CA2379936A1 - Valve optomecanique et reseau de valves pour communication par fibre optique - Google Patents

Valve optomecanique et reseau de valves pour communication par fibre optique Download PDF

Info

Publication number
CA2379936A1
CA2379936A1 CA002379936A CA2379936A CA2379936A1 CA 2379936 A1 CA2379936 A1 CA 2379936A1 CA 002379936 A CA002379936 A CA 002379936A CA 2379936 A CA2379936 A CA 2379936A CA 2379936 A1 CA2379936 A1 CA 2379936A1
Authority
CA
Canada
Prior art keywords
electrode
substrate
switching
stationary
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002379936A
Other languages
English (en)
Inventor
Igal Roberto Chertkow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Memlink Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd filed Critical Memlink Ltd
Publication of CA2379936A1 publication Critical patent/CA2379936A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
    • H04Q2011/003—Construction using free space propagation (e.g. lenses, mirrors) using switches based on microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0052—Interconnection of switches
    • H04Q2011/0056—Clos
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0052—Interconnection of switches
    • H04Q2011/0058—Crossbar; Matrix

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un commutateur optique pour système microélectromécanique, ce commutateur comprenant un miroir (1) construit sur un substrat (3). Le miroir (1) est mobile en parallèle à la surface du substrat et permet soit le passage d'un rayon avec une incidence d'angle oblique, de préférence 45· par rapport à la surface du miroir (1), sans perturbation au travers d'une partie transparente du substrat, soit la réflexion du rayon sur une sortie alterne.
CA002379936A 1999-07-20 2000-07-19 Valve optomecanique et reseau de valves pour communication par fibre optique Abandoned CA2379936A1 (fr)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US14462899P 1999-07-20 1999-07-20
US60/144,628 1999-07-20
US17049299P 1999-12-13 1999-12-13
US17049499P 1999-12-13 1999-12-13
US17048299P 1999-12-13 1999-12-13
US60/170,494 1999-12-13
US60/170,492 1999-12-13
US60/170,482 1999-12-13
PCT/IL2000/000425 WO2001009653A1 (fr) 1999-07-20 2000-07-19 Valve optomecanique et reseau de valves pour communication par fibre optique

Publications (1)

Publication Number Publication Date
CA2379936A1 true CA2379936A1 (fr) 2001-02-08

Family

ID=27495626

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002379936A Abandoned CA2379936A1 (fr) 1999-07-20 2000-07-19 Valve optomecanique et reseau de valves pour communication par fibre optique

Country Status (5)

Country Link
AU (1) AU6012100A (fr)
CA (1) CA2379936A1 (fr)
GB (1) GB2367906A (fr)
IL (1) IL147521A0 (fr)
WO (1) WO2001009653A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
US6718084B1 (en) 2001-05-10 2004-04-06 Axsun Technologies, Inc. Integrated optical line card protection module
JP3952902B2 (ja) * 2002-08-09 2007-08-01 住友電気工業株式会社 光スイッチ、光分岐挿入装置、光伝送システム及び光スイッチの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325421Y2 (fr) * 1986-03-13 1991-06-03
JP2616683B2 (ja) * 1993-12-28 1997-06-04 日本電気株式会社 変位拡大機構付圧電アクチュエータ
US5742712A (en) * 1996-10-08 1998-04-21 E-Tek Dynamics, Inc. Efficient electromechanical optical switches
US5943454A (en) * 1997-08-15 1999-08-24 Lucent Technologies, Inc. Freespace optical bypass-exchange switch

Also Published As

Publication number Publication date
GB0201261D0 (en) 2002-03-06
GB2367906A (en) 2002-04-17
IL147521A0 (en) 2002-08-14
WO2001009653A1 (fr) 2001-02-08
AU6012100A (en) 2001-02-19

Similar Documents

Publication Publication Date Title
US6253001B1 (en) Optical switches using dual axis micromirrors
US6535663B1 (en) Microelectromechanical device with moving element
US6629461B2 (en) Biased rotatable combdrive actuator methods
US6593677B2 (en) Biased rotatable combdrive devices and methods
US6388789B1 (en) Multi-axis magnetically actuated device
US6995499B2 (en) Micro piezoelectric actuator and method for fabricating same
US20010051014A1 (en) Optical switch employing biased rotatable combdrive devices and methods
EP1041707B1 (fr) Commutateur brasseur avec actionneur électrostatique de surface
US20040113515A1 (en) Systems and methods for overcoming stiction
US20040022483A1 (en) Systems and methods for overcoming stiction using a lever
US20050002084A1 (en) Micro-electro-mechanical systems torsional drive
KR20010048133A (ko) 마이크로 구조체를 이용한 광스위치
US6614581B2 (en) Methods and apparatus for providing a multi-stop micromirror
WO2004066363A2 (fr) Actionneur pour micromiroir a deux axes de rotation
US20020057863A1 (en) Method and system for ultra-fast switching of optical signals
US6522802B2 (en) Optical switch using support structures with both fixed mirrors and pivotable mirrors
EP1151335A2 (fr) Valve optomecanique et reseau de valves pour communication par fibre optique
Biswas et al. MEMS‐based Optical Switches
EP1218790A2 (fr) Dispositif micro-electromecanique a element mobile
WO2001009653A1 (fr) Valve optomecanique et reseau de valves pour communication par fibre optique
Wood et al. MEMS 2-D matrix switch
US20040033011A1 (en) Optical attenuator
JP5612555B2 (ja) マイクロミラー素子およびマイクロミラーアレイ
EP1388743B1 (fr) Commutateur optique, dispositif optique d'insertion/extraction, système de transmission optique et méthode de fabrication du commutateur optique
JP5408817B2 (ja) マイクロミラー素子およびマイクロミラーアレイ

Legal Events

Date Code Title Description
FZDE Discontinued