CA576325A - Procede de production de silicium pur - Google Patents

Procede de production de silicium pur

Info

Publication number
CA576325A
CA576325A CA576325A CA576325DA CA576325A CA 576325 A CA576325 A CA 576325A CA 576325 A CA576325 A CA 576325A CA 576325D A CA576325D A CA 576325DA CA 576325 A CA576325 A CA 576325A
Authority
CA
Canada
Prior art keywords
pure silicon
producing pure
producing
silicon
pure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA576325A
Other languages
English (en)
Inventor
W. Yodis Anthony
Original Assignee
Allied Chemical Corp
Publication date
Application granted granted Critical
Publication of CA576325A publication Critical patent/CA576325A/fr
Expired legal-status Critical Current

Links

CA576325A Procede de production de silicium pur Expired CA576325A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA576325T

Publications (1)

Publication Number Publication Date
CA576325A true CA576325A (fr) 1959-05-19

Family

ID=35752184

Family Applications (1)

Application Number Title Priority Date Filing Date
CA576325A Expired CA576325A (fr) Procede de production de silicium pur

Country Status (1)

Country Link
CA (1) CA576325A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3279946A (en) * 1962-08-14 1966-10-18 Merck & Co Inc Hydrogen chloride treatment of semiconductor coating chamber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3279946A (en) * 1962-08-14 1966-10-18 Merck & Co Inc Hydrogen chloride treatment of semiconductor coating chamber

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