CA2295551C - Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes - Google Patents
Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes Download PDFInfo
- Publication number
- CA2295551C CA2295551C CA002295551A CA2295551A CA2295551C CA 2295551 C CA2295551 C CA 2295551C CA 002295551 A CA002295551 A CA 002295551A CA 2295551 A CA2295551 A CA 2295551A CA 2295551 C CA2295551 C CA 2295551C
- Authority
- CA
- Canada
- Prior art keywords
- droplet
- electron
- substrate
- electrodes
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 239000010409 thin film Substances 0.000 claims abstract description 116
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 239000010408 film Substances 0.000 claims description 67
- 230000002209 hydrophobic effect Effects 0.000 claims description 8
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- 239000011159 matrix material Substances 0.000 description 21
- 238000010894 electron beam technology Methods 0.000 description 17
- 238000000206 photolithography Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 238000012937 correction Methods 0.000 description 12
- HBEQXAKJSGXAIQ-UHFFFAOYSA-N oxopalladium Chemical compound [Pd]=O HBEQXAKJSGXAIQ-UHFFFAOYSA-N 0.000 description 12
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 10
- 229910052763 palladium Inorganic materials 0.000 description 10
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
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- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 7
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
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- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 4
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- 229910052718 tin Inorganic materials 0.000 description 2
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- 229910052721 tungsten Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910006853 SnOz Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910007948 ZrB2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
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- 230000015572 biosynthetic process Effects 0.000 description 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229940028444 muse Drugs 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- GMVPRGQOIOIIMI-DWKJAMRDSA-N prostaglandin E1 Chemical compound CCCCC[C@H](O)\C=C\[C@H]1[C@H](O)CC(=O)[C@@H]1CCCCCCC(O)=O GMVPRGQOIOIIMI-DWKJAMRDSA-N 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(IV) oxide Inorganic materials O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (11)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31344094 | 1994-12-16 | ||
| JP6-313440 | 1994-12-16 | ||
| JP31442094 | 1994-12-19 | ||
| JP6-314420 | 1994-12-19 | ||
| JP458195 | 1995-01-17 | ||
| JP7-4581 | 1995-01-17 | ||
| JP15632195 | 1995-06-22 | ||
| JP7-156321 | 1995-06-22 | ||
| JP7-320927 | 1995-12-11 | ||
| JP32092795A JP3241251B2 (ja) | 1994-12-16 | 1995-12-11 | 電子放出素子の製造方法及び電子源基板の製造方法 |
| CA002165409A CA2165409C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002165409A Division CA2165409C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2295551A1 CA2295551A1 (fr) | 1996-06-17 |
| CA2295551C true CA2295551C (fr) | 2004-04-27 |
Family
ID=27543493
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002295612A Expired - Fee Related CA2295612C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
| CA002295377A Expired - Fee Related CA2295377C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
| CA002295551A Expired - Fee Related CA2295551C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
| CA002295355A Expired - Fee Related CA2295355C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
| CA002295408A Expired - Fee Related CA2295408C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002295612A Expired - Fee Related CA2295612C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
| CA002295377A Expired - Fee Related CA2295377C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002295355A Expired - Fee Related CA2295355C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
| CA002295408A Expired - Fee Related CA2295408C (fr) | 1994-12-16 | 1995-12-15 | Dispositif emetteur d'electrons, support, source d'emission, panneau d'affichage, appareil d'imagerie et methode de production connexes |
Country Status (1)
| Country | Link |
|---|---|
| CA (5) | CA2295612C (fr) |
-
1995
- 1995-12-15 CA CA002295612A patent/CA2295612C/fr not_active Expired - Fee Related
- 1995-12-15 CA CA002295377A patent/CA2295377C/fr not_active Expired - Fee Related
- 1995-12-15 CA CA002295551A patent/CA2295551C/fr not_active Expired - Fee Related
- 1995-12-15 CA CA002295355A patent/CA2295355C/fr not_active Expired - Fee Related
- 1995-12-15 CA CA002295408A patent/CA2295408C/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA2295355A1 (fr) | 1996-06-17 |
| CA2295551A1 (fr) | 1996-06-17 |
| CA2295377A1 (fr) | 1996-06-17 |
| CA2295377C (fr) | 2004-04-06 |
| CA2295612C (fr) | 2004-09-21 |
| CA2295612A1 (fr) | 1996-06-17 |
| CA2295408A1 (fr) | 1996-06-17 |
| CA2295408C (fr) | 2002-10-22 |
| CA2295355C (fr) | 2004-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20141215 |