CA2512327C - Fabrication de nanostructures periodiques a grande portee dans le verre - Google Patents
Fabrication de nanostructures periodiques a grande portee dans le verre Download PDFInfo
- Publication number
- CA2512327C CA2512327C CA2512327A CA2512327A CA2512327C CA 2512327 C CA2512327 C CA 2512327C CA 2512327 A CA2512327 A CA 2512327A CA 2512327 A CA2512327 A CA 2512327A CA 2512327 C CA2512327 C CA 2512327C
- Authority
- CA
- Canada
- Prior art keywords
- laser beam
- laser
- transparent
- scanning
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02147—Point by point fabrication, i.e. grating elements induced one step at a time along the fibre, e.g. by scanning a laser beam, arc discharge scanning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Laser Beam Processing (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
Linvention concerne la fabrication de nanostructures périodiques à grande portée de haute qualité, dans un substrat transparent ou semi-transparent, ledit substrat transparent ou semi-transparent étant balayé par un faisceau laser polarisé de façon linéaire généré par un laser femtoseconde et dépassant un seuil prédéterminé dénergie ou dimpulsion sur un tracé de balayage. Des structures limites de sous-diffraction sont formées à titre de plans périodiques de matière modifiée, dans le substrat transparent ou semi-transparent sétendant le long du tracé de balayage. La matière modifiée peut ensuite être moulée chimiquement pour former des cavités.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA2512327A CA2512327C (fr) | 2005-03-30 | 2005-07-19 | Fabrication de nanostructures periodiques a grande portee dans le verre |
| US11/277,381 US7438824B2 (en) | 2005-03-25 | 2006-03-24 | Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA2,503,309 | 2005-03-30 | ||
| CA 2503309 CA2503309A1 (fr) | 2005-03-30 | 2005-03-30 | Fabrication de nanostructures periodiques a grande echelle dans du verre |
| CA2512327A CA2512327C (fr) | 2005-03-30 | 2005-07-19 | Fabrication de nanostructures periodiques a grande portee dans le verre |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2512327A1 CA2512327A1 (fr) | 2006-09-30 |
| CA2512327C true CA2512327C (fr) | 2016-07-12 |
Family
ID=37055063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2512327A Expired - Lifetime CA2512327C (fr) | 2005-03-25 | 2005-07-19 | Fabrication de nanostructures periodiques a grande portee dans le verre |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2512327C (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3138531B1 (fr) * | 2022-07-29 | 2024-06-21 | Commissariat Energie Atomique | Fibre optique comportant un réseau de Bragg |
| CN116217267A (zh) * | 2023-03-24 | 2023-06-06 | 广东省科学院新材料研究所 | 一种氧化铝陶瓷密排缝阵产品及其零件与制备方法 |
-
2005
- 2005-07-19 CA CA2512327A patent/CA2512327C/fr not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CA2512327A1 (fr) | 2006-09-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7438824B2 (en) | Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics | |
| Hnatovsky et al. | Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching | |
| US6884960B2 (en) | Methods for creating optical structures in dielectrics using controlled energy deposition | |
| CA2428187C (fr) | Methode de fabrication de structures submicroniques dans les materiaux dielectriques transparents | |
| Miwa et al. | Femtosecond two-photon stereo-lithography | |
| Wortmann et al. | Micro-and nanostructures inside sapphire by fs-laser irradiation and selective etching | |
| Kawamura et al. | Holographic writing of volume-type microgratings in silica glass by a single chirped laser pulse | |
| Gottmann et al. | Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching | |
| Nedyalkov et al. | Nanostructuring of silicon surface by femtosecond laser pulse mediated with enhanced near-field of gold nanoparticles | |
| Ward et al. | Fabrication of polaritonic structures in LiNbO3 and LiTaO3 using femtosecond laser machining | |
| Paz-Buclatin et al. | Circularly symmetric nanopores in 3D femtosecond laser nanolithography with burst control and the role of energy dose | |
| CA2512327C (fr) | Fabrication de nanostructures periodiques a grande portee dans le verre | |
| Shimotsuma et al. | Three-dimensional nanostructuring of transparent materials by the femtosecond laser irradiation | |
| JP2001236644A (ja) | 固体材料の屈折率を変化させる方法 | |
| Dubov et al. | Point-by-point inscription of 250 nm period structure in bulk fused silica by tightly focused femtosecond UV pulses | |
| US20050167410A1 (en) | Methods for creating optical structures in dielectrics using controlled energy deposition | |
| Mizeikis et al. | Silicon surface processing techniques for micro-systems fabrication | |
| CA2503309A1 (fr) | Fabrication de nanostructures periodiques a grande echelle dans du verre | |
| RU2347739C1 (ru) | Способ получения наноструктур | |
| US7751668B2 (en) | Microstructuring of an optical waveguide for producing functional optical elements | |
| Hu et al. | Self-formation of quasiperiodic void structure in CaF2 induced by femtosecond laser irradiation | |
| JP2005257719A (ja) | 導波路作製方法 | |
| Martínez | Phoxonic crystals: tailoring the light-sound interaction at the nanoscale | |
| Dogan | Mm Scale 3D Silica Waveguide Fabrication Technique for Solar Energy Concentration Systems | |
| Toratani et al. | Femtosecond laser processing of subwavelength-sized voids for compact optical devices |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |