CA2020733A1 - Systeme de sondage non destructif de plaquettes de semiconducteur utilisant des impulsions laser pour engendrer et detecter des signaux en ondes millimetriques - Google Patents

Systeme de sondage non destructif de plaquettes de semiconducteur utilisant des impulsions laser pour engendrer et detecter des signaux en ondes millimetriques

Info

Publication number
CA2020733A1
CA2020733A1 CA 2020733 CA2020733A CA2020733A1 CA 2020733 A1 CA2020733 A1 CA 2020733A1 CA 2020733 CA2020733 CA 2020733 CA 2020733 A CA2020733 A CA 2020733A CA 2020733 A1 CA2020733 A1 CA 2020733A1
Authority
CA
Canada
Prior art keywords
generate
semiconductor wafer
laser pulses
wave signals
probing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2020733
Other languages
English (en)
Other versions
CA2020733C (fr
Inventor
Thane Smith
Ho-Chung Huang
Chi Hsiang Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Whitaker LLC
Original Assignee
Comsat Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Comsat Corp filed Critical Comsat Corp
Priority to CA 2020733 priority Critical patent/CA2020733C/fr
Publication of CA2020733A1 publication Critical patent/CA2020733A1/fr
Application granted granted Critical
Publication of CA2020733C publication Critical patent/CA2020733C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CA 2020733 1990-07-09 1990-07-09 Systeme de sondage non destructif de plaquettes de semiconducteur utilisant des impulsions laser pour engendrer et detecter des signaux en ondes millimetriques Expired - Fee Related CA2020733C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2020733 CA2020733C (fr) 1990-07-09 1990-07-09 Systeme de sondage non destructif de plaquettes de semiconducteur utilisant des impulsions laser pour engendrer et detecter des signaux en ondes millimetriques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2020733 CA2020733C (fr) 1990-07-09 1990-07-09 Systeme de sondage non destructif de plaquettes de semiconducteur utilisant des impulsions laser pour engendrer et detecter des signaux en ondes millimetriques

Publications (2)

Publication Number Publication Date
CA2020733A1 true CA2020733A1 (fr) 1992-01-10
CA2020733C CA2020733C (fr) 1995-05-23

Family

ID=4145431

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2020733 Expired - Fee Related CA2020733C (fr) 1990-07-09 1990-07-09 Systeme de sondage non destructif de plaquettes de semiconducteur utilisant des impulsions laser pour engendrer et detecter des signaux en ondes millimetriques

Country Status (1)

Country Link
CA (1) CA2020733C (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6980010B2 (en) 2003-01-21 2005-12-27 Riken Method and apparatus for inspecting wire breaking of integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6980010B2 (en) 2003-01-21 2005-12-27 Riken Method and apparatus for inspecting wire breaking of integrated circuit

Also Published As

Publication number Publication date
CA2020733C (fr) 1995-05-23

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