CA808073A - Air bearing table - Google Patents

Air bearing table

Info

Publication number
CA808073A
CA808073A CA808073A CA808073DA CA808073A CA 808073 A CA808073 A CA 808073A CA 808073 A CA808073 A CA 808073A CA 808073D A CA808073D A CA 808073DA CA 808073 A CA808073 A CA 808073A
Authority
CA
Canada
Prior art keywords
air bearing
bearing table
air
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA808073A
Inventor
M. Diehr George
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optomechanisms Inc
Original Assignee
Optomechanisms Inc
Publication date
Application granted granted Critical
Publication of CA808073A publication Critical patent/CA808073A/en
Expired legal-status Critical Current

Links

CA808073A Air bearing table Expired CA808073A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA808073T

Publications (1)

Publication Number Publication Date
CA808073A true CA808073A (en) 1969-03-11

Family

ID=36278581

Family Applications (1)

Application Number Title Priority Date Filing Date
CA808073A Expired CA808073A (en) Air bearing table

Country Status (1)

Country Link
CA (1) CA808073A (en)

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