CA3003281A1 - Procedes de production d'heterodiamant et appareil associe - Google Patents

Procedes de production d'heterodiamant et appareil associe Download PDF

Info

Publication number
CA3003281A1
CA3003281A1 CA3003281A CA3003281A CA3003281A1 CA 3003281 A1 CA3003281 A1 CA 3003281A1 CA 3003281 A CA3003281 A CA 3003281A CA 3003281 A CA3003281 A CA 3003281A CA 3003281 A1 CA3003281 A1 CA 3003281A1
Authority
CA
Canada
Prior art keywords
heterodiamond
diamond
unit cell
boron
combinatorial synthesis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA3003281A
Other languages
English (en)
Inventor
Arnold NEWMAN
Daniel Hodes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNIT CELL DIAMOND LLC
Original Assignee
UNIT CELL DIAMOND LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/934,679 external-priority patent/US10258959B2/en
Application filed by UNIT CELL DIAMOND LLC filed Critical UNIT CELL DIAMOND LLC
Publication of CA3003281A1 publication Critical patent/CA3003281A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/25—Diamond
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/25—Diamond
    • C01B32/26—Preparation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1212—Arrangements of the reactor or the reactors
    • B01J2219/1218—Multiple reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1221—Features relating to the reactor or vessel the reactor per se
    • B01J2219/1224—Form of the reactor
    • B01J2219/123—Vessels in the form of a cup
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1209—Features relating to the reactor or vessel
    • B01J2219/1221—Features relating to the reactor or vessel the reactor per se
    • B01J2219/1239—Means for feeding and evacuation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B01J2219/1287—Features relating to the microwave source
    • B01J2219/129—Arrangements thereof
    • B01J2219/1293—Single source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CA3003281A 2015-11-06 2016-11-03 Procedes de production d'heterodiamant et appareil associe Abandoned CA3003281A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/934,679 2015-11-06
US14/934,679 US10258959B2 (en) 2010-08-11 2015-11-06 Methods of producing heterodiamond and apparatus therefor
PCT/US2016/060249 WO2017079388A1 (fr) 2015-11-06 2016-11-03 Procédés de production d'hétérodiamant et appareil associé

Publications (1)

Publication Number Publication Date
CA3003281A1 true CA3003281A1 (fr) 2017-05-11

Family

ID=58662684

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3003281A Abandoned CA3003281A1 (fr) 2015-11-06 2016-11-03 Procedes de production d'heterodiamant et appareil associe

Country Status (3)

Country Link
EP (1) EP3370860A4 (fr)
CA (1) CA3003281A1 (fr)
WO (1) WO2017079388A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113753889B (zh) * 2021-09-22 2022-12-20 铜仁学院 一种只含nv-光学色心的金刚石及其合成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7312562B2 (en) * 2004-02-04 2007-12-25 Chevron U.S.A. Inc. Heterodiamondoid-containing field emission devices
US9783885B2 (en) * 2010-08-11 2017-10-10 Unit Cell Diamond Llc Methods for producing diamond mass and apparatus therefor
US8778295B2 (en) * 2010-08-11 2014-07-15 Daniel Hodes Combinatorial synthesis of diamond
US10258959B2 (en) * 2010-08-11 2019-04-16 Unit Cell Diamond Llc Methods of producing heterodiamond and apparatus therefor
US9061917B2 (en) * 2010-08-11 2015-06-23 Unit Cell Diamond Llc Combinatorial synthesis of the diamond unit cell

Also Published As

Publication number Publication date
EP3370860A1 (fr) 2018-09-12
EP3370860A4 (fr) 2019-05-15
WO2017079388A1 (fr) 2017-05-11

Similar Documents

Publication Publication Date Title
US9783885B2 (en) Methods for producing diamond mass and apparatus therefor
US8877549B2 (en) Low temperature deposition of phase change memory materials
CN109072424A (zh) 使用羰基钼前驱体沉积钼薄膜
TW200832551A (en) Film formation method and apparatus for semiconductor process
EP3116884A1 (fr) Complexes de silylcyclopentadiényle et de silylallyle de molybdène et leur utilisation dans le dépôt de couches minces
TWI427182B (zh) 用於蒸發及傳遞原子層沈積用之溶液前驅物之方法及裝置
KR20210041843A (ko) 금속 함유 박막 형성을 위한 신규 전구체 및 이를 이용한 금속 함유 박막 형성 방법 및 상기 금속 함유 박막을 포함하는 반도체 소자.
US10258959B2 (en) Methods of producing heterodiamond and apparatus therefor
US6730354B2 (en) Forming ferroelectric Pb(Zr,Ti)O3 films
JP2007531256A (ja) 不連続な前駆体の吐出による金属酸化物等の堆積方法及び装置
US20150211126A1 (en) Direct liquid injection of solution based precursors for atomic layer deposition
CA3003281A1 (fr) Procedes de production d'heterodiamant et appareil associe
US20100290945A1 (en) Solution based zirconium precursors for atomic layer deposition
WO2005087975A1 (fr) Carburateur de matiere pour materiel de depot en phase vapeur de produit chimique metallique organique
KR20210064658A (ko) 실리콘 함유 박막 형성용 전구체, 이를 이용한 실리콘 함유 박막 형성 방법 및 상기 실리콘 함유 박막을 포함하는 반도체 소자.
US20140044874A1 (en) Graphene manufacturing system and the method thereof
EP4355926A1 (fr) Précurseurs de gallium pour le dépôt de films d'oxyde contenant du gallium
KR100397046B1 (ko) 박막 증착 장치 및 그 방법
US12297537B2 (en) Compounds and methods for selectively forming metal-containing films
WO2025034675A1 (fr) Procédé d'implantation ionique et systèmes associés
KR20240128699A (ko) 비스무트 산화물 함유 박막 증착용 호모렙틱 비스무트 전구체
JP2022068022A (ja) 形成方法、形成材料、及び新規化合物
JPS63230507A (ja) 高結晶性六方晶窒化ほう素の合成方法
Makarem Designing, modeling, manufacturing, and testing an atomic layer deposition system
SPIEGELMAN et al. Comparison of Water Vapor to Ozone for growth of ALD Films

Legal Events

Date Code Title Description
FZDE Dead

Effective date: 20191105