CA2801186A1 - Appareil et procede pour la production de nanotubes de carbone sur un substrat en deplacement continu - Google Patents
Appareil et procede pour la production de nanotubes de carbone sur un substrat en deplacement continu Download PDFInfo
- Publication number
- CA2801186A1 CA2801186A1 CA2801186A CA2801186A CA2801186A1 CA 2801186 A1 CA2801186 A1 CA 2801186A1 CA 2801186 A CA2801186 A CA 2801186A CA 2801186 A CA2801186 A CA 2801186A CA 2801186 A1 CA2801186 A1 CA 2801186A1
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- zone
- carbon nanotube
- growth zone
- nanotube growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 221
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 184
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 171
- 239000000758 substrate Substances 0.000 title claims abstract description 107
- 238000000034 method Methods 0.000 title claims description 49
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- 238000010926 purge Methods 0.000 claims description 73
- 229910052751 metal Inorganic materials 0.000 claims description 6
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- 239000007789 gas Substances 0.000 description 113
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- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 13
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000002048 multi walled nanotube Substances 0.000 description 6
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
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- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
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- 229910001374 Invar Inorganic materials 0.000 description 2
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
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- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
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- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
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- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
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- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229920006231 aramid fiber Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910021387 carbon allotrope Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 239000002134 carbon nanofiber Substances 0.000 description 1
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- 239000003733 fiber-reinforced composite Substances 0.000 description 1
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- 229910003472 fullerene Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
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- 239000012212 insulator Substances 0.000 description 1
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- 230000007774 longterm Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 239000006262 metallic foam Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000004375 physisorption Methods 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
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- 239000002243 precursor Substances 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
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- 229910052719 titanium Inorganic materials 0.000 description 1
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- 229910052723 transition metal Inorganic materials 0.000 description 1
- 229910021524 transition metal nanoparticle Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000013316 zoning Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/18—Stationary reactors having moving elements inside
- B01J19/22—Stationary reactors having moving elements inside in the form of endless belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00121—Controlling the temperature by direct heating or cooling
- B01J2219/00123—Controlling the temperature by direct heating or cooling adding a temperature modifying medium to the reactants
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29562410P | 2010-01-15 | 2010-01-15 | |
| US61/295,624 | 2010-01-15 | ||
| US12/714,389 | 2010-02-26 | ||
| PCT/US2010/041873 WO2011087526A1 (fr) | 2010-01-15 | 2010-07-13 | Appareil et procédé pour la production de nanotubes de carbone sur un substrat en déplacement continu |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2801186A1 true CA2801186A1 (fr) | 2011-07-21 |
Family
ID=44304543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2801186A Abandoned CA2801186A1 (fr) | 2010-01-15 | 2010-07-13 | Appareil et procede pour la production de nanotubes de carbone sur un substrat en deplacement continu |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2558623A4 (fr) |
| AU (1) | AU2010341769A1 (fr) |
| CA (1) | CA2801186A1 (fr) |
| WO (1) | WO2011087526A1 (fr) |
| ZA (1) | ZA201300495B (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MX2020002071A (es) | 2017-08-22 | 2020-09-03 | Ntherma Corp | Metodos y dispositivos para sintesis de nanotubos de carbono. |
| AU2018322139B2 (en) | 2017-08-22 | 2024-05-23 | Ntherma Corporation | Graphene nanoribbons, graphene nanoplatelets and mixtures thereof and methods of synthesis |
| RU191901U1 (ru) * | 2017-11-14 | 2019-08-28 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технологический университет "СТАНКИН" (ФГБОУ ВО "МГТУ "СТАНКИН") | Реактор для получения углеродных наноматериалов газофазным химическим осаждением |
| CN116288815B (zh) * | 2023-02-17 | 2025-03-18 | 浙江理工大学桐乡研究院有限公司 | 一种碳纳米管阵列的在线连续纺丝装置及方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040037767A1 (en) * | 2002-08-21 | 2004-02-26 | First Nano, Inc. | Method and apparatus of carbon nanotube fabrication |
| KR100664545B1 (ko) * | 2005-03-08 | 2007-01-03 | (주)씨엔티 | 탄소나노튜브 대량합성장치 및 대량합성방법 |
| KR20090117881A (ko) * | 2007-01-30 | 2009-11-13 | 솔라스타, 인코포레이티드 | 광전지 및 광전지를 제조하는 방법 |
| WO2008153609A1 (fr) * | 2007-02-07 | 2008-12-18 | Seldon Technologies, Inc. | Procédés pour la production de nanotubes de carbone alignés et matériau nanostructuré les contenant |
| GB0805837D0 (en) * | 2008-03-31 | 2008-06-04 | Qinetiq Ltd | Chemical Vapour Deposition Process |
| US9249502B2 (en) * | 2008-06-20 | 2016-02-02 | Sakti3, Inc. | Method for high volume manufacture of electrochemical cells using physical vapor deposition |
| US20100178568A1 (en) * | 2009-01-13 | 2010-07-15 | Nokia Corporation | Process for producing carbon nanostructure on a flexible substrate, and energy storage devices comprising flexible carbon nanostructure electrodes |
-
2010
- 2010-07-13 CA CA2801186A patent/CA2801186A1/fr not_active Abandoned
- 2010-07-13 EP EP10843384.8A patent/EP2558623A4/fr not_active Withdrawn
- 2010-07-13 AU AU2010341769A patent/AU2010341769A1/en not_active Abandoned
- 2010-07-13 WO PCT/US2010/041873 patent/WO2011087526A1/fr not_active Ceased
-
2013
- 2013-01-18 ZA ZA2013/00495A patent/ZA201300495B/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP2558623A4 (fr) | 2014-03-05 |
| EP2558623A1 (fr) | 2013-02-20 |
| WO2011087526A1 (fr) | 2011-07-21 |
| AU2010341769A1 (en) | 2013-03-28 |
| ZA201300495B (en) | 2013-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Dead |
Effective date: 20160713 |