CA375401A - Appareil a depot de pellicules metalliques - Google Patents

Appareil a depot de pellicules metalliques

Info

Publication number
CA375401A
CA375401A CA375401A CA375401DA CA375401A CA 375401 A CA375401 A CA 375401A CA 375401 A CA375401 A CA 375401A CA 375401D A CA375401D A CA 375401DA CA 375401 A CA375401 A CA 375401A
Authority
CA
Canada
Prior art keywords
metal film
deposition apparatus
film deposition
metal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA375401A
Other languages
English (en)
Inventor
Alexander Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Publication date
Application granted granted Critical
Publication of CA375401A publication Critical patent/CA375401A/fr
Expired legal-status Critical Current

Links

CA375401A Appareil a depot de pellicules metalliques Expired CA375401A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA375401T

Publications (1)

Publication Number Publication Date
CA375401A true CA375401A (fr) 1938-07-26

Family

ID=35379725

Family Applications (1)

Application Number Title Priority Date Filing Date
CA375401A Expired CA375401A (fr) Appareil a depot de pellicules metalliques

Country Status (1)

Country Link
CA (1) CA375401A (fr)

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