 2020-07-24 | 2020-09-29 | 于振 | 基于激光干涉测量法的静态扭矩测量装置及测量方法 |
-
1988
- 1988-01-29 CA CA 557749 patent/CA1333752C/fr not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107144383A (zh) * | 2017-03-15 | 2017-09-08 | 上海大学 | 薄膜应力测试装置和薄膜应力测试方法 |
| CN108489414A (zh) * | 2018-05-07 | 2018-09-04 | 中国矿业大学 | 一种微纳尺度记忆合金双程记忆应变测试装置及测试方法 |
| CN111721455A (zh) * | 2020-07-24 | 2020-09-29 | 于振 | 基于激光干涉测量法的静态扭矩测量装置及测量方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |