CA2512327C - Fabrication de nanostructures periodiques a grande portee dans le verre - Google Patents

Fabrication de nanostructures periodiques a grande portee dans le verre Download PDF

Info

Publication number
CA2512327C
CA2512327C CA2512327A CA2512327A CA2512327C CA 2512327 C CA2512327 C CA 2512327C CA 2512327 A CA2512327 A CA 2512327A CA 2512327 A CA2512327 A CA 2512327A CA 2512327 C CA2512327 C CA 2512327C
Authority
CA
Canada
Prior art keywords
laser beam
laser
transparent
scanning
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA2512327A
Other languages
English (en)
Other versions
CA2512327A1 (fr
Inventor
David Rayner
Paul Corkum
Ravi Bhardwaj
Eli Simova
Rod Taylor
Cyril Hnatovsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Council of Canada
Original Assignee
National Research Council of Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CA 2503309 external-priority patent/CA2503309A1/fr
Application filed by National Research Council of Canada filed Critical National Research Council of Canada
Priority to CA2512327A priority Critical patent/CA2512327C/fr
Priority to US11/277,381 priority patent/US7438824B2/en
Publication of CA2512327A1 publication Critical patent/CA2512327A1/fr
Application granted granted Critical
Publication of CA2512327C publication Critical patent/CA2512327C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1225Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02057Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02147Point by point fabrication, i.e. grating elements induced one step at a time along the fibre, e.g. by scanning a laser beam, arc discharge scanning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laser Beam Processing (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

Linvention concerne la fabrication de nanostructures périodiques à grande portée de haute qualité, dans un substrat transparent ou semi-transparent, ledit substrat transparent ou semi-transparent étant balayé par un faisceau laser polarisé de façon linéaire généré par un laser femtoseconde et dépassant un seuil prédéterminé dénergie ou dimpulsion sur un tracé de balayage. Des structures limites de sous-diffraction sont formées à titre de plans périodiques de matière modifiée, dans le substrat transparent ou semi-transparent sétendant le long du tracé de balayage. La matière modifiée peut ensuite être moulée chimiquement pour former des cavités.
CA2512327A 2005-03-25 2005-07-19 Fabrication de nanostructures periodiques a grande portee dans le verre Expired - Lifetime CA2512327C (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CA2512327A CA2512327C (fr) 2005-03-30 2005-07-19 Fabrication de nanostructures periodiques a grande portee dans le verre
US11/277,381 US7438824B2 (en) 2005-03-25 2006-03-24 Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CA2,503,309 2005-03-30
CA 2503309 CA2503309A1 (fr) 2005-03-30 2005-03-30 Fabrication de nanostructures periodiques a grande echelle dans du verre
CA2512327A CA2512327C (fr) 2005-03-30 2005-07-19 Fabrication de nanostructures periodiques a grande portee dans le verre

Publications (2)

Publication Number Publication Date
CA2512327A1 CA2512327A1 (fr) 2006-09-30
CA2512327C true CA2512327C (fr) 2016-07-12

Family

ID=37055063

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2512327A Expired - Lifetime CA2512327C (fr) 2005-03-25 2005-07-19 Fabrication de nanostructures periodiques a grande portee dans le verre

Country Status (1)

Country Link
CA (1) CA2512327C (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3138531B1 (fr) * 2022-07-29 2024-06-21 Commissariat Energie Atomique Fibre optique comportant un réseau de Bragg
CN116217267A (zh) * 2023-03-24 2023-06-06 广东省科学院新材料研究所 一种氧化铝陶瓷密排缝阵产品及其零件与制备方法

Also Published As

Publication number Publication date
CA2512327A1 (fr) 2006-09-30

Similar Documents

Publication Publication Date Title
US7438824B2 (en) Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics
Hnatovsky et al. Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching
US6884960B2 (en) Methods for creating optical structures in dielectrics using controlled energy deposition
CA2428187C (fr) Methode de fabrication de structures submicroniques dans les materiaux dielectriques transparents
Miwa et al. Femtosecond two-photon stereo-lithography
Wortmann et al. Micro-and nanostructures inside sapphire by fs-laser irradiation and selective etching
Kawamura et al. Holographic writing of volume-type microgratings in silica glass by a single chirped laser pulse
Gottmann et al. Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching
Nedyalkov et al. Nanostructuring of silicon surface by femtosecond laser pulse mediated with enhanced near-field of gold nanoparticles
Ward et al. Fabrication of polaritonic structures in LiNbO3 and LiTaO3 using femtosecond laser machining
Paz-Buclatin et al. Circularly symmetric nanopores in 3D femtosecond laser nanolithography with burst control and the role of energy dose
CA2512327C (fr) Fabrication de nanostructures periodiques a grande portee dans le verre
Shimotsuma et al. Three-dimensional nanostructuring of transparent materials by the femtosecond laser irradiation
JP2001236644A (ja) 固体材料の屈折率を変化させる方法
Dubov et al. Point-by-point inscription of 250 nm period structure in bulk fused silica by tightly focused femtosecond UV pulses
US20050167410A1 (en) Methods for creating optical structures in dielectrics using controlled energy deposition
Mizeikis et al. Silicon surface processing techniques for micro-systems fabrication
CA2503309A1 (fr) Fabrication de nanostructures periodiques a grande echelle dans du verre
RU2347739C1 (ru) Способ получения наноструктур
US7751668B2 (en) Microstructuring of an optical waveguide for producing functional optical elements
Hu et al. Self-formation of quasiperiodic void structure in CaF2 induced by femtosecond laser irradiation
JP2005257719A (ja) 導波路作製方法
Martínez Phoxonic crystals: tailoring the light-sound interaction at the nanoscale
Dogan Mm Scale 3D Silica Waveguide Fabrication Technique for Solar Energy Concentration Systems
Toratani et al. Femtosecond laser processing of subwavelength-sized voids for compact optical devices

Legal Events

Date Code Title Description
EEER Examination request