CA2485153C - Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion - Google Patents

Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion Download PDF

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Publication number
CA2485153C
CA2485153C CA 2485153 CA2485153A CA2485153C CA 2485153 C CA2485153 C CA 2485153C CA 2485153 CA2485153 CA 2485153 CA 2485153 A CA2485153 A CA 2485153A CA 2485153 C CA2485153 C CA 2485153C
Authority
CA
Canada
Prior art keywords
electrodes
fixed
moving
voltage
electrostatic actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 2485153
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English (en)
Other versions
CA2485153A1 (fr
Inventor
Siyuan He
Ridha Ben Mrad
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Individual
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Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA 2485153 priority Critical patent/CA2485153C/fr
Publication of CA2485153A1 publication Critical patent/CA2485153A1/fr
Application granted granted Critical
Publication of CA2485153C publication Critical patent/CA2485153C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • H02N1/006Electrostatic motors of the gap-closing type
    • H02N1/008Laterally driven motors, e.g. of the comb-drive type
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
CA 2485153 2004-10-14 2004-10-14 Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion Expired - Fee Related CA2485153C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2485153 CA2485153C (fr) 2004-10-14 2004-10-14 Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2485153 CA2485153C (fr) 2004-10-14 2004-10-14 Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion

Publications (2)

Publication Number Publication Date
CA2485153A1 CA2485153A1 (fr) 2006-04-14
CA2485153C true CA2485153C (fr) 2013-06-18

Family

ID=36177424

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2485153 Expired - Fee Related CA2485153C (fr) 2004-10-14 2004-10-14 Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion

Country Status (1)

Country Link
CA (1) CA2485153C (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100237737A1 (en) * 2005-07-07 2010-09-23 Siyuan He Optimized bi-directional electrostatic actuators

Also Published As

Publication number Publication date
CA2485153A1 (fr) 2006-04-14

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Legal Events

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EEER Examination request
MKLA Lapsed

Effective date: 20171016

MKLC Lapsed (correction)

Effective date: 20180105

MKLA Lapsed

Effective date: 20191015