CA2685544C - Particules poreuses et leurs procedes de fabrication - Google Patents

Particules poreuses et leurs procedes de fabrication Download PDF

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Publication number
CA2685544C
CA2685544C CA2685544A CA2685544A CA2685544C CA 2685544 C CA2685544 C CA 2685544C CA 2685544 A CA2685544 A CA 2685544A CA 2685544 A CA2685544 A CA 2685544A CA 2685544 C CA2685544 C CA 2685544C
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CA
Canada
Prior art keywords
layer
substrate
particles
porous
etching
Prior art date
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Active
Application number
CA2685544A
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English (en)
Other versions
CA2685544A1 (fr
Inventor
Mauro Ferrari
Xuewu Liu
Ming-Cheng Cheng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Texas System
Ohio State University Research Foundation
Original Assignee
University of Texas System
Ohio State University Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/836,004 external-priority patent/US20080311182A1/en
Application filed by University of Texas System, Ohio State University Research Foundation filed Critical University of Texas System
Publication of CA2685544A1 publication Critical patent/CA2685544A1/fr
Application granted granted Critical
Publication of CA2685544C publication Critical patent/CA2685544C/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00—Medicinal preparations characterised by special physical form
    • A61K9/0087—Galenical forms not covered by A61K9/02 - A61K9/7023
    • A61K9/0097—Medicinal compositions released by microdevices, e.g. microelectromechanical systems [MEMS], microdevices comprising chips or microdevices on silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/28—Compounds of silicon
    • C09C1/30—Silicic acid
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/28—Compounds of silicon
    • C09C1/30—Silicic acid
    • C09C1/3081—Treatment with organo-silicon compounds
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00—Medicinal preparations characterised by special physical form
    • A61K9/14—Particulate form, e.g. powders, Processes for size reducing of pure drugs or the resulting products, Pure drug nanoparticles
    • A61K9/16—Agglomerates; Granulates; Microbeadlets ; Microspheres; Pellets; Solid products obtained by spray drying, spray freeze drying, spray congealing,(multiple) emulsion solvent evaporation or extraction
    • A61K9/1605—Excipients; Inactive ingredients
    • A61K9/1611—Inorganic compounds
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00—Medicinal preparations characterised by special physical form
    • A61K9/14—Particulate form, e.g. powders, Processes for size reducing of pure drugs or the resulting products, Pure drug nanoparticles
    • A61K9/16—Agglomerates; Granulates; Microbeadlets ; Microspheres; Pellets; Solid products obtained by spray drying, spray freeze drying, spray congealing,(multiple) emulsion solvent evaporation or extraction
    • A61K9/1682—Processes
    • A61K9/1694—Processes resulting in granules or microspheres of the matrix type containing more than 5% of excipient
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0115—Porous silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/14—Pore volume

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Veterinary Medicine (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Pharmacology & Pharmacy (AREA)
  • Medicinal Chemistry (AREA)
  • Dermatology (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Epidemiology (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Micromachines (AREA)
  • Weting (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Silicon Compounds (AREA)

Abstract

La présente invention concerne une particule qui comprend une première région poreuse et une seconde région poreuse qui est différente de la première région poreuse. L'invention concerne également une particule poreuse qui présente une région poreuse gravée par voie humide et qui présente une couche de germination associée à la gravure humide. L'invention concerne également des procédés de fabrication de particules poreuses.
CA2685544A 2007-04-27 2008-04-28 Particules poreuses et leurs procedes de fabrication Active CA2685544C (fr)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US91435807P 2007-04-27 2007-04-27
US91434807P 2007-04-27 2007-04-27
US60/914,348 2007-04-27
US60/914,358 2007-04-27
US11/836,004 US20080311182A1 (en) 2006-08-08 2007-08-08 Multistage delivery of active agents
US11/836,004 2007-08-08
PCT/US2008/061775 WO2008134637A1 (fr) 2007-04-27 2008-04-28 Particules poreuses et leurs procédés de fabrication

Publications (2)

Publication Number Publication Date
CA2685544A1 CA2685544A1 (fr) 2008-11-06
CA2685544C true CA2685544C (fr) 2016-08-09

Family

ID=41382241

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2685544A Active CA2685544C (fr) 2007-04-27 2008-04-28 Particules poreuses et leurs procedes de fabrication

Country Status (7)

Country Link
EP (1) EP2150493A1 (fr)
JP (2) JP2010526652A (fr)
KR (1) KR20100051591A (fr)
CN (1) CN101778796B (fr)
AU (1) AU2008245496A1 (fr)
CA (1) CA2685544C (fr)
WO (1) WO2008134637A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006028916B4 (de) * 2006-06-23 2015-07-16 Robert Bosch Gmbh Verfahren zur Herstellung poröser Partikel
WO2012065825A2 (fr) 2010-10-29 2012-05-24 Em-Silicon Nano-Technologies, S.L. Matériaux semi-conducteurs nanostructurés, procédé de fabrication de ceux-ci et générateur d'impulsions de courant permettant de mettre en oeuvre ledit procédé
WO2014107704A1 (fr) * 2013-01-07 2014-07-10 William Marsh Rice University Procédés de gravure électrochimique et chimique combinés pour la production de particules de silicium poreux
CN103482566B (zh) * 2013-09-30 2016-01-20 杭州士兰集成电路有限公司 用于mems工艺中的深槽制造方法
GB202012302D0 (en) 2020-08-07 2020-09-23 Kings College Lithiated silicon
CN113638035A (zh) * 2021-07-09 2021-11-12 江苏大学 一种多孔硅-银纳米枝晶颗粒及其制备和sers检测方法

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BR9001378A (pt) * 1989-03-27 1991-04-02 Bend Res Inc Dispositivo para a liberacao controlada de ingrediente ativo
JP3048255B2 (ja) * 1991-05-17 2000-06-05 株式会社トクヤマ 無機複合粒子及びその製造方法
US5277931A (en) * 1992-08-21 1994-01-11 Engelhard Corporation Composite ion-exchange material, preparation and use thereof
JPH06247712A (ja) * 1992-12-28 1994-09-06 Kao Corp セラミックス微粒子の製造方法及びその装置
JP3293736B2 (ja) * 1996-02-28 2002-06-17 キヤノン株式会社 半導体基板の作製方法および貼り合わせ基体
US6107102A (en) 1995-06-07 2000-08-22 Regents Of The University Of California Therapeutic microdevices and methods of making and using same
BR9910623A (pt) * 1998-05-21 2001-10-23 Bio Seal Ltd Partìcula de ação múltipla para estruturação de meios biológicos
GB9815819D0 (en) * 1998-07-22 1998-09-16 Secr Defence Transferring materials into cells and a microneedle array
GB9820163D0 (en) * 1998-09-17 1998-11-11 Sentec Ltd Micro-fabricated coded labels, reading systems and their applications
US6355270B1 (en) 1999-01-11 2002-03-12 The Regents Of The University Of California Particles for oral delivery of peptides and proteins
JP3627908B2 (ja) * 1999-06-09 2005-03-09 日鉄鉱業株式会社 青色粉体およびその製造方法
US6964732B2 (en) * 2000-03-09 2005-11-15 Interuniversitair Microelektronica Centrum (Imec) Method and apparatus for continuous formation and lift-off of porous silicon layers
GB2365769A (en) * 2000-08-18 2002-02-27 Secr Defence Skin preparations containing silicon
JP2002346999A (ja) * 2001-05-24 2002-12-04 Fuji Photo Film Co Ltd 機能性ナノ構造体およびこれを用いた分子素子
DE10161202C1 (de) * 2001-12-13 2003-05-08 Bosch Gmbh Robert Verfahren zur Reduktion der Dicke eines Silizium-Substrates
JP2005013842A (ja) * 2003-06-25 2005-01-20 Asahi Glass Co Ltd 無機質球状体の製造方法
US20070265354A1 (en) * 2004-10-21 2007-11-15 Canham Leigh T Silicon Structure
JP2006159006A (ja) * 2004-12-02 2006-06-22 Sharp Corp マイクロチャネル、マイクロチャネル用構造体およびマイクロチャネルの製造方法
WO2006115122A1 (fr) * 2005-04-20 2006-11-02 Kyoto University Dispositif et procede de controle de charge de particules
WO2007037787A1 (fr) 2005-05-09 2007-04-05 Vesta Research, Ltd. Particules poreuses de silicium
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Also Published As

Publication number Publication date
CA2685544A1 (fr) 2008-11-06
AU2008245496A1 (en) 2008-11-06
JP2013034991A (ja) 2013-02-21
WO2008134637A1 (fr) 2008-11-06
CN101778796A (zh) 2010-07-14
JP2010526652A (ja) 2010-08-05
CN101778796B (zh) 2012-11-14
AU2008245496A8 (en) 2010-01-07
KR20100051591A (ko) 2010-05-17
EP2150493A1 (fr) 2010-02-10

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