CA2460129A1 - Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux - Google Patents

Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux Download PDF

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Publication number
CA2460129A1
CA2460129A1 CA002460129A CA2460129A CA2460129A1 CA 2460129 A1 CA2460129 A1 CA 2460129A1 CA 002460129 A CA002460129 A CA 002460129A CA 2460129 A CA2460129 A CA 2460129A CA 2460129 A1 CA2460129 A1 CA 2460129A1
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CA
Canada
Prior art keywords
fpa
display
spectral information
control
spectroscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002460129A
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English (en)
Other versions
CA2460129C (fr
Inventor
Douglas L. Elmore
Mei-Wei Tsao
John F. Rabolt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Delaware
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2001/030724 external-priority patent/WO2003029769A1/fr
Priority claimed from US09/984,137 external-priority patent/US6784428B2/en
Application filed by Individual filed Critical Individual
Publication of CA2460129A1 publication Critical patent/CA2460129A1/fr
Application granted granted Critical
Publication of CA2460129C publication Critical patent/CA2460129C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/40—Measuring the intensity of spectral lines by determining density of a photograph of the spectrum; Spectrography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0294—Multi-channel spectroscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
CA002460129A 2001-10-01 2002-03-19 Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux Expired - Fee Related CA2460129C (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
PCT/US2001/030724 WO2003029769A1 (fr) 2001-10-01 2001-10-01 Appareil et procede de spectroscopie infrarouge en temps reel
USPCT/US01/30724 2001-10-01
US09/984,137 US6784428B2 (en) 2001-10-01 2001-10-29 Apparatus and method for real time IR spectroscopy
US09/984,137 2001-10-29
PCT/US2002/008346 WO2003031923A1 (fr) 2001-10-01 2002-03-19 Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux

Publications (2)

Publication Number Publication Date
CA2460129A1 true CA2460129A1 (fr) 2003-04-17
CA2460129C CA2460129C (fr) 2006-06-13

Family

ID=26680578

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002460129A Expired - Fee Related CA2460129C (fr) 2001-10-01 2002-03-19 Spectroscopie infrarouge de matrice plane (pair) simultanee, a plusieurs faisceaux

Country Status (6)

Country Link
EP (1) EP1432967A4 (fr)
JP (1) JP2005504980A (fr)
KR (2) KR100612530B1 (fr)
AU (1) AU2002258552B2 (fr)
CA (1) CA2460129C (fr)
WO (1) WO2003031923A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200256790A1 (en) * 2016-02-01 2020-08-13 Micro Detect, Inc Uv solid state detection and methods therefor

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WO2005115737A2 (fr) * 2004-03-22 2005-12-08 Quantaspec Inc. Systeme et procede de detection et d'identification d'analyte
CA2566799C (fr) * 2004-05-14 2019-02-12 Chemometec A/S Procede et systeme d'evaluation d'echantillons
US7336357B2 (en) 2004-08-13 2008-02-26 University Of Pittsburgh Multi-channel dual phase lock-in optical spectrometer
US20090118601A1 (en) * 2004-09-29 2009-05-07 University Of Delaware Ir spectrographic apparatus and method for diagnosis of disease
KR100757379B1 (ko) 2006-04-16 2007-09-11 한양대학교 산학협력단 화소 광량 조절형 다중채널 분광 타원해석기
JP5222954B2 (ja) * 2007-11-13 2013-06-26 ザイゴ コーポレーション 偏光スキャンを利用した干渉計
US9587804B2 (en) 2012-05-07 2017-03-07 Chia Ming Chen Light control systems and methods
WO2014210502A1 (fr) 2013-06-28 2014-12-31 Chia Ming Chen Commande de fonctionnement de dispositif en fonction de gestes de la main
US9717118B2 (en) 2013-07-16 2017-07-25 Chia Ming Chen Light control systems and methods
WO2015009795A1 (fr) * 2013-07-16 2015-01-22 Chia Ming Chen Systèmes et procédés de commande de lumière
EP3146262A4 (fr) 2014-04-29 2018-03-14 Chia Ming Chen Systèmes et procédés de commande de lumière
RU2572460C1 (ru) * 2014-09-30 2016-01-10 Федеральное государственное бюджетное учреждение науки Специальная астрофизическая обсерватория Российской академии наук Способ сравнительного анализа спектра звезды
FR3059104B1 (fr) * 2016-11-18 2020-12-11 Electricite De France Dispositif et procede d'estimation d'un parametre d'un materiau polymere
US11179035B2 (en) 2018-07-25 2021-11-23 Natus Medical Incorporated Real-time removal of IR LED reflections from an image
FR3097659B1 (fr) * 2019-06-21 2024-04-19 Cailabs Source lumineuse comportant au moins une puce à semi-conducteur portant au moins une diode
US20240019302A1 (en) * 2022-07-15 2024-01-18 Verity Instruments, Inc. Very high resolution spectrometer for monitoring of semiconductor processes

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US4158505A (en) * 1976-12-27 1979-06-19 International Business Machines Corporation Spectrum analyzing system with photodiode array
DE2938844A1 (de) * 1979-09-26 1981-04-23 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur auswertung optischer spektren
JPS6073343A (ja) * 1983-09-30 1985-04-25 Shimadzu Corp 分光光度計
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Publication number Priority date Publication date Assignee Title
US20200256790A1 (en) * 2016-02-01 2020-08-13 Micro Detect, Inc Uv solid state detection and methods therefor

Also Published As

Publication number Publication date
KR20040037219A (ko) 2004-05-04
WO2003031923A1 (fr) 2003-04-17
JP2005504980A (ja) 2005-02-17
EP1432967A4 (fr) 2004-12-22
KR20060028657A (ko) 2006-03-30
AU2002258552B2 (en) 2006-03-09
KR100612530B1 (ko) 2006-08-11
KR100650571B1 (ko) 2006-11-27
EP1432967A1 (fr) 2004-06-30
CA2460129C (fr) 2006-06-13

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Effective date: 20140319