CA2406543A1 - Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices - Google Patents

Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices Download PDF

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Publication number
CA2406543A1
CA2406543A1 CA002406543A CA2406543A CA2406543A1 CA 2406543 A1 CA2406543 A1 CA 2406543A1 CA 002406543 A CA002406543 A CA 002406543A CA 2406543 A CA2406543 A CA 2406543A CA 2406543 A1 CA2406543 A1 CA 2406543A1
Authority
CA
Canada
Prior art keywords
filter
micromechanical
subsystem
desired frequency
low noise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002406543A
Other languages
English (en)
French (fr)
Inventor
Clark T. C. Nguyen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Michigan System
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2406543A1 publication Critical patent/CA2406543A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/467—Post-fabrication trimming of parameters, e.g. center frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Transceivers (AREA)
  • Transmitters (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Filters And Equalizers (AREA)
  • Networks Using Active Elements (AREA)
  • Amplifiers (AREA)
CA002406543A 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices Abandoned CA2406543A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19906300P 2000-04-20 2000-04-20
US60/199,063 2000-04-20
PCT/US2001/040565 WO2001082478A2 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices

Publications (1)

Publication Number Publication Date
CA2406543A1 true CA2406543A1 (en) 2001-11-01

Family

ID=22736053

Family Applications (4)

Application Number Title Priority Date Filing Date
CA002406518A Abandoned CA2406518A1 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
CA002406543A Abandoned CA2406543A1 (en) 2000-04-20 2001-04-20 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices
CA002406176A Abandoned CA2406176A1 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
CA002406223A Abandoned CA2406223A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CA002406518A Abandoned CA2406518A1 (en) 2000-04-20 2001-04-20 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices

Family Applications After (2)

Application Number Title Priority Date Filing Date
CA002406176A Abandoned CA2406176A1 (en) 2000-04-20 2001-04-20 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
CA002406223A Abandoned CA2406223A1 (en) 2000-04-20 2001-04-20 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus

Country Status (5)

Country Link
EP (4) EP1277277A2 (de)
JP (4) JP2003532322A (de)
AU (6) AU2001255868A1 (de)
CA (4) CA2406518A1 (de)
WO (6) WO2001082476A2 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4176450B2 (ja) 2002-02-13 2008-11-05 松下電器産業株式会社 微小機械振動フィルタ
JP4075503B2 (ja) 2002-07-30 2008-04-16 ソニー株式会社 マイクロマシンおよびその製造方法
WO2004032320A1 (ja) * 2002-10-03 2004-04-15 Sharp Kabushiki Kaisha マイクロ共振装置、マイクロフィルタ装置、マイクロ発振器および無線通信機器
DE10252828B4 (de) * 2002-11-13 2018-07-05 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements
EP1432119A1 (de) * 2002-12-17 2004-06-23 Dialog Semiconductor GmbH Hochqualität- Serienresonanzoszillator
JP4575075B2 (ja) * 2003-08-12 2010-11-04 パナソニック株式会社 電気機械フィルタ、これを用いた電気回路および電気機器
US6870444B1 (en) 2003-08-28 2005-03-22 Motorola, Inc. Electromechanical resonator and method of operating same
KR20060065720A (ko) * 2003-09-19 2006-06-14 소니 가부시끼 가이샤 마이크로 전기 기계 시스템의 공진기 및 그 구동 방법 및그 제조 방법 및 주파수 필터
US6995622B2 (en) * 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
FI20040162A7 (fi) * 2004-02-03 2005-08-04 Nokia Oyj Viitevärähtelijän taajuuden vakauttaminen
JP2005311567A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP2005311568A (ja) * 2004-04-20 2005-11-04 Sony Corp フィルタ装置及び送受信機
JP4586404B2 (ja) 2004-04-28 2010-11-24 ソニー株式会社 フィルタ装置及び送受信機
JP4470606B2 (ja) * 2004-06-18 2010-06-02 ソニー株式会社 高周波素子、並びに通信装置
JP4608984B2 (ja) * 2004-07-21 2011-01-12 ソニー株式会社 微小共振器およびその製造方法、ならびに電子機器
JP2006041911A (ja) * 2004-07-27 2006-02-09 Matsushita Electric Ind Co Ltd Ｍｅｍｓフィルタ装置およびその製造方法
JP4604730B2 (ja) * 2005-01-20 2011-01-05 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4635619B2 (ja) * 2005-01-20 2011-02-23 ソニー株式会社 微小共振器及び通信装置
JP4617904B2 (ja) * 2005-02-01 2011-01-26 ソニー株式会社 微小振動子、半導体装置及び通信装置
JP4645227B2 (ja) * 2005-02-28 2011-03-09 セイコーエプソン株式会社 振動子構造体及びその製造方法
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
JP2007150736A (ja) * 2005-11-28 2007-06-14 Sony Corp 微小電気機械デバイス
JP2007174438A (ja) 2005-12-23 2007-07-05 Toshiba Corp フィルタ回路及びフィルタを備えた無線通信システム
JP4930769B2 (ja) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 発振器
JP2008211420A (ja) * 2007-02-26 2008-09-11 Seiko Instruments Inc 発振器
JP5122888B2 (ja) * 2007-08-27 2013-01-16 セイコーインスツル株式会社 発振子、発振子の製造方法、及び発振器
US7907035B2 (en) * 2007-12-18 2011-03-15 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
EP2291910B1 (de) 2008-06-18 2011-11-09 Nxp B.V. Mems-resonator zum filtern und mischen
FR2939581B1 (fr) * 2008-12-09 2010-11-26 Commissariat Energie Atomique Reseau de resonateurs couples, filtre passe-bande et oscillateur.
FR2942681B1 (fr) * 2009-02-27 2011-05-13 Commissariat Energie Atomique Dispositif resonant micrometrique ou nanometrique a transistors
WO2010150821A1 (ja) * 2009-06-25 2010-12-29 三洋電機株式会社 共振器
CN103905009A (zh) 2012-12-27 2014-07-02 精工爱普生株式会社 振子、振荡器、电子设备、移动体和振子的制造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5869994A (en) * 1992-12-11 1994-07-04 Regents Of The University Of California, The Microelectromechanical signal processors
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
US6049702A (en) * 1997-12-04 2000-04-11 Rockwell Science Center, Llc Integrated passive transceiver section
FI106894B (fi) * 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd Resonaattorirakenteita

Also Published As

Publication number Publication date
JP2004515089A (ja) 2004-05-20
JP2003532320A (ja) 2003-10-28
EP1285491A2 (de) 2003-02-26
JP2003532322A (ja) 2003-10-28
WO2001082476A3 (en) 2002-08-15
EP1290788A2 (de) 2003-03-12
AU2001261036A1 (en) 2001-11-07
AU2001255868A1 (en) 2001-11-07
WO2001082478A3 (en) 2002-04-11
CA2406518A1 (en) 2001-11-01
WO2001082477A3 (en) 2002-04-11
WO2001082477A2 (en) 2001-11-01
AU2001255866A1 (en) 2001-11-07
WO2001082475A3 (en) 2002-02-21
WO2001082476A2 (en) 2001-11-01
AU2001257612A1 (en) 2001-11-07
AU2001255865A1 (en) 2001-11-07
WO2001082467A2 (en) 2001-11-01
WO2001082479A2 (en) 2001-11-01
EP1275201A2 (de) 2003-01-15
WO2001082475A2 (en) 2001-11-01
WO2001082467A3 (en) 2002-04-11
EP1277277A2 (de) 2003-01-22
WO2001082478A2 (en) 2001-11-01
AU2001255867A1 (en) 2001-11-07
WO2001082479A3 (en) 2002-04-11
JP2003532323A (ja) 2003-10-28
CA2406223A1 (en) 2001-11-01
CA2406176A1 (en) 2001-11-01

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Legal Events

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FZDE Discontinued