CA2093924A1 - Bain acide pour cuivrage - Google Patents
Bain acide pour cuivrageInfo
- Publication number
- CA2093924A1 CA2093924A1 CA002093924A CA2093924A CA2093924A1 CA 2093924 A1 CA2093924 A1 CA 2093924A1 CA 002093924 A CA002093924 A CA 002093924A CA 2093924 A CA2093924 A CA 2093924A CA 2093924 A1 CA2093924 A1 CA 2093924A1
- Authority
- CA
- Canada
- Prior art keywords
- copper plating
- acid bath
- bath
- copper
- invention concerns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 2
- 229910052802 copper Inorganic materials 0.000 title abstract 2
- 239000010949 copper Substances 0.000 title abstract 2
- 239000002253 acid Substances 0.000 title 1
- 238000007747 plating Methods 0.000 title 1
- 239000011260 aqueous acid Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electrolytic Production Of Metals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4032864A DE4032864A1 (de) | 1990-10-13 | 1990-10-13 | Saures bad zur galvanischen abscheidung von kupferueberzuegen und verfahren unter verwendung dieser kombination |
| DEP4032864.3 | 1990-10-13 | ||
| PCT/DE1991/000811 WO1992007116A1 (fr) | 1990-10-13 | 1991-10-11 | Bain acide pour le depot electrolytique de couches de cuivre et procede avec utilisation de cette combinaison |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2093924A1 true CA2093924A1 (fr) | 1992-04-14 |
| CA2093924C CA2093924C (fr) | 2002-02-05 |
Family
ID=6416407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002093924A Expired - Lifetime CA2093924C (fr) | 1990-10-13 | 1991-10-11 | Bain acide pour cuivrage |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP0554275B1 (fr) |
| JP (1) | JPH06501986A (fr) |
| AT (1) | ATE115651T1 (fr) |
| CA (1) | CA2093924C (fr) |
| DE (2) | DE4032864A1 (fr) |
| ES (1) | ES2066477T3 (fr) |
| WO (1) | WO1992007116A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11035051B2 (en) | 2016-08-15 | 2021-06-15 | Atotech Deutschland Gmbh | Acidic aqueous composition for electrolytic copper plating |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10261852B3 (de) * | 2002-12-20 | 2004-06-03 | Atotech Deutschland Gmbh | Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad |
| DE10337669B4 (de) * | 2003-08-08 | 2006-04-27 | Atotech Deutschland Gmbh | Wässrige, saure Lösung und Verfahren zum galvanischen Abscheiden von Kupferüberzügen sowie Verwendung der Lösung |
| DE102004041701A1 (de) * | 2004-08-28 | 2006-03-02 | Enthone Inc., West Haven | Verfahren zur elektrolytischen Abscheidung von Metallen |
| US7282602B2 (en) * | 2004-09-21 | 2007-10-16 | Bionumerik Pharmaceuticals, Inc. | Medicinal disulfide salts |
| WO2007086454A1 (fr) * | 2006-01-27 | 2007-08-02 | Okuno Chemical Industries Co., Ltd. | Additif ajouté à une solution pour cuivrage électrolytique utilisant une anode de cuivre phosphoré, solution pour cuivrage électrolytique et procédé de cuivrage électrolytique |
| DE102014208733A1 (de) | 2014-05-09 | 2015-11-12 | Dr. Hesse Gmbh & Cie Kg | Verfahren zum elektrolytischen Abscheiden von Kupfer aus Wasser basierenden Elektrolyten |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL291575A (fr) * | 1962-04-16 | |||
| DE1246347B (de) * | 1966-03-08 | 1967-08-03 | Schering Ag | Saures galvanisches Kupferbad |
| DE2028803C3 (de) * | 1970-06-06 | 1980-08-14 | Schering Ag, 1000 Berlin Und 4619 Bergkamen | Polymere Phenazoniumverbindungen |
| AU496780B2 (en) * | 1975-03-11 | 1978-10-26 | Oxy Metal Industries Corporation | Additives in baths forthe electrodeposition of copper |
| DE2721985A1 (de) * | 1977-05-14 | 1978-11-16 | Bayer Ag | Verfahren zur herstellung von urethan- und/oder harnstoffgruppen aufweisenden polyisocyanat polyadditionsprodukten |
| DE2746938C2 (de) * | 1977-10-17 | 1987-04-09 | Schering AG, 1000 Berlin und 4709 Bergkamen | Wäßriges saures Bad zur galvanischen Abscheidung von glänzenden und rißfreien Kupferüberzügen und Verwendung dieses Bades |
| US4272335A (en) * | 1980-02-19 | 1981-06-09 | Oxy Metal Industries Corporation | Composition and method for electrodeposition of copper |
| US4374709A (en) * | 1980-05-01 | 1983-02-22 | Occidental Chemical Corporation | Process for plating polymeric substrates |
| US4376685A (en) * | 1981-06-24 | 1983-03-15 | M&T Chemicals Inc. | Acid copper electroplating baths containing brightening and leveling additives |
| FR2510145B1 (fr) * | 1981-07-24 | 1986-02-07 | Rhone Poulenc Spec Chim | Additif pour bain de cuivrage electrolytique acide, son procede de preparation et son application au cuivrage des circuits imprimes |
| WO1984001393A1 (fr) * | 1982-09-30 | 1984-04-12 | Learonal Inc | Solutions de cuivrage electrolytique |
| DE3402999A1 (de) * | 1984-01-28 | 1985-08-01 | Skw Trostberg Ag, 8223 Trostberg | Duengerloesungen |
| DE3721985A1 (de) * | 1987-06-30 | 1989-01-12 | Schering Ag | Waessriges saures bad zur galvanischen abscheidung glaenzender und eingeebneter kupferueberzuege |
-
1990
- 1990-10-13 DE DE4032864A patent/DE4032864A1/de active Granted
-
1991
- 1991-10-11 EP EP91917496A patent/EP0554275B1/fr not_active Expired - Lifetime
- 1991-10-11 JP JP3516095A patent/JPH06501986A/ja active Pending
- 1991-10-11 AT AT91917496T patent/ATE115651T1/de not_active IP Right Cessation
- 1991-10-11 DE DE59103933T patent/DE59103933D1/de not_active Expired - Lifetime
- 1991-10-11 CA CA002093924A patent/CA2093924C/fr not_active Expired - Lifetime
- 1991-10-11 ES ES91917496T patent/ES2066477T3/es not_active Expired - Lifetime
- 1991-10-11 WO PCT/DE1991/000811 patent/WO1992007116A1/fr not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11035051B2 (en) | 2016-08-15 | 2021-06-15 | Atotech Deutschland Gmbh | Acidic aqueous composition for electrolytic copper plating |
| US12071702B2 (en) | 2016-08-15 | 2024-08-27 | Atotech Deutschland Gmbh | Acidic aqueous composition for electrolytic copper plating |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0554275A1 (fr) | 1993-08-11 |
| WO1992007116A1 (fr) | 1992-04-30 |
| JPH06501986A (ja) | 1994-03-03 |
| CA2093924C (fr) | 2002-02-05 |
| DE4032864C2 (fr) | 1993-01-07 |
| DE4032864A1 (de) | 1992-04-16 |
| ES2066477T3 (es) | 1995-03-01 |
| ATE115651T1 (de) | 1994-12-15 |
| EP0554275B1 (fr) | 1994-12-14 |
| DE59103933D1 (de) | 1995-01-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed | ||
| MKEC | Expiry (correction) |
Effective date: 20121202 |