CA2485153C - Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion - Google Patents
Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion Download PDFInfo
- Publication number
- CA2485153C CA2485153C CA 2485153 CA2485153A CA2485153C CA 2485153 C CA2485153 C CA 2485153C CA 2485153 CA2485153 CA 2485153 CA 2485153 A CA2485153 A CA 2485153A CA 2485153 C CA2485153 C CA 2485153C
- Authority
- CA
- Canada
- Prior art keywords
- electrodes
- fixed
- moving
- voltage
- electrostatic actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- 229910052814 silicon oxide Inorganic materials 0.000 description 2
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- 208000037309 Hypomyelination of early myelinating structures Diseases 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2485153 CA2485153C (fr) | 2004-10-14 | 2004-10-14 | Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA 2485153 CA2485153C (fr) | 2004-10-14 | 2004-10-14 | Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2485153A1 CA2485153A1 (fr) | 2006-04-14 |
| CA2485153C true CA2485153C (fr) | 2013-06-18 |
Family
ID=36177424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA 2485153 Expired - Fee Related CA2485153C (fr) | 2004-10-14 | 2004-10-14 | Declencheur bidirectionnel utilisant des forces electrostatiques d'attraction et de repulsion |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2485153C (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100237737A1 (en) * | 2005-07-07 | 2010-09-23 | Siyuan He | Optimized bi-directional electrostatic actuators |
-
2004
- 2004-10-14 CA CA 2485153 patent/CA2485153C/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA2485153A1 (fr) | 2006-04-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20171016 |
|
| MKLC | Lapsed (correction) |
Effective date: 20180105 |
|
| MKLA | Lapsed |
Effective date: 20191015 |