CA2419309C - Procede de declenchement de commutateurs mems - Google Patents

Procede de declenchement de commutateurs mems Download PDF

Info

Publication number: CA2419309C
Authority: CA; Canada
Prior art keywords: switch; mems; mems switch; electronic signal; pulse
Prior art date: 2001-03-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

CA002419309A

Other languages

English (en)

Other versions

CA2419309A1 (fr

Inventor

Bryant Hichwa

Donald Friedrich

Markus Duelli

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Viavi Solutions Inc

Original Assignee

JDS Uniphase Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-03-16

Filing date

2001-03-16

Publication date

2009-08-18

2001-03-16 Application filed by JDS Uniphase Corp filed Critical JDS Uniphase Corp

2002-09-26 Publication of CA2419309A1 publication Critical patent/CA2419309A1/fr

2009-08-18 Application granted granted Critical

2009-08-18 Publication of CA2419309C publication Critical patent/CA2419309C/fr

2021-03-16 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000000034 method Methods 0.000 title claims description 36
230000003287 optical effect Effects 0.000 claims description 37
230000033001 locomotion Effects 0.000 claims description 7
230000001351 cycling effect Effects 0.000 claims description 2
239000000835 fiber Substances 0.000 description 33
238000003780 insertion Methods 0.000 description 12
230000037431 insertion Effects 0.000 description 12
230000008569 process Effects 0.000 description 9
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
229910052710 silicon Inorganic materials 0.000 description 8
239000010703 silicon Substances 0.000 description 8
230000003068 static effect Effects 0.000 description 8
239000000758 substrate Substances 0.000 description 8
238000006073 displacement reaction Methods 0.000 description 6
238000004519 manufacturing process Methods 0.000 description 6
239000013307 optical fiber Substances 0.000 description 6
230000008859 change Effects 0.000 description 5
238000000576 coating method Methods 0.000 description 5
230000001133 acceleration Effects 0.000 description 4
239000011248 coating agent Substances 0.000 description 4
238000005381 potential energy Methods 0.000 description 4
239000000725 suspension Substances 0.000 description 4
239000010409 thin film Substances 0.000 description 4
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
238000013459 approach Methods 0.000 description 3
239000000463 material Substances 0.000 description 3
230000007246 mechanism Effects 0.000 description 3
239000003921 oil Substances 0.000 description 3
229910052814 silicon oxide Inorganic materials 0.000 description 3
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
230000005540 biological transmission Effects 0.000 description 2
239000013078 crystal Substances 0.000 description 2
238000013461 design Methods 0.000 description 2
238000010586 diagram Methods 0.000 description 2
238000012986 modification Methods 0.000 description 2
230000004048 modification Effects 0.000 description 2
238000000926 separation method Methods 0.000 description 2
238000012360 testing method Methods 0.000 description 2
239000004593 Epoxy Substances 0.000 description 1
230000032683 aging Effects 0.000 description 1
230000003667 anti-reflective effect Effects 0.000 description 1
238000003491 array Methods 0.000 description 1
230000004888 barrier function Effects 0.000 description 1
238000005452 bending Methods 0.000 description 1
230000008901 benefit Effects 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
239000002131 composite material Substances 0.000 description 1
230000006835 compression Effects 0.000 description 1
238000007906 compression Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000000708 deep reactive-ion etching Methods 0.000 description 1
238000000151 deposition Methods 0.000 description 1
238000011161 development Methods 0.000 description 1
230000018109 developmental process Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
230000005686 electrostatic field Effects 0.000 description 1
238000004146 energy storage Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
230000007613 environmental effect Effects 0.000 description 1
239000012530 fluid Substances 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
239000010931 gold Substances 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
230000017525 heat dissipation Effects 0.000 description 1
239000012212 insulator Substances 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
239000000696 magnetic material Substances 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
238000004806 packaging method and process Methods 0.000 description 1
238000011160 research Methods 0.000 description 1
230000004044 response Effects 0.000 description 1
239000000565 sealant Substances 0.000 description 1
230000002123 temporal effect Effects 0.000 description 1

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Micromachines (AREA)
Mechanical Light Control Or Optical Switches (AREA)

CA002419309A 2001-03-16 2001-03-16 Procede de declenchement de commutateurs mems Expired - Lifetime CA2419309C (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/US2001/008431 WO2002075427A1 (fr)	2001-03-16	2001-03-16	Procede de declenchement de commutateurs mems

Publications (2)

Publication Number	Publication Date
CA2419309A1 CA2419309A1 (fr)	2002-09-26
CA2419309C true CA2419309C (fr)	2009-08-18

Family

ID=21742409

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA002419309A Expired - Lifetime CA2419309C (fr)	2001-03-16	2001-03-16	Procede de declenchement de commutateurs mems

Country Status (2)

Country	Link
CA (1)	CA2419309C (fr)
WO (1)	WO2002075427A1 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3644802A1 (de) *	1986-12-31	1988-07-14	Schmitt Hans Juergen	Elektrisch-steuerbarer glasfaser-schalter
US5025346A (en) *	1989-02-17	1991-06-18	Regents Of The University Of California	Laterally driven resonant microstructures
WO1998012589A1 (fr) *	1996-09-20	1998-03-26	Ascom Tech Ag	Commutateur a fibres optiques et procede de production correspondant
US5923798A (en) *	1997-05-15	1999-07-13	Lucent Technologies, Inc.	Micro machined optical switch
US5998906A (en) *	1998-01-13	1999-12-07	Seagate Technology, Inc.	Electrostatic microactuator and method for use thereof
US6256430B1 (en) *	1998-11-23	2001-07-03	Agere Systems Inc.	Optical crossconnect system comprising reconfigurable light-reflecting devices
US6303885B1 (en) *	2000-03-03	2001-10-16	Optical Coating Laboratory, Inc.	Bi-stable micro switch

2001
- 2001-03-16 CA CA002419309A patent/CA2419309C/fr not_active Expired - Lifetime
- 2001-03-16 WO PCT/US2001/008431 patent/WO2002075427A1/fr not_active Ceased

Also Published As

Publication number	Publication date
CA2419309A1 (fr)	2002-09-26
WO2002075427A1 (fr)	2002-09-26

Legal Events

Date	Code	Title	Description
2005-12-19	EEER	Examination request
2021-05-18	MKEX	Expiry	Effective date: 20210316

Publication	Publication Date	Title
US6388359B1 (en)	2002-05-14	Method of actuating MEMS switches
US6303885B1 (en)	2001-10-16	Bi-stable micro switch
US5998906A (en)	1999-12-07	Electrostatic microactuator and method for use thereof
US6535663B1 (en)	2003-03-18	Microelectromechanical device with moving element
US6996306B2 (en)	2006-02-07	Electrostatically operated micro-optical devices and method for manufacturing thereof
US7183633B2 (en)	2007-02-27	Optical cross-connect system
US6771001B2 (en)	2004-08-03	Bi-stable electrostatic comb drive with automatic braking
US6813412B2 (en)	2004-11-02	Mems element having perpendicular portion formed from substrate
Chen et al.	1999	A low voltage micromachined optical switch by stress-induced bending
Liu et al.	1999	Micromachined magnetic actuators using electroplated permalloy
US20020113281A1 (en)	2002-08-22	MEMS device having an actuator with curved electrodes
US6583031B2 (en)	2003-06-24	Method of making a MEMS element having perpendicular portion formed from substrate
JP2002510059A (ja)	2002-04-02	静電マイクロアクチュエータを有する光マイクロスイッチおよびその使用方法
EP1211544A2 (fr)	2002-06-05	Atténuateur optique et séparateur de faisceau variable
US20030012545A1 (en)	2003-01-16	Broad-band variable optical attenuator
CA2419316C (fr)	2009-08-18	Microcommutateur bistable
US6801682B2 (en)	2004-10-05	Latching apparatus for a MEMS optical switch
CA2419309C (fr)	2009-08-18	Procede de declenchement de commutateurs mems
US20040091201A1 (en)	2004-05-13	Optical micro-actuator, optical component using the same, and method for making an optical micro-actuator
Aksyuk et al.	1998	Low insertion loss packaged and fiber-connectorized Si surface-micromachined reflective optical switch
WO2001006543A2 (fr)	2001-01-25	Dispositif micro-electromecanique a element mobile
CA2419380A1 (fr)	2002-09-26	Commutateur a fibres optiques lenticulaire, conique
Fan et al.	2009	A 2x2 mechanical optical switch with a thin MEMS mirror
Hsieh et al.	2006	Low-actuation-voltage MEMS for 2-D optical switches
Hoffmann et al.	2003	Fibre-optical MEMS switches based on bulk silicon micromachining