CA2156557A1 - Conducteurs transparents renfermant de l'oxyde de zinc et d'indium; methodes pour l'obtention de pellicules - Google Patents

Conducteurs transparents renfermant de l'oxyde de zinc et d'indium; methodes pour l'obtention de pellicules

Info

Publication number
CA2156557A1
CA2156557A1 CA 2156557 CA2156557A CA2156557A1 CA 2156557 A1 CA2156557 A1 CA 2156557A1 CA 2156557 CA2156557 CA 2156557 CA 2156557 A CA2156557 A CA 2156557A CA 2156557 A1 CA2156557 A1 CA 2156557A1
Authority
CA
Canada
Prior art keywords
oxide
indium
zinc
composition
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2156557
Other languages
English (en)
Inventor
Sue Anne Carter
Robert Joseph Cava
Jueinai Raynien Kwo
Julia Mae Phillips
Gordon Albert Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Inc
Original Assignee
AT&T Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Inc filed Critical AT&T Inc
Publication of CA2156557A1 publication Critical patent/CA2156557A1/fr
Abandoned legal-status Critical Current

Links

Landscapes

  • Non-Insulated Conductors (AREA)
  • Physical Vapour Deposition (AREA)
CA 2156557 1994-10-13 1995-08-21 Conducteurs transparents renfermant de l'oxyde de zinc et d'indium; methodes pour l'obtention de pellicules Abandoned CA2156557A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32290294A 1994-10-13 1994-10-13
US322,902 1994-10-13

Publications (1)

Publication Number Publication Date
CA2156557A1 true CA2156557A1 (fr) 1996-04-14

Family

ID=23256940

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2156557 Abandoned CA2156557A1 (fr) 1994-10-13 1995-08-21 Conducteurs transparents renfermant de l'oxyde de zinc et d'indium; methodes pour l'obtention de pellicules

Country Status (1)

Country Link
CA (1) CA2156557A1 (fr)

Similar Documents

Publication Publication Date Title
CA2130539C (fr) Conducteurs transparents renfermant un oxyde de gallium-indium
Phillips et al. Zinc‐indium‐oxide: a high conductivity transparent conducting oxide
US6761986B2 (en) Thin film infrared transparent conductor
US7858206B2 (en) Transparent conductor, transparent electrode, solar cell, light emitting device and display panel
US5397920A (en) Light transmissive, electrically-conductive, oxide film and methods of production
Nath et al. Preparation of In2O3 and tin-doped In2O3 films by a novel activated reactive evaporation technique
Nagatomo et al. Electrical and optical properties of vacuum-evaporated indium-tin oxide films with high electron mobility
Sato et al. Highly transparent and conductive group IV impurity‐doped ZnO thin films prepared by radio frequency magnetron sputtering
JP2000044236A (ja) 透明導電性酸化物薄膜を有する物品及びその製造方法
George et al. Electrical and optical properties of electron beam evaporated ITO thin films
US20100075176A1 (en) Process for producing electrical conductor
KR20000016930A (ko) 적외선투과에우수한투명도전막및그제조방법
US5628933A (en) Transparent conductors comprising zinc-indium-oxide and methods for making films
WO2002031215A9 (fr) Procede de formation de couche mince d'oxyde d'etain et d'indium par utilisation d'une source de pulverisation ionique negative a magnetron
JP3644647B2 (ja) 導電性酸化物およびそれを用いた電極
Farahamndjou The study of electro-optical properties of nanocomposite ITO thin films prepared by e-beam evaporation
Singh et al. Al-doped zinc oxide (ZnO: Al) thin films by pulsed laser ablation.
US5473456A (en) Method for growing transparent conductive gallium-indium-oxide films by sputtering
US5652062A (en) Devices using transparent conductive GaInO3 films
Tominaga et al. Conductive transparent films deposited by simultaneous sputtering of zinc-oxide and indium-oxide targets
KR100862593B1 (ko) 투명 전도성 박막 및 이의 제조방법
JPH08227614A (ja) 亜鉛−インジウム酸化物を含む透明導電体及び薄膜の作製方法
CA2158776A1 (fr) Conducteurs transparents renfermant de l'oxyde de zinc et d'indium et methodes pour l'obtention de pellicules
Sundaram et al. Deposition and annealing studies of indium tin oxide films
Kassab et al. Laser stimulated light reflection for TeO2–WO3–Bi2O3 thin films with incorporated Si nanoparticles

Legal Events

Date Code Title Description
EEER Examination request
FZDE Dead