CA2580820C - Masque de phase permettant de traiter des fibres optiques, et sa methode de fabrication - Google Patents
Masque de phase permettant de traiter des fibres optiques, et sa methode de fabrication Download PDFInfo
- Publication number
- CA2580820C CA2580820C CA2580820A CA2580820A CA2580820C CA 2580820 C CA2580820 C CA 2580820C CA 2580820 A CA2580820 A CA 2580820A CA 2580820 A CA2580820 A CA 2580820A CA 2580820 C CA2580820 C CA 2580820C
- Authority
- CA
- Canada
- Prior art keywords
- grooves
- phase mask
- pitch
- optical fiber
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims abstract description 52
- 239000013307 optical fiber Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 238000012545 processing Methods 0.000 title claims abstract description 19
- 238000010894 electron beam technology Methods 0.000 claims abstract description 37
- 230000003252 repetitive effect Effects 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 230000001419 dependent effect Effects 0.000 claims abstract description 7
- 230000010363 phase shift Effects 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 abstract description 16
- 239000011295 pitch Substances 0.000 description 56
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 11
- 229910052804 chromium Inorganic materials 0.000 description 11
- 239000011651 chromium Substances 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- LQCIDLXXSFUYSA-UHFFFAOYSA-N cerium(4+);tetranitrate Chemical compound [Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O LQCIDLXXSFUYSA-UHFFFAOYSA-N 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17840597 | 1997-07-03 | ||
| JP178405/1997 | 1997-07-03 | ||
| JP17085698A JP3526215B2 (ja) | 1997-07-03 | 1998-06-18 | 光ファイバー加工用位相マスク及びその製造方法 |
| JP170856/1998 | 1998-06-18 | ||
| CA002264843A CA2264843C (fr) | 1997-07-03 | 1998-07-02 | Masque de phase pour le faconnage de fibres optiques et procede de fabrication |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002264843A Division CA2264843C (fr) | 1997-07-03 | 1998-07-02 | Masque de phase pour le faconnage de fibres optiques et procede de fabrication |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2580820A1 CA2580820A1 (fr) | 1999-01-14 |
| CA2580820C true CA2580820C (fr) | 2010-06-22 |
Family
ID=38024543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2580820A Expired - Lifetime CA2580820C (fr) | 1997-07-03 | 1998-07-02 | Masque de phase permettant de traiter des fibres optiques, et sa methode de fabrication |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA2580820C (fr) |
-
1998
- 1998-07-02 CA CA2580820A patent/CA2580820C/fr not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CA2580820A1 (fr) | 1999-01-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKEX | Expiry |
Effective date: 20180703 |