CA2304179A1 - Resonateur optique pour spectroscopie par abaissement d'anneau de cavite avec retroreflecteurs a prismes - Google Patents
Resonateur optique pour spectroscopie par abaissement d'anneau de cavite avec retroreflecteurs a prismes Download PDFInfo
- Publication number
- CA2304179A1 CA2304179A1 CA002304179A CA2304179A CA2304179A1 CA 2304179 A1 CA2304179 A1 CA 2304179A1 CA 002304179 A CA002304179 A CA 002304179A CA 2304179 A CA2304179 A CA 2304179A CA 2304179 A1 CA2304179 A1 CA 2304179A1
- Authority
- CA
- Canada
- Prior art keywords
- resonator
- angle
- prism
- brewster
- prisms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000003287 optical effect Effects 0.000 title claims description 37
- 238000000180 cavity ring-down spectroscopy Methods 0.000 title description 25
- 238000004611 spectroscopical analysis Methods 0.000 claims abstract description 13
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 239000005350 fused silica glass Substances 0.000 claims description 14
- 230000005855 radiation Effects 0.000 claims description 12
- 229910052594 sapphire Inorganic materials 0.000 claims description 12
- 239000010980 sapphire Substances 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 201000009310 astigmatism Diseases 0.000 claims description 10
- 239000010432 diamond Substances 0.000 claims description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 5
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 5
- 239000004568 cement Substances 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 description 16
- 238000010276 construction Methods 0.000 description 10
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- 238000001514 detection method Methods 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000004847 absorption spectroscopy Methods 0.000 description 3
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- 238000013456 study Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 229910021532 Calcite Inorganic materials 0.000 description 1
- 241000700608 Sagitta Species 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/04—Prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/12—Reflex reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J2003/423—Spectral arrangements using lasers, e.g. tunable
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Optical Measuring Cells (AREA)
- Lasers (AREA)
Abstract
La présente invention concerne un résonateur stable pour une cellule de spectroscopie par abaissement d'anneau de cavité et comportant un axe optique. Le résonateur inclut deux prismes rétroréflecteurs à pseudo-incidence brewstérienne, comportant chacun une pluralité de surfaces de réflexion interne totale. Les prismes sont disposés en alignement le long de l'axe optique du résonateur. L'un au moins des deux prismes est susceptible de rotation de façon que les rayons de lumière pénètrent dans une face du prisme et en ressortent sous un angle correspondant sensiblement sous l'angle de pseudo-incidence brewstérienne par rapport à l'axe perpendiculaire à la surface du prisme. Ce dispositif permet de conserver l'alignement entre les prismes et permet l'accord du résonateur. L'une des surfaces de réflexion interne totale de l'un au moins des prismes peut être une surface incurvée, en l'occurrence soit une surface incurvée par meulage, soit une surface incurvée par adjonction à la surface d'une lentille plan-convexe, et ce, par contact optique ou collage. Selon une autre réalisation, on a pu centrer une lentille astigmatique dans un bras du résonateur et l'incliner selon l'angle de pseudo-incidence brewstérienne par rapport à l'axe optique du résonateur. Selon une réalisation préférée, chaque prisme présente un angle sommital d'environ 135· moins l'angle de pseudo-incidence brewstérienne, un deuxième angle d'environ 90·, et un troisième angle d'environ 135· moins deux fois l'angle de pseudo-incidence brewstérienne.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/955,126 US5973864A (en) | 1997-10-21 | 1997-10-21 | High-finesse optical resonator for cavity ring-down spectroscopy based upon Brewster's angle prism retroreflectors |
| US08/955,126 | 1997-10-21 | ||
| PCT/US1998/020062 WO1999020996A1 (fr) | 1997-10-21 | 1998-09-25 | Resonateur optique pour spectroscopie par abaissement d'anneau de cavite avec retroreflecteurs a prismes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2304179A1 true CA2304179A1 (fr) | 1999-04-29 |
Family
ID=25496421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002304179A Abandoned CA2304179A1 (fr) | 1997-10-21 | 1998-09-25 | Resonateur optique pour spectroscopie par abaissement d'anneau de cavite avec retroreflecteurs a prismes |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US5973864A (fr) |
| EP (1) | EP1025430B1 (fr) |
| JP (1) | JP4195551B2 (fr) |
| KR (1) | KR100600126B1 (fr) |
| CA (1) | CA2304179A1 (fr) |
| DE (1) | DE69828896T2 (fr) |
| WO (1) | WO1999020996A1 (fr) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5973864A (en) * | 1997-10-21 | 1999-10-26 | Trustees Of Princeton University | High-finesse optical resonator for cavity ring-down spectroscopy based upon Brewster's angle prism retroreflectors |
| US6172823B1 (en) * | 1997-10-21 | 2001-01-09 | Trustees Of Princeton University | Mode matching for cavity ring-down spectroscopy based upon Brewster's angle prism retroreflectors |
| US6172824B1 (en) * | 1997-10-21 | 2001-01-09 | Trustees Of Princeton University | Low loss prism retroreflectors for relative index of refraction less than the square root of 2 |
| JP3890128B2 (ja) * | 1997-10-28 | 2007-03-07 | 沖電気工業株式会社 | 反射型プリズム |
| US6587286B1 (en) * | 1999-08-27 | 2003-07-01 | James A. Townsend | Circular prism light capacitor |
| US6201609B1 (en) * | 1999-08-27 | 2001-03-13 | Zygo Corporation | Interferometers utilizing polarization preserving optical systems |
| US6781696B1 (en) | 1999-10-06 | 2004-08-24 | The Board Of Regents For Oklahoma State University | Apparatus and method for a microsphere whispering-gallery mode evanescent-wave sensor |
| US6727492B1 (en) | 2000-01-13 | 2004-04-27 | Regents Of The University Of Colorado | Cavity ringdown spectroscopy system using differential heterodyne detection |
| US6392753B1 (en) | 2000-05-25 | 2002-05-21 | Corning Incorporated | Accelerated damage testing method and apparatus for low loss optical materials |
| US6782337B2 (en) | 2000-09-20 | 2004-08-24 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension an a presence of defects on a specimen |
| US6919957B2 (en) | 2000-09-20 | 2005-07-19 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen |
| US7130029B2 (en) | 2000-09-20 | 2006-10-31 | Kla-Tencor Technologies Corp. | Methods and systems for determining an adhesion characteristic and a thickness of a specimen |
| US7106425B1 (en) | 2000-09-20 | 2006-09-12 | Kla-Tencor Technologies Corp. | Methods and systems for determining a presence of defects and a thin film characteristic of a specimen |
| US6673637B2 (en) | 2000-09-20 | 2004-01-06 | Kla-Tencor Technologies | Methods and systems for determining a presence of macro defects and overlay of a specimen |
| US6891627B1 (en) | 2000-09-20 | 2005-05-10 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension and overlay of a specimen |
| US6694284B1 (en) | 2000-09-20 | 2004-02-17 | Kla-Tencor Technologies Corp. | Methods and systems for determining at least four properties of a specimen |
| US7349090B2 (en) | 2000-09-20 | 2008-03-25 | Kla-Tencor Technologies Corp. | Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography |
| US6812045B1 (en) | 2000-09-20 | 2004-11-02 | Kla-Tencor, Inc. | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation |
| US6633831B2 (en) | 2000-09-20 | 2003-10-14 | Kla Tencor Technologies | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen |
| JP2002250893A (ja) * | 2001-02-23 | 2002-09-06 | Ricoh Opt Ind Co Ltd | 光ビーム合成方法・光ビーム合成プリズム・マルチビーム光源装置 |
| US7046362B2 (en) * | 2001-12-12 | 2006-05-16 | Trustees Of Princeton University | Fiber-optic based cavity ring-down spectroscopy apparatus |
| US20040118997A1 (en) * | 2001-12-12 | 2004-06-24 | Lehmann Kevin K. | Tapered fiber optic strain gauge using cavity ring-down spectroscopy |
| US7352468B2 (en) * | 2001-12-12 | 2008-04-01 | Trustees Of Princeton University | Cavity ring-down detection of surface plasmon resonance in an optical fiber resonator |
| US7318909B2 (en) * | 2001-12-12 | 2008-01-15 | Trustees Of Princeton University | Method and apparatus for enhanced evanescent field exposure in an optical fiber resonator for spectroscopic detection and measurement of trace species |
| EP1429136A1 (fr) * | 2002-02-21 | 2004-06-16 | Matsushita Electric Industrial Co., Ltd. | Dispositif permettant de mesurer des donnees biologiques et procede de mesure de donnees biologiques |
| US6979088B2 (en) | 2002-06-11 | 2005-12-27 | The United States Of America As Represented By The Secretary Of The Navy | Multipass optical retroreflector and method of using |
| US20040169725A1 (en) * | 2003-02-18 | 2004-09-02 | Sherman John C. | Astigmatism tester for reflective concave surfaces |
| US7091506B2 (en) * | 2003-04-21 | 2006-08-15 | Rensselaer Polytech Inst | Semiconductor surface-field emitter for T-ray generation |
| CN100368854C (zh) * | 2003-09-19 | 2008-02-13 | 苏州信达光电科技有限公司 | 可改变观测角度的转角镜 |
| US20050062972A1 (en) * | 2003-09-22 | 2005-03-24 | Krusen Calvin R. | System and method for cavity ring-down spectroscopy using continuously varying continuous wave excitation |
| US6980358B2 (en) * | 2003-09-29 | 2005-12-27 | Coherent, Inc. | Turning prism for ultraviolet radiation |
| US20050122523A1 (en) * | 2003-12-03 | 2005-06-09 | Wen-Bin Yan | Device and method of trace gas analysis using cavity ring-down spectroscopy |
| US7113286B2 (en) * | 2003-12-03 | 2006-09-26 | Tiger Optics, Llc | Apparatus and method for improved analysis of liquids by continuous wave-cavity ring down spectroscopy |
| US20050238078A1 (en) * | 2004-04-23 | 2005-10-27 | Pipino Andrew C | Optical resonator produced by optical contacting to join optical elements and use thereof, for example, for chemical and biochemical detection in liquids |
| US7569823B2 (en) | 2006-11-10 | 2009-08-04 | The George Washington University | Compact near-IR and mid-IR cavity ring down spectroscopy device |
| US7541586B2 (en) | 2006-11-10 | 2009-06-02 | The George Washington University | Compact near-IR and mid-IR cavity ring down spectroscopy device |
| US7668420B2 (en) * | 2007-07-26 | 2010-02-23 | Hewlett-Packard Development Company, L.P. | Optical waveguide ring resonator with an intracavity active element |
| KR100903133B1 (ko) * | 2007-12-17 | 2009-06-16 | 한국전자통신연구원 | 광공동을 이용한 고감도 혼탁도 센서 및 센싱 방법 |
| US8284815B2 (en) * | 2008-10-21 | 2012-10-09 | Cymer, Inc. | Very high power laser chamber optical improvements |
| US8327686B2 (en) * | 2010-03-02 | 2012-12-11 | Li-Cor, Inc. | Method and apparatus for the photo-acoustic identification and quantification of analyte species in a gaseous or liquid medium |
| US8665442B2 (en) | 2011-08-18 | 2014-03-04 | Li-Cor, Inc. | Cavity enhanced laser based isotopic gas analyzer |
| US8659759B2 (en) | 2011-08-25 | 2014-02-25 | Li-Cor, Inc. | Laser based cavity enhanced optical absorption gas analyzer |
| US8659758B2 (en) | 2011-10-04 | 2014-02-25 | Li-Cor, Inc. | Laser based cavity enhanced optical absorption gas analyzer with laser feedback optimization |
| US9194742B2 (en) | 2012-11-02 | 2015-11-24 | Li-Cor, Inc. | Cavity enhanced laser based gas analyzer systems and methods |
| US8885167B2 (en) | 2012-11-02 | 2014-11-11 | Li-Cor, Inc. | Cavity enhanced laser based gas analyzer systems and methods |
| US9207121B2 (en) | 2013-09-11 | 2015-12-08 | Tiger Optics, Llc | Cavity-enhanced frequency comb spectroscopy system employing a prism cavity |
| US9851570B2 (en) | 2014-09-18 | 2017-12-26 | Ipg Photonics Corporation | Beam shaping of high intensity high frequency optical output |
| CN104237148A (zh) * | 2014-09-29 | 2014-12-24 | 山西大学 | 基于锁模飞秒激光的人体健康监测方法与装置 |
| WO2016054206A1 (fr) * | 2014-09-30 | 2016-04-07 | Li-Cor, Inc. | Éléments d'arrêt de faisceau laser et systèmes de spectroscopie les comprenant |
| CN105445196A (zh) * | 2014-12-17 | 2016-03-30 | 邓文平 | 样品测量池 |
| CN105067565B (zh) * | 2015-08-28 | 2017-12-19 | 清华大学 | 一种基于飞秒光频梳的激光腔衰荡气体光谱测量系统 |
| CN105334556A (zh) * | 2015-12-01 | 2016-02-17 | 苏州谱道光电科技有限公司 | 光学谐振腔用反射棱镜及其光学谐振腔和光谱测量仪 |
| US10162087B2 (en) * | 2016-04-11 | 2018-12-25 | Nikon Research Corporation Of America | Optical system with a frustrated isotropic block |
| US10488228B2 (en) * | 2016-04-11 | 2019-11-26 | Nikon Corporation | Transparent-block encoder head with isotropic wedged elements |
| US10481348B2 (en) * | 2016-09-09 | 2019-11-19 | miDiagnostics NV | Optical system for coupling light into a waveguide |
| US10310057B2 (en) * | 2016-12-29 | 2019-06-04 | ShengHua GAN | Distance meter telescope |
| CN114858276B (zh) * | 2022-07-07 | 2022-09-09 | 南京航空航天大学 | 多端口宽谱整形器件及计算式光谱仪 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| NL126444C (fr) * | 1963-04-22 | 1900-01-01 | ||
| US3434073A (en) * | 1964-02-24 | 1969-03-18 | Philco Ford Corp | Rapid acting laser q-switch |
| US4746201A (en) * | 1967-03-06 | 1988-05-24 | Gordon Gould | Polarizing apparatus employing an optical element inclined at brewster's angle |
| US4161436A (en) * | 1967-03-06 | 1979-07-17 | Gordon Gould | Method of energizing a material |
| US3982203A (en) * | 1973-12-28 | 1976-09-21 | Texas Instruments Incorporated | Method of preventing post pulsing of Q-switched laser |
| US4677639A (en) * | 1977-12-12 | 1987-06-30 | Laser Photonics, Inc. | Laser device |
| JPS5492789A (en) * | 1977-12-29 | 1979-07-23 | Fujitsu Ltd | Gas analytical method by infrared ray |
| US4525034A (en) * | 1982-12-07 | 1985-06-25 | Simmons Clarke V | Polarizing retroreflecting prism |
| US4564949A (en) * | 1982-12-13 | 1986-01-14 | Spectron Development Laboratories | Folded cavity laser for holography |
| US4740986A (en) * | 1985-12-20 | 1988-04-26 | Hughes Aircraft Company | Laser resonator |
| JPS6313386A (ja) * | 1986-07-04 | 1988-01-20 | Hamamatsu Photonics Kk | 短パルスレ−ザ光発生装置 |
| JP3095884B2 (ja) * | 1992-05-29 | 2000-10-10 | ホーチキ株式会社 | 光電式分離型煙感知器 |
| US5276548A (en) * | 1992-12-01 | 1994-01-04 | Eli Margalith | Ring cavity optical parametric apparatus |
| US5463493A (en) * | 1993-01-19 | 1995-10-31 | Mvm Electronics | Acousto-optic polychromatic light modulator |
| US5483342A (en) * | 1993-06-25 | 1996-01-09 | Hughes Aircraft Company | Polarization rotator with frequency shifting phase conjugate mirror and simplified interferometric output coupler |
| US5438420A (en) * | 1993-08-09 | 1995-08-01 | Vickers, Incorporated | Monitoring of fluid contamination level wherein the light energy is focused on the fluid passage means |
| US5528040A (en) * | 1994-11-07 | 1996-06-18 | Trustees Of Princeton University | Ring-down cavity spectroscopy cell using continuous wave excitation for trace species detection |
| US5912740A (en) * | 1997-06-20 | 1999-06-15 | The Board Of Trustees Of The Leland Stanford Junior University | Ring resonant cavities for spectroscopy |
| US5973864A (en) * | 1997-10-21 | 1999-10-26 | Trustees Of Princeton University | High-finesse optical resonator for cavity ring-down spectroscopy based upon Brewster's angle prism retroreflectors |
| US5835231A (en) * | 1997-10-31 | 1998-11-10 | The United States Of America As Represented By The Secretary Of Commerce | Broad band intra-cavity total reflection chemical sensor |
-
1997
- 1997-10-21 US US08/955,126 patent/US5973864A/en not_active Expired - Lifetime
-
1998
- 1998-09-25 WO PCT/US1998/020062 patent/WO1999020996A1/fr not_active Ceased
- 1998-09-25 KR KR1020007004303A patent/KR100600126B1/ko not_active Expired - Fee Related
- 1998-09-25 JP JP2000517266A patent/JP4195551B2/ja not_active Expired - Fee Related
- 1998-09-25 DE DE69828896T patent/DE69828896T2/de not_active Expired - Lifetime
- 1998-09-25 CA CA002304179A patent/CA2304179A1/fr not_active Abandoned
- 1998-09-25 EP EP98948539A patent/EP1025430B1/fr not_active Expired - Lifetime
-
1999
- 1999-10-04 US US09/412,069 patent/US6097555A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| HK1030051A1 (en) | 2001-04-20 |
| DE69828896T2 (de) | 2006-01-12 |
| JP4195551B2 (ja) | 2008-12-10 |
| US5973864A (en) | 1999-10-26 |
| WO1999020996A1 (fr) | 1999-04-29 |
| US6097555A (en) | 2000-08-01 |
| EP1025430A1 (fr) | 2000-08-09 |
| EP1025430B1 (fr) | 2005-02-02 |
| KR20010031310A (ko) | 2001-04-16 |
| KR100600126B1 (ko) | 2006-07-13 |
| DE69828896D1 (de) | 2005-03-10 |
| JP2001521146A (ja) | 2001-11-06 |
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| Hendow | Optical Materials and Devices |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |