CA2061302A1 - Methode servant a produire une couche de diamant synthetique - Google Patents
Methode servant a produire une couche de diamant synthetiqueInfo
- Publication number
- CA2061302A1 CA2061302A1 CA 2061302 CA2061302A CA2061302A1 CA 2061302 A1 CA2061302 A1 CA 2061302A1 CA 2061302 CA2061302 CA 2061302 CA 2061302 A CA2061302 A CA 2061302A CA 2061302 A1 CA2061302 A1 CA 2061302A1
- Authority
- CA
- Canada
- Prior art keywords
- synthetic diamond
- diamond film
- making synthetic
- metal
- tungsten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 title abstract 2
- 239000010432 diamond Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 239000011229 interlayer Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 239000011148 porous material Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2061302 CA2061302C (fr) | 1992-02-17 | 1992-02-17 | Methode servant a produire une couche de diamant synthetique |
| EP93101303A EP0556615B1 (fr) | 1992-02-17 | 1993-01-28 | Méthode pour la fabrication de diamants synthétiques |
| DE1993621747 DE69321747T2 (de) | 1992-02-17 | 1993-01-28 | Verfahren zur Herstellung von synthetischen Diamanten |
| JP5027857A JP2978023B2 (ja) | 1992-02-17 | 1993-02-17 | 合成ダイヤモンドフィルムの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2061302 CA2061302C (fr) | 1992-02-17 | 1992-02-17 | Methode servant a produire une couche de diamant synthetique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2061302A1 true CA2061302A1 (fr) | 1993-08-18 |
| CA2061302C CA2061302C (fr) | 2000-04-18 |
Family
ID=4149270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2061302 Expired - Fee Related CA2061302C (fr) | 1992-02-17 | 1992-02-17 | Methode servant a produire une couche de diamant synthetique |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0556615B1 (fr) |
| JP (1) | JP2978023B2 (fr) |
| CA (1) | CA2061302C (fr) |
| DE (1) | DE69321747T2 (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3311956A1 (de) * | 1982-03-31 | 1983-10-13 | Ricoh Co., Ltd., Tokyo | Farbstrahl-druckerkopf |
| CA2120175A1 (fr) * | 1993-04-29 | 1994-10-30 | Louis K. Bigelow | Procede pour la fabrication d'une structure diamantee |
| US5527559A (en) * | 1994-07-18 | 1996-06-18 | Saint Gobain/Norton Industrial Ceramics Corp. | Method of depositing a diamond film on a graphite substrate |
| GB2304982B (en) * | 1995-09-08 | 1999-07-21 | Marconi Gec Ltd | Electron microscope specimen supports |
| EP0845220B1 (fr) | 1996-06-17 | 2003-09-03 | Japan Tobacco Inc. | Parfumeur d'ambiance |
| JP5545567B2 (ja) * | 2010-06-17 | 2014-07-09 | 国立大学法人金沢大学 | 単結晶ダイヤモンド成長用の基材及び単結晶ダイヤモンドの製造方法 |
| WO2016128883A1 (fr) * | 2015-02-09 | 2016-08-18 | Alkhazraji Saeed Alhassan | Processus de fabrication de diamant poreux pur |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3630418C1 (de) * | 1986-09-06 | 1987-12-17 | Kernforschungsanlage Juelich | Verfahren zur Beschichtung von Werkstuecken mit amorphem,wasserstoffhaltigem Kohlenstoff |
| JPH08757B2 (ja) * | 1988-12-26 | 1996-01-10 | 住友電気工業株式会社 | ダイヤモンドおよびその気相合成法 |
| CA2068152A1 (fr) * | 1991-06-12 | 1992-12-13 | William L. Mowrey | Procede pour l'obtention d'articles par depot chimique en phase gazeuse; les articles ainsi obtenus |
-
1992
- 1992-02-17 CA CA 2061302 patent/CA2061302C/fr not_active Expired - Fee Related
-
1993
- 1993-01-28 DE DE1993621747 patent/DE69321747T2/de not_active Expired - Fee Related
- 1993-01-28 EP EP93101303A patent/EP0556615B1/fr not_active Expired - Lifetime
- 1993-02-17 JP JP5027857A patent/JP2978023B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05345698A (ja) | 1993-12-27 |
| DE69321747D1 (de) | 1998-12-03 |
| EP0556615A2 (fr) | 1993-08-25 |
| CA2061302C (fr) | 2000-04-18 |
| JP2978023B2 (ja) | 1999-11-15 |
| DE69321747T2 (de) | 1999-06-24 |
| EP0556615A3 (en) | 1993-10-27 |
| EP0556615B1 (fr) | 1998-10-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |