CA2345489C - Processus de concentration de composes du fluor - Google Patents

Processus de concentration de composes du fluor Download PDF

Info

Publication number: CA2345489C
Authority: CA; Canada
Prior art keywords: fluorine compounds; concentration; liquid; fluorine; heat
Prior art date: 2000-05-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

CA002345489A

Other languages

English (en)

Other versions

CA2345489A1 (fr

Inventor

Zbigniew Tadeusz Fidkowski

John Frederick Cirucci

Rakesh Agrawal

Timothy Edward Conway

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Air Products and Chemicals Inc

Original Assignee

Air Products and Chemicals Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-05-08

Filing date

2001-04-30

Publication date

2005-01-11

2001-04-30 Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc

2001-11-08 Publication of CA2345489A1 publication Critical patent/CA2345489A1/fr

2005-01-11 Application granted granted Critical

2005-01-11 Publication of CA2345489C publication Critical patent/CA2345489C/fr

2021-04-30 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

150000002222 fluorine compounds Chemical class 0.000 title claims abstract description 93
238000000034 method Methods 0.000 title claims abstract description 43
239000007788 liquid Substances 0.000 claims abstract description 53
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 35
239000007789 gas Substances 0.000 claims description 30
238000004821 distillation Methods 0.000 claims description 22
238000012546 transfer Methods 0.000 claims description 20
XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 19
239000003085 diluting agent Substances 0.000 claims description 19
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 18
QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 claims description 18
239000012530 fluid Substances 0.000 claims description 17
TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 17
229910052757 nitrogen Inorganic materials 0.000 claims description 16
239000000203 mixture Substances 0.000 claims description 12
238000003860 storage Methods 0.000 claims description 12
239000001307 helium Substances 0.000 claims description 10
229910052734 helium Inorganic materials 0.000 claims description 10
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 10
229910052786 argon Inorganic materials 0.000 claims description 9
WMIYKQLTONQJES-UHFFFAOYSA-N hexafluoroethane Chemical compound FC(F)(F)C(F)(F)F WMIYKQLTONQJES-UHFFFAOYSA-N 0.000 claims description 9
229910052731 fluorine Inorganic materials 0.000 claims description 7
238000000926 separation method Methods 0.000 claims description 7
150000001875 compounds Chemical class 0.000 claims description 6
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
239000001301 oxygen Substances 0.000 claims description 5
229910052760 oxygen Inorganic materials 0.000 claims description 5
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 4
125000001153 fluoro group Chemical group F* 0.000 claims description 4
239000012141 concentrate Substances 0.000 abstract description 4
239000007791 liquid phase Substances 0.000 description 5
238000004519 manufacturing process Methods 0.000 description 5
YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
238000000998 batch distillation Methods 0.000 description 3
229910001873 dinitrogen Inorganic materials 0.000 description 3
239000011737 fluorine Substances 0.000 description 3
150000008282 halocarbons Chemical class 0.000 description 3
238000000746 purification Methods 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
238000001944 continuous distillation Methods 0.000 description 2
230000001627 detrimental effect Effects 0.000 description 2
238000010790 dilution Methods 0.000 description 2
239000012895 dilution Substances 0.000 description 2
-1 halocarbon compounds Chemical class 0.000 description 2
QYSGYZVSCZSLHT-UHFFFAOYSA-N octafluoropropane Chemical compound FC(F)(F)C(F)(F)C(F)(F)F QYSGYZVSCZSLHT-UHFFFAOYSA-N 0.000 description 2
238000012856 packing Methods 0.000 description 2
238000004094 preconcentration Methods 0.000 description 2
238000005057 refrigeration Methods 0.000 description 2
238000001179 sorption measurement Methods 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
229920004449 Halon® Polymers 0.000 description 1
238000010521 absorption reaction Methods 0.000 description 1
238000010923 batch production Methods 0.000 description 1
239000006227 byproduct Substances 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
238000002144 chemical decomposition reaction Methods 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
239000000110 cooling liquid Substances 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000003795 desorption Methods 0.000 description 1
238000011161 development Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 1
239000007792 gaseous phase Substances 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
229960004065 perflutren Drugs 0.000 description 1
238000012545 processing Methods 0.000 description 1
239000000047 product Substances 0.000 description 1
239000001294 propane Substances 0.000 description 1
238000010926 purge Methods 0.000 description 1
230000009257 reactivity Effects 0.000 description 1
238000011084 recovery Methods 0.000 description 1
230000000630 rising effect Effects 0.000 description 1
238000005549 size reduction Methods 0.000 description 1
239000012808 vapor phase Substances 0.000 description 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1493—Selection of liquid materials for use as absorbents
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/202—Single element halogens
- B01D2257/2027—Fluorine
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Organic Chemistry (AREA)
Oil, Petroleum & Natural Gas (AREA)
Analytical Chemistry (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Inorganic Chemistry (AREA)
Physics & Mathematics (AREA)
Mechanical Engineering (AREA)
Thermal Sciences (AREA)
General Engineering & Computer Science (AREA)
Separation By Low-Temperature Treatments (AREA)
Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Treating Waste Gases (AREA)

CA002345489A 2000-05-08 2001-04-30 Processus de concentration de composes du fluor Expired - Fee Related CA2345489C (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US09/567,164		2000-05-08
US09/567,164 US6457327B1 (en)	2000-05-08	2000-05-08	Process for concentrating fluorine compounds

Publications (2)

Publication Number	Publication Date
CA2345489A1 CA2345489A1 (fr)	2001-11-08
CA2345489C true CA2345489C (fr)	2005-01-11

Family

ID=24265980

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA002345489A Expired - Fee Related CA2345489C (fr)	2000-05-08	2001-04-30	Processus de concentration de composes du fluor

Country Status (8)

Country	Link
US (1)	US6457327B1 (fr)
EP (1)	EP1153885B1 (fr)
JP (1)	JP3481920B2 (fr)
KR (1)	KR100420544B1 (fr)
AT (1)	ATE319653T1 (fr)
CA (1)	CA2345489C (fr)
DE (1)	DE60117635T2 (fr)
ZA (1)	ZA200103626B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7395823B2 (en) *	2004-04-09	2008-07-08	The Boc Group, Inc.	Method and apparatus for local fluorine and nitrogen trifluoride production
JP4846293B2 (ja)	2005-07-28	2011-12-28	昭和電工株式会社	ペンタフルオロエタンの回収方法および該方法を含むペンタフルオロエタンの製造方法
CN113606820B (zh) *	2021-08-27	2022-09-23	中船(邯郸)派瑞特种气体股份有限公司	一种直接与间接制冷相结合的三氟化氮电解气超低温冷阱装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH01261208A (ja)	1988-04-11	1989-10-18	Mitsui Toatsu Chem Inc	三弗化窒素ガスの精製方法
JPH0798648B2 (ja)	1990-01-10	1995-10-25	セントラル硝子株式会社	Ｎｆ３ガスの精製方法
US5150577A (en)	1991-06-11	1992-09-29	Mitchell Mark D	System and method for recovering and purifying a halocarbon composition
US5502969A (en)	1995-02-16	1996-04-02	Praxair Technology, Inc.	Cryogenic rectification system for fluorine compound recovery
US5626023A (en)	1995-02-16	1997-05-06	Praxair Technology, Inc.	Cryogenic rectification system for fluorine compound recovery using additive liquid
JP3532345B2 (ja)	1996-05-14	2004-05-31	日本エア・リキード株式会社	超高純度三弗化窒素製造方法及びその装置
US5779863A (en)	1997-01-16	1998-07-14	Air Liquide America Corporation	Perfluorocompound separation and purification method and system
US5771713A (en)	1997-08-20	1998-06-30	Praxair Technology, Inc.	Cryogenic rectification system for recovery of fluorine compounds
US6458249B2 (en)	1997-11-10	2002-10-01	E. I. Du Pont De Nemours And Company	Process for purifying perfluorinated products

2000
- 2000-05-08 US US09/567,164 patent/US6457327B1/en not_active Expired - Lifetime
2001
- 2001-04-30 CA CA002345489A patent/CA2345489C/fr not_active Expired - Fee Related
- 2001-05-03 KR KR10-2001-0023975A patent/KR100420544B1/ko not_active Expired - Fee Related
- 2001-05-04 ZA ZA200103626A patent/ZA200103626B/xx unknown
- 2001-05-04 EP EP01110134A patent/EP1153885B1/fr not_active Expired - Lifetime
- 2001-05-04 DE DE60117635T patent/DE60117635T2/de not_active Expired - Fee Related
- 2001-05-04 AT AT01110134T patent/ATE319653T1/de not_active IP Right Cessation
- 2001-05-08 JP JP2001136964A patent/JP3481920B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CA2345489A1 (fr)	2001-11-08
KR20010102928A (ko)	2001-11-17
DE60117635D1 (de)	2006-05-04
ZA200103626B (en)	2002-11-04
JP2002013872A (ja)	2002-01-18
DE60117635T2 (de)	2007-01-18
US6457327B1 (en)	2002-10-01
EP1153885A1 (fr)	2001-11-14
KR100420544B1 (ko)	2004-03-02
ATE319653T1 (de)	2006-03-15
EP1153885B1 (fr)	2006-03-08
JP3481920B2 (ja)	2003-12-22

Legal Events

Date	Code	Title	Description
2001-04-30	EEER	Examination request
2010-04-30	MKLA	Lapsed
2023-05-26	MKLA	Lapsed	Effective date: 20100430

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CA2165366C (fr)	1998-12-29	Systeme de rectification cryogenique pour la recuperation de composes fluores
CN1604811A (zh)	2005-04-06	中心二氧化碳纯化器
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KR20160018645A (ko)	2016-02-17	저농도 sf6 가스 회수장치 및 회수방법
KR100498146B1 (ko)	2005-07-01	응축을 이용하는 ｐｆｃ 회수 방법
CA2345489C (fr)	2005-01-11	Processus de concentration de composes du fluor
CA2345873C (fr)	2003-10-28	Purification de trifluorure d'azote par l'intermediaire de distillation cryogenique continue
US5626023A (en)	1997-05-06	Cryogenic rectification system for fluorine compound recovery using additive liquid
US5771713A (en)	1998-06-30	Cryogenic rectification system for recovery of fluorine compounds
US3785120A (en)	1974-01-15	Recovery of purified helium or hydrogen from gas mixtures
JPH0446607B2 (fr)	1992-07-30
EP1048337A1 (fr)	2000-11-02	Récuperation des composés perfluorés présents dans les gaz d'échappement de procédés de fabrication de semi-conducteurs avec recyclage du diluant de la pompe à vide
RU2248321C1 (ru)	2005-03-20	Способ очистки трифторида азота от тетрафторметана
JPH033876B2 (fr)	1991-01-21
JP2927914B2 (ja)	1999-07-28	三弗化窒素ガスの製造方法
KR20240178653A (ko)	2024-12-31	반도체 공정에서 배출된 폐가스를 포집, 정제하여 안전하고 경제적으로 고순도 헬륨과 질소 가스를 생산하는 방법
JP2002029707A (ja)	2002-01-29	Ｆ２ガスの精製方法
HK1014930A (en)	1999-10-08	Perfluorocompound separation and purification method and system