CA2062447C - Dispositif pour la detection des defauts dans les grains reflectorises - Google Patents

Dispositif pour la detection des defauts dans les grains reflectorises

Info

Publication number
CA2062447C
CA2062447C CA 2062447 CA2062447A CA2062447C CA 2062447 C CA2062447 C CA 2062447C CA 2062447 CA2062447 CA 2062447 CA 2062447 A CA2062447 A CA 2062447A CA 2062447 C CA2062447 C CA 2062447C
Authority
CA
Canada
Prior art keywords
incidence
inspection point
angle
grain
specular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 2062447
Other languages
English (en)
Other versions
CA2062447A1 (fr
Inventor
Peter Charles Matthews
Barry Godfrey Wilson
Jon Fredrick Soest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
USNR LLC
Original Assignee
USNR LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by USNR LLC filed Critical USNR LLC
Publication of CA2062447A1 publication Critical patent/CA2062447A1/fr
Application granted granted Critical
Publication of CA2062447C publication Critical patent/CA2062447C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CA 2062447 1991-03-07 1992-03-06 Dispositif pour la detection des defauts dans les grains reflectorises Expired - Fee Related CA2062447C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66613391A 1991-03-07 1991-03-07
US07/666,133 1991-03-07

Publications (2)

Publication Number Publication Date
CA2062447A1 CA2062447A1 (fr) 1992-09-08
CA2062447C true CA2062447C (fr) 1998-10-13

Family

ID=24672959

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2062447 Expired - Fee Related CA2062447C (fr) 1991-03-07 1992-03-06 Dispositif pour la detection des defauts dans les grains reflectorises

Country Status (1)

Country Link
CA (1) CA2062447C (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9502611D0 (sv) * 1995-07-14 1995-07-14 Casco Nobel Ab Prediction of the properties of board
CN113325004B (zh) * 2021-07-07 2023-03-31 上海超硅半导体股份有限公司 一种半导体晶片表面缺陷检测方法以及检测装置

Also Published As

Publication number Publication date
CA2062447A1 (fr) 1992-09-08

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