CA2461093C - Ameliorations du rendement quantique dans des detecteurs de pixels actifs - Google Patents
Ameliorations du rendement quantique dans des detecteurs de pixels actifs Download PDFInfo
- Publication number
- CA2461093C CA2461093C CA002461093A CA2461093A CA2461093C CA 2461093 C CA2461093 C CA 2461093C CA 002461093 A CA002461093 A CA 002461093A CA 2461093 A CA2461093 A CA 2461093A CA 2461093 C CA2461093 C CA 2461093C
- Authority
- CA
- Canada
- Prior art keywords
- photodiode
- pixel
- sensor
- area
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 11
- 229920005591 polysilicon Polymers 0.000 claims abstract description 11
- 238000009792 diffusion process Methods 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 8
- 238000007493 shaping process Methods 0.000 abstract 1
- 238000004513 sizing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 3
- 206010034960 Photophobia Diseases 0.000 description 2
- 208000013469 light sensitivity Diseases 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229940000425 combination drug Drugs 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- VLCQZHSMCYCDJL-UHFFFAOYSA-N tribenuron methyl Chemical compound COC(=O)C1=CC=CC=C1S(=O)(=O)NC(=O)N(C)C1=NC(C)=NC(OC)=N1 VLCQZHSMCYCDJL-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA002485328A CA2485328A1 (fr) | 1997-10-06 | 1998-10-05 | Ameliorations du rendement quantique dans des detecteurs de pixels actifs |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/944,794 | 1997-10-06 | ||
| US08/944,794 US6005619A (en) | 1997-10-06 | 1997-10-06 | Quantum efficiency improvements in active pixel sensors |
| CA002305727A CA2305727C (fr) | 1997-10-06 | 1998-10-05 | Ameliorations du rendement quantique dans des detecteurs de pixels actifs |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002305727A Division CA2305727C (fr) | 1997-10-06 | 1998-10-05 | Ameliorations du rendement quantique dans des detecteurs de pixels actifs |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002485328A Division CA2485328A1 (fr) | 1997-10-06 | 1998-10-05 | Ameliorations du rendement quantique dans des detecteurs de pixels actifs |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2461093A1 CA2461093A1 (fr) | 1999-04-15 |
| CA2461093C true CA2461093C (fr) | 2005-02-15 |
Family
ID=32471074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002461093A Expired - Fee Related CA2461093C (fr) | 1997-10-06 | 1998-10-05 | Ameliorations du rendement quantique dans des detecteurs de pixels actifs |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2461093C (fr) |
-
1998
- 1998-10-05 CA CA002461093A patent/CA2461093C/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA2461093A1 (fr) | 1999-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |