CA2272129C - Dispositif a semiconducteur a couche reflechissante - Google Patents

Dispositif a semiconducteur a couche reflechissante Download PDF

Info

Publication number: CA2272129C
Authority: CA; Canada
Prior art keywords: thickness; layer; reflecting layer; reflecting; light
Prior art date: 1990-11-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CA002272129A

Other languages

English (en)

Other versions

CA2272129A1 (fr

Inventor

Norikatsu Yamauchi

Takashi Saka

Masumi Hirotani

Toshihiro Kato

Hiromoto Susawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Daido Steel Co Ltd

Original Assignee

Daido Steel Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-11-02

Filing date

1991-11-04

Publication date

2004-01-06

1990-11-02 Priority claimed from JP2298415A external-priority patent/JPH04171776A/ja

1990-11-07 Priority claimed from JP2301395A external-priority patent/JPH04174567A/ja

1991-02-19 Priority claimed from JP3045975A external-priority patent/JPH04264782A/ja

1991-04-26 Priority claimed from JP12513991A external-priority patent/JP2973581B2/ja

1991-07-31 Priority claimed from JP21614691A external-priority patent/JP3134382B2/ja

1991-11-04 Application filed by Daido Steel Co Ltd filed Critical Daido Steel Co Ltd

1991-11-04 Priority claimed from CA002054853A external-priority patent/CA2054853C/fr

1992-05-03 Publication of CA2272129A1 publication Critical patent/CA2272129A1/fr

2004-01-06 Application granted granted Critical

2004-01-06 Publication of CA2272129C publication Critical patent/CA2272129C/fr

2011-11-04 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title claims abstract description 407
239000000203 mixture Substances 0.000 claims abstract description 37
230000005855 radiation Effects 0.000 claims description 111
239000000758 substrate Substances 0.000 claims description 93
230000003287 optical effect Effects 0.000 claims description 51
239000000463 material Substances 0.000 claims description 31
238000000407 epitaxy Methods 0.000 claims description 12
125000004122 cyclic group Chemical group 0.000 claims description 3
239000013078 crystal Substances 0.000 abstract description 32
230000007423 decrease Effects 0.000 abstract description 17
230000007547 defect Effects 0.000 abstract description 12
229910001218 Gallium arsenide Inorganic materials 0.000 description 72
238000004088 simulation Methods 0.000 description 40
239000007789 gas Substances 0.000 description 22
230000008859 change Effects 0.000 description 21
238000012360 testing method Methods 0.000 description 21
230000000052 comparative effect Effects 0.000 description 11
229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 10
230000000903 blocking effect Effects 0.000 description 9
230000031700 light absorption Effects 0.000 description 7
238000004519 manufacturing process Methods 0.000 description 7
238000005259 measurement Methods 0.000 description 7
150000001875 compounds Chemical class 0.000 description 6
230000009467 reduction Effects 0.000 description 6
238000010521 absorption reaction Methods 0.000 description 5
230000000694 effects Effects 0.000 description 5
238000006243 chemical reaction Methods 0.000 description 4
230000006866 deterioration Effects 0.000 description 4
230000006872 improvement Effects 0.000 description 4
238000001451 molecular beam epitaxy Methods 0.000 description 4
230000002093 peripheral effect Effects 0.000 description 4
230000002411 adverse Effects 0.000 description 3
RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 3
229910000070 arsenic hydride Inorganic materials 0.000 description 3
238000000034 method Methods 0.000 description 3
230000004048 modification Effects 0.000 description 3
238000012986 modification Methods 0.000 description 3
238000000206 photolithography Methods 0.000 description 3
JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 3
238000000927 vapour-phase epitaxy Methods 0.000 description 3
239000012080 ambient air Substances 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
238000004943 liquid phase epitaxy Methods 0.000 description 2
230000002035 prolonged effect Effects 0.000 description 2
239000003362 semiconductor superlattice Substances 0.000 description 2
238000001228 spectrum Methods 0.000 description 2
XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
229910052581 Si3N4 Inorganic materials 0.000 description 1
230000004913 activation Effects 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
238000004891 communication Methods 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000002109 crystal growth method Methods 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
238000009826 distribution Methods 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
230000012447 hatching Effects 0.000 description 1
239000012535 impurity Substances 0.000 description 1
SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 description 1
229910000058 selane Inorganic materials 0.000 description 1
238000004904 shortening Methods 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1

Landscapes

Led Devices (AREA)

CA002272129A 1990-11-02 1991-11-04 Dispositif a semiconducteur a couche reflechissante Expired - Fee Related CA2272129C (fr)

Applications Claiming Priority (13)

Application Number	Priority Date	Filing Date	Title
JP2-298415		1990-11-02
JP2298415A JPH04171776A (ja)	1990-11-02	1990-11-02	面発光型発光ダイオード
JP2-301395		1990-11-07
JP2301395A JPH04174567A (ja)	1990-11-07	1990-11-07	面発光型発光ダイオードアレイ
JP3045975A JPH04264782A (ja)	1991-02-19	1991-02-19	面発光型発光ダイオードの製造方法
JP3-45975		1991-02-19
JP3-87602		1991-03-26
JP8760291		1991-03-26
JP12513991A JP2973581B2 (ja)	1991-04-26	1991-04-26	チャープ状光反射層を備えた半導体装置
JP3-125139		1991-04-26
JP3-216146		1991-07-31
JP21614691A JP3134382B2 (ja)	1991-07-31	1991-07-31	チャープ状光反射層を備えた半導体装置
CA002054853A CA2054853C (fr)	1990-11-02	1991-11-04	Dispositif a semiconducteur a couche reflechissante

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
CA002054853A Division CA2054853C (fr)	1990-11-02	1991-11-04	Dispositif a semiconducteur a couche reflechissante

Publications (2)

Publication Number	Publication Date
CA2272129A1 CA2272129A1 (fr)	1992-05-03
CA2272129C true CA2272129C (fr)	2004-01-06

Family

ID=29716407

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA002272129A Expired - Fee Related CA2272129C (fr)	1990-11-02	1991-11-04	Dispositif a semiconducteur a couche reflechissante

Country Status (1)

Country	Link
CA (1)	CA2272129C (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE21744964T1 (de) *	2020-01-25	2023-11-09	Jade Bird Display (shanghai) Limited	Mikrolichtleuchtdiode mit hoher lichtauskopplung

1991
- 1991-11-04 CA CA002272129A patent/CA2272129C/fr not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CA2272129A1 (fr)	1992-05-03

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Legal Events

Date	Code	Title
1999-05-26	EEER	Examination request
1999-06-18	FZDC	Correction of dead application (reinstatement)
2009-11-04	MKLA	Lapsed