CA2158146A1 - Radiometre actif servant a effectuer des mesures a etalonnage automatique de la temperature d'un fourneau - Google Patents

Radiometre actif servant a effectuer des mesures a etalonnage automatique de la temperature d'un fourneau

Info

Publication number
CA2158146A1
CA2158146A1 CA002158146A CA2158146A CA2158146A1 CA 2158146 A1 CA2158146 A1 CA 2158146A1 CA 002158146 A CA002158146 A CA 002158146A CA 2158146 A CA2158146 A CA 2158146A CA 2158146 A1 CA2158146 A1 CA 2158146A1
Authority
CA
Canada
Prior art keywords
radiometer
receiver
millimeter
temperature
probe beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002158146A
Other languages
English (en)
Inventor
Paul P. Woskov
Daniel R. Cohn
Charles Titus
J. Kenneth Wittle
Jeffrey E. Surma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ELECTRO-PYROLYSIS Inc
Battelle Memorial Institute Inc
Massachusetts Institute of Technology
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2158146A1 publication Critical patent/CA2158146A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/003—Measuring quantity of heat for measuring the power of light beams, e.g. laser beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
    • G01J5/53—Reference sources, e.g. standard lamps; Black bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/006—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Radiation Pyrometers (AREA)

Abstract

Radiomètre à faisceau de sondage superposé à son champ de perception et permettant d'effectuer des mesures de température. Ce radiomètre comprend un récepteur hétérodyne d'ondes millimétriques/sous-millimétriques, doté d'une source d'ondes millimétriques/sous-millimétriques en vue d'effectuer le sondage. Le récepteur est conçu pour recevoir un rayonnement émis par une surface dont la température doit être mesurée. Ce rayonnement comprend une partie constituée de l'énergie émise de la surface et une partie constituée de l'énergie réfléchie par la surface, qui elle-même contient l'énergie du faisceau de sondage réfléchie par la surface. La partie d'énergie émise de la surface est associée à la température de surface, et la partie d'énergie réfléchie par la surface est associée au pouvoir émissif de ladite surface. La mesure simultanée du pouvoir émissif de la surface permet l'étalonnage en temps réel de la mesure de température.
CA002158146A 1994-01-14 1995-01-12 Radiometre actif servant a effectuer des mesures a etalonnage automatique de la temperature d'un fourneau Abandoned CA2158146A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/181,706 US5573339A (en) 1994-01-14 1994-01-14 Active radiometer for self-calibrated furnace temperature measurements
US08/181,706 1994-01-14

Publications (1)

Publication Number Publication Date
CA2158146A1 true CA2158146A1 (fr) 1995-07-20

Family

ID=22665439

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002158146A Abandoned CA2158146A1 (fr) 1994-01-14 1995-01-12 Radiometre actif servant a effectuer des mesures a etalonnage automatique de la temperature d'un fourneau

Country Status (5)

Country Link
US (1) US5573339A (fr)
EP (1) EP0689678A1 (fr)
JP (1) JPH08511107A (fr)
CA (1) CA2158146A1 (fr)
WO (1) WO1995019575A1 (fr)

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US5785426A (en) * 1994-01-14 1998-07-28 Massachusetts Institute Of Technology Self-calibrated active pyrometer for furnace temperature measurements
US6012840A (en) * 1997-01-27 2000-01-11 The Regents Of The University Of California Single-fiber multi-color pyrometry
US6682216B1 (en) * 1999-12-16 2004-01-27 The Regents Of The University Of California Single-fiber multi-color pyrometry
JP3819298B2 (ja) 2000-01-21 2006-09-06 インテグレイテッド エンバイロンメンタル テクノロジーズ， エルエルシー． 廃棄物を処理する方法および装置
US6352192B1 (en) * 2000-02-29 2002-03-05 Motorola, Inc. System and method to control solder reflow furnace with wafer surface characterization
GB0005925D0 (en) * 2000-03-10 2000-05-03 Univ Glasgow Radiometer antenna cavities
CA2520776C (fr) * 2003-04-01 2012-05-08 Shell Internationale Research Maatschappij B.V. Procede d'epoxydation olefinique et catalyseur a utiliser dans ce procede
US20080290265A1 (en) * 2007-05-21 2008-11-27 Robert Patrick Daly System and method of calibrating a millimeter wave radiometer using an optical chopper
US8003425B2 (en) * 2008-05-14 2011-08-23 International Business Machines Corporation Methods for forming anti-reflection structures for CMOS image sensors
US7759755B2 (en) * 2008-05-14 2010-07-20 International Business Machines Corporation Anti-reflection structures for CMOS image sensors
US7997121B2 (en) * 2008-07-11 2011-08-16 Savannah River Nuclear Solutions, Llc Milliwave melter monitoring system
US20140035779A1 (en) * 2012-07-31 2014-02-06 Radiometrics Corporation Highly accurate calibration of microwave radiometry devices
US10876898B2 (en) 2018-08-08 2020-12-29 National Technology & Engineering Solutions Of Sandia, Llc Passive millimeter wave radiometer system for calibration of infrared cameras
US11187587B1 (en) * 2020-08-12 2021-11-30 Rohde & Schwarz Gmbh & Co. Kg Calibration device and method of calibrating a microwave radiometer
JP7693315B2 (ja) * 2020-12-25 2025-06-17 イビデン株式会社 黒鉛材の製造方法
CN112729605B (zh) * 2021-02-26 2022-08-02 王世有 一种基于光谱吸收原理的光纤测温系统

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US4292638A (en) * 1971-06-17 1981-09-29 Sperry Corporation Augmented radiometric system
CH547487A (de) * 1972-07-27 1974-03-29 Bbc Brown Boveri & Cie Verfahren zur beruehrungslosen und materialunabhaengigen temperaturmessung an oberflaechen mittels infrarot-pyrometer.
DE2803480C2 (de) * 1978-01-27 1984-11-22 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren und Anordnung zur Messung der physikalischen Objekttemperatur mittels Mikrowellen
JPS5939385B2 (ja) * 1980-01-31 1984-09-22 第一化成株式会社 ガラス繊維の表面処理法
JPS56108944A (en) * 1980-02-01 1981-08-28 Mitsubishi Electric Corp Microwave radiometer
JPS57161521A (en) * 1981-03-31 1982-10-05 Chino Works Ltd Radiation thermometer
JPS58171643A (ja) * 1982-04-01 1983-10-08 Nippon Steel Corp 管状物体の温度測定方法及び装置
US4568199A (en) * 1983-04-06 1986-02-04 Shell Oil Company Microwave pyrometer
US4708493A (en) * 1986-05-19 1987-11-24 Quantum Logic Corporation Apparatus for remote measurement of temperatures
JPH01202633A (ja) * 1988-02-08 1989-08-15 Minolta Camera Co Ltd 放射温度計
US4919542A (en) * 1988-04-27 1990-04-24 Ag Processing Technologies, Inc. Emissivity correction apparatus and method
KR960013995B1 (ko) * 1988-07-15 1996-10-11 도오교오 에레구토론 가부시끼가이샤 반도체 웨이퍼 기판의 표면온도 측정 방법 및 열처리 장치
US4956538A (en) * 1988-09-09 1990-09-11 Texas Instruments, Incorporated Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors
US5036289A (en) * 1989-03-17 1991-07-30 Infrared Systems, Inc. Method and apparatus for synchronously demodulating detector output of a radiometer
US4984902A (en) * 1989-04-13 1991-01-15 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
US5029117A (en) * 1989-04-24 1991-07-02 Tektronix, Inc. Method and apparatus for active pyrometry
US5255286A (en) * 1991-05-17 1993-10-19 Texas Instruments Incorporated Multi-point pyrometry with real-time surface emissivity compensation
US5326173A (en) * 1993-01-11 1994-07-05 Alcan International Limited Apparatus and method for remote temperature measurement
US5308161A (en) * 1993-02-11 1994-05-03 Quantum Logic Corporation Pyrometer apparatus for use in rapid thermal processing of semiconductor wafers
US5305416A (en) * 1993-04-02 1994-04-19 At&T Bell Laboratories Semiconductor processing technique, including pyrometric measurement of radiantly heated bodies

Also Published As

Publication number Publication date
WO1995019575A1 (fr) 1995-07-20
JPH08511107A (ja) 1996-11-19
US5573339A (en) 1996-11-12
EP0689678A1 (fr) 1996-01-03

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued